[Scan]
initial_time=2016-02-17T17:39:04
final_time=2016-02-17T17:39:24
ip_count=19
run=1032
dataset=5
scan=83
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08788E-4
ql1_vset=
ql1_vmon=-8.19612E-1
ql1_imon=1.38513E-8
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=1.87199E-9
ql3_vset=
ql3_vmon=-9.13067E0
ql3_imon=2.67429E-9
ql4_vset=
ql4_vmon=-9.1414E0
ql4_imon=8.22186E-11
mult1=-9.96141E-9
mult2=-2.61969E-9
rf_tmon=-6.09891E-3
rf_agc=3.22132E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=1.53487E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67329E0
bslens_imon=2.70253E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19754E1
lens5a_imon=1.96386E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.05327E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5367E1
cs_ef1b_imon=2.99784E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02142E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04864E1
cs_ea1_imon=2.46504E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40441E0
lens1_imon=2.59281E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.56709E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=2.98775E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.52556E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.3122E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15589E1
os_ea1_imon=2.28913E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63473E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22968E0
cs_ionrep_imon=1.23651E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91926E2
cs_nozzle_imon=1.93307E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02019E1
cs_anode1_imon=3.10524E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=3.52056E-8
tplens_vset=1.4E-1
tplens_vmon=1.57359E0
tplens_imon=-3.55518E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26051E1
iondef3_imon=1.51683E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.267E1
iondef2_imon=1.57417E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98668E-4
ql6_vset=1.0E-1
ql6_vmon=9.28164E-2
ql6_imon=3.99678E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27746E0
ionrepsh_imon=1.92103E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33722E1
lens5b_imon=2.21516E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75697E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50635E0
os_ea2_imon=-8.7935E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.01019E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71132E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05156E0
os_ef2alow_imon=-2.66996E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08236E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10727E1
os_restr2_imon=3.475E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.26227E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73144E1
iondef1_imon=1.1098E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68136E1
iondef4_imon=1.07836E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.01883E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82809E-1
olens1_imon=8.89849E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10071E0
cs_ionaccel_imon=-1.84105E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56195E1
einzel_imon=7.61936E-6
window_vset=0.0E0
window_vmon=1.49468E-1
window_imon=-9.79699E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82592E2
mask1_imon=2.39167E-4
mask2_vset=0.0E0
mask2_vmon=-1.86422E1
mask2_imon=-7.16609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.4241E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93754E3
defgrida_imon=6.67021E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=7.27899E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33764E0
defgridb_imon=6.0225E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33281E1
os_fil1_imon=9.47502E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06927E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64638E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=9.97651E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.623E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67175E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.00265E-2
os_fil2_imon=-2.61191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81496E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64202E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.61792E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25635E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22613E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32808E-3
inlet_lpb_pmon=2.32887E-2
chamber_ion_pmon=1.72688E-8
chamber_cvt_pmon=2.51669E-3
foreline_cvt_pmon=2.51669E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.81827E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09642E0	-8.19349E-1	-7.98821E-1	-9.1306E0	-9.14211E0	5.45979E-3	9.28879E-2	2.72751E1	-3.26867E1	-3.26164E1	2.67989E1	1.73174E-8	2.51525E-3	2.51525E-3	6.31278E-3	2.34705E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.19445E-1	-7.98559E-1	-9.13079E0	-9.14185E0	5.43594E-3	9.31978E-2	2.72895E1	-3.26663E1	-3.2635E1	2.68213E1	1.72777E-8	2.51225E-3	2.51225E-3	6.32936E-3	2.33905E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09673E0	-8.19516E-1	-7.98297E-1	-9.13069E0	-9.14202E0	5.60284E-3	9.26971E-2	2.73163E1	-3.26461E1	-3.26697E1	2.67966E1	1.72702E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.33297E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.19516E-1	-7.98535E-1	-9.13048E0	-9.14199E0	5.6982E-3	9.30548E-2	2.73257E1	-3.26767E1	-3.26301E1	2.67944E1	1.72143E-8	2.52061E-3	2.52061E-3	6.28592E-3	2.32315E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.19683E-1	-7.98726E-1	-9.1305E0	-9.14197E0	5.62668E-3	9.28164E-2	2.72895E1	-3.26488E1	-3.26248E1	2.68094E1	1.72364E-8	2.51739E-3	2.51739E-3	6.32356E-3	2.33308E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09627E0	-8.19659E-1	-7.98631E-1	-9.13045E0	-9.14204E0	5.57899E-3	9.32217E-2	2.73186E1	-3.26933E1	-3.26211E1	2.67746E1	1.72927E-8	2.51443E-3	2.51443E-3	6.31837E-3	2.33094E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.19564E-1	-7.9844E-1	-9.13048E0	-9.14185E0	5.57899E-3	9.31263E-2	2.73484E1	-3.26771E1	-3.2638E1	2.68058E1	1.72252E-8	2.50898E-3	2.50898E-3	6.31288E-3	2.33094E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09665E0	-8.19421E-1	-7.98535E-1	-9.13045E0	-9.14195E0	5.36442E-3	9.29594E-2	2.73057E1	-3.26885E1	-3.26008E1	2.68154E1	1.72518E-8	2.51248E-3	2.51248E-3	6.32418E-3	2.34527E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.19373E-1	-7.98583E-1	-9.13074E0	-9.14211E0	5.65052E-3	9.2864E-2	2.73234E1	-3.26172E1	-3.26443E1	2.68136E1	1.72511E-8	2.51525E-3	2.51525E-3	6.31278E-3	2.33109E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.19325E-1	-7.98512E-1	-9.13062E0	-9.14197E0	5.55515E-3	9.32455E-2	2.73125E1	-3.26541E1	-3.26636E1	2.67988E1	1.72477E-8	2.52209E-3	2.52209E-3	6.32386E-3	2.32084E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.19206E-1	-7.98631E-1	-9.13043E0	-9.14199E0	5.57899E-3	9.31025E-2	2.73298E1	-3.26965E1	-3.26542E1	2.678E1	1.72546E-8	2.52496E-3	2.52496E-3	6.29542E-3	2.31986E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.19254E-1	-7.98631E-1	-9.13055E0	-9.14192E0	5.48363E-3	9.3174E-2	2.72915E1	-3.26701E1	-3.26364E1	2.67972E1	1.72628E-8	2.51655E-3	2.51655E-3	6.35163E-3	2.31582E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.19397E-1	-7.98988E-1	-9.13069E0	-9.14209E0	5.65052E-3	9.3174E-2	2.73119E1	-3.26735E1	-3.26509E1	2.68075E1	1.72894E-8	2.52266E-3	2.52266E-3	6.31925E-3	2.31721E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.19468E-1	-7.98821E-1	-9.13074E0	-9.14187E0	5.88894E-3	9.3174E-2	2.73393E1	-3.27131E1	-3.26158E1	2.67914E1	1.7275E-8	2.51807E-3	2.51807E-3	6.29365E-3	2.32633E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.19325E-1	-7.98631E-1	-9.13055E0	-9.14202E0	5.8651E-3	9.30071E-2	2.73216E1	-3.26891E1	-3.26183E1	2.67908E1	1.72627E-8	2.51334E-3	2.51334E-3	6.32936E-3	2.33094E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09387E0	-8.19373E-1	-7.98607E-1	-9.13076E0	-9.14195E0	5.29289E-3	9.29832E-2	2.73428E1	-3.26773E1	-3.26178E1	2.6798E1	1.72364E-8	2.52061E-3	2.52061E-3	6.32896E-3	2.32513E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.19325E-1	-7.9875E-1	-9.13081E0	-9.14211E0	5.72205E-3	9.32455E-2	2.73159E1	-3.26645E1	-3.26182E1	2.68022E1	1.70318E-8	2.51525E-3	2.51525E-3	6.31278E-3	2.32711E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.19325E-1	-7.98821E-1	-9.13074E0	-9.14183E0	5.31673E-3	9.31978E-2	2.73099E1	-3.2668E1	-3.26202E1	2.67962E1	1.72702E-8	2.52318E-3	2.52318E-3	6.29645E-3	2.33094E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.19468E-1	-7.98607E-1	-9.13053E0	-9.14178E0	5.17368E-3	9.29117E-2	2.73014E1	-3.26525E1	-3.26649E1	2.67767E1	1.72758E-8	2.52345E-3	2.52345E-3	6.33658E-3	2.32471E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.19612E-1	-7.98678E-1	-9.13067E0	-9.1414E0	5.45979E-3	9.28164E-2	2.73144E1	-3.267E1	-3.26051E1	2.68136E1	1.72688E-8	2.51669E-3	2.51669E-3	6.32808E-3	2.32887E-2