[Scan]
initial_time=2016-02-17T17:39:30
final_time=2016-02-17T17:39:50
ip_count=19
run=1032
dataset=5
scan=84
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08839E-4
ql1_vset=
ql1_vmon=-8.19111E-1
ql1_imon=1.36869E-8
ql2_vset=
ql2_vmon=-7.98869E-1
ql2_imon=1.86428E-9
ql3_vset=
ql3_vmon=-9.13093E0
ql3_imon=2.09684E-9
ql4_vset=
ql4_vmon=-9.14166E0
ql4_imon=1.72472E-10
mult1=-1.00332E-8
mult2=-2.77201E-9
rf_tmon=-5.14394E-3
rf_agc=3.17328E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.62668E-3
ql5_imon=1.55693E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6618E0
bslens_imon=2.46148E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19979E1
lens5a_imon=2.00464E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.05011E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5332E1
cs_ef1b_imon=3.00233E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.0221E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0529E1
cs_ea1_imon=2.43838E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41582E0
lens1_imon=2.72787E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64556E1
os_ef1alow_imon=2.9787E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0373E1
cs_ea2_imon=1.54735E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84429E1
cs_ef1a_imon=3.00233E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.52498E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11164E1
os_restr1_imon=4.28157E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15117E1
os_ea1_imon=2.27854E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63589E1
os_ef1bup_imon=3.07983E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24754E0
cs_ionrep_imon=1.22119E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93499E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01885E1
cs_anode1_imon=3.0979E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.51139E-8
tplens_vset=1.4E-1
tplens_vmon=1.61411E0
tplens_imon=-3.59492E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26382E1
iondef3_imon=1.50124E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27112E1
iondef2_imon=1.58389E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98527E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=3.99634E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24413E0
ionrepsh_imon=1.92883E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33766E1
lens5b_imon=2.19077E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74212E1
cs_ef2b_imon=3.1184E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51564E0
os_ea2_imon=-6.53201E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00493E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71478E1
cs_ef2a_imon=3.17644E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0644E0
os_ef2alow_imon=-2.63019E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86805E-1
os_ef2bup_imon=-5.34436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10672E1
os_restr2_imon=3.49512E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.3167E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01954E1
cs_anode2_imon=2.26523E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73236E1
iondef1_imon=1.1102E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68128E1
iondef4_imon=1.09024E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.01774E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=8.91168E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10871E0
cs_ionaccel_imon=-1.91776E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47164E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56081E1
einzel_imon=7.8199E-6
window_vset=0.0E0
window_vmon=1.90463E-1
window_imon=-1.22271E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86025E1
mask2_imon=-7.605E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.53991E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93753E3
defgrida_imon=6.55633E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.06178E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41027E0
defgridb_imon=6.04404E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33299E1
os_fil1_imon=9.47604E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06767E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64448E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30892E1
cs_fil1_imon=9.98893E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6214E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67192E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.85581E-2
os_fil2_imon=-2.68656E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88919E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.78771E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33897E-1
cs_fil2_imon=-2.06681E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.68246E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22511E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33297E-3
inlet_lpb_pmon=2.32585E-2
chamber_ion_pmon=1.72466E-8
chamber_cvt_pmon=2.51549E-3
foreline_cvt_pmon=2.51549E-3
chamber_tmon=1.40085E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.6384E-1
res40_imon=-2.63019E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=765
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.19492E-1	-7.98273E-1	-9.13088E0	-9.14197E0	5.31673E-3	9.30071E-2	2.7301E1	-3.26666E1	-3.26393E1	2.68007E1	1.72833E-8	2.52131E-3	2.52131E-3	6.33388E-3	2.33318E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.19278E-1	-7.98011E-1	-9.13095E0	-9.14183E0	5.53131E-3	9.27448E-2	2.7312E1	-3.2651E1	-3.26479E1	2.67845E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.19159E-1	-7.97844E-1	-9.13076E0	-9.14187E0	5.65052E-3	9.28879E-2	2.73056E1	-3.26883E1	-3.26183E1	2.67834E1	1.7256E-8	2.51725E-3	2.51725E-3	6.30171E-3	2.34328E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.19063E-1	-7.98035E-1	-9.13079E0	-9.14218E0	5.48363E-3	9.28879E-2	2.72974E1	-3.2659E1	-3.26408E1	2.68268E1	1.72483E-8	2.52293E-3	2.52293E-3	6.31246E-3	2.33156E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.19159E-1	-7.98273E-1	-9.13062E0	-9.14221E0	5.24521E-3	9.29832E-2	2.73303E1	-3.26657E1	-3.262E1	2.67845E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.19135E-1	-7.98488E-1	-9.13062E0	-9.14207E0	5.24521E-3	9.30309E-2	2.72957E1	-3.26398E1	-3.26156E1	2.67808E1	1.72437E-8	2.51525E-3	2.51525E-3	6.31278E-3	2.31721E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-8.1923E-1	-7.98702E-1	-9.13055E0	-9.14257E0	5.60284E-3	9.32693E-2	2.73131E1	-3.26621E1	-3.26309E1	2.67951E1	1.72815E-8	2.51956E-3	2.51956E-3	6.3074E-3	2.32773E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09387E0	-8.19445E-1	-7.98774E-1	-9.1305E0	-9.14226E0	5.24521E-3	9.28164E-2	2.7288E1	-3.26795E1	-3.26032E1	2.68037E1	1.73002E-8	2.51225E-3	2.51225E-3	6.31288E-3	2.32892E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09356E0	-8.19445E-1	-7.98917E-1	-9.13057E0	-9.14202E0	5.45979E-3	9.29594E-2	2.72965E1	-3.26452E1	-3.26525E1	2.67886E1	1.72747E-8	2.51804E-3	2.51804E-3	6.32697E-3	2.33182E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-8.1923E-1	-7.98559E-1	-9.13069E0	-9.14214E0	5.29289E-3	9.29117E-2	2.72856E1	-3.26601E1	-3.26758E1	2.67752E1	1.72704E-8	2.51323E-3	2.51323E-3	6.31242E-3	2.33348E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.19278E-1	-7.98488E-1	-9.13067E0	-9.14197E0	5.53131E-3	9.27448E-2	2.73045E1	-3.26687E1	-3.26963E1	2.68605E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-8.19039E-1	-7.98821E-1	-9.13067E0	-9.14214E0	5.36442E-3	9.28879E-2	2.73398E1	-3.26859E1	-3.26126E1	2.68004E1	1.72869E-8	2.51603E-3	2.51603E-3	6.3074E-3	2.32538E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.19278E-1	-7.98965E-1	-9.13072E0	-9.1424E0	5.19753E-3	9.29832E-2	2.73175E1	-3.26613E1	-3.2668E1	2.68263E1					
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.19325E-1	-7.98965E-1	-9.13095E0	-9.14218E0	5.50747E-3	9.30548E-2	2.72962E1	-3.26432E1	-3.26088E1	2.68631E1	1.72327E-8	2.5228E-3	2.5228E-3	6.32483E-3	2.32618E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.1923E-1	-7.98893E-1	-9.13081E0	-9.14216E0	5.31673E-3	9.27925E-2	2.7321E1	-3.26807E1	-3.26545E1	2.68094E1	1.72483E-8	2.51952E-3	2.51952E-3	6.33021E-3	2.32223E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.19111E-1	-7.98559E-1	-9.13105E0	-9.14195E0	5.29289E-3	9.31025E-2	2.72987E1	-3.26521E1	-3.2647E1	2.68026E1	1.72504E-8	2.52093E-3	2.52093E-3	6.34385E-3	2.33329E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.18872E-1	-7.98559E-1	-9.13115E0	-9.14187E0	5.65052E-3	9.28879E-2	2.7315E1	-3.26708E1	-3.26157E1	2.68107E1	1.73161E-8	2.51411E-3	2.51411E-3	6.32483E-3	2.33046E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.18944E-1	-7.98631E-1	-9.13069E0	-9.14185E0	5.53131E-3	9.28402E-2	2.7341E1	-3.26624E1	-3.26197E1	2.68373E1	1.72609E-8	2.51367E-3	2.51367E-3	6.29991E-3	2.32935E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.19039E-1	-7.98774E-1	-9.13086E0	-9.14187E0	5.48363E-3	9.30786E-2	2.73045E1	-3.26693E1	-3.26374E1	2.67868E1	1.72616E-8	2.51603E-3	2.51603E-3	6.31798E-3	2.33123E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.19111E-1	-7.98869E-1	-9.13093E0	-9.14166E0	5.62668E-3	9.31501E-2	2.73236E1	-3.27112E1	-3.26382E1	2.68128E1	1.72466E-8	2.51549E-3	2.51549E-3	6.33297E-3	2.32585E-2