[Scan]
initial_time=2016-02-17T17:39:57
final_time=2016-02-17T17:40:16
ip_count=19
run=1032
dataset=5
scan=85
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08747E-4
ql1_vset=
ql1_vmon=-8.18777E-1
ql1_imon=1.36879E-8
ql2_vset=
ql2_vmon=-7.99155E-1
ql2_imon=1.90765E-9
ql3_vset=
ql3_vmon=-9.13067E0
ql3_imon=1.78809E-9
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=1.90341E-10
mult1=-9.54025E-9
mult2=-2.75853E-9
rf_tmon=-5.35861E-3
rf_agc=3.33469E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=1.60683E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63674E0
bslens_imon=2.51381E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=1.98079E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05197E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53638E1
cs_ef1b_imon=3.00511E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04648E2
lens23_imon=1.01975E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04779E1
cs_ea1_imon=2.43861E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38878E0
lens1_imon=2.47904E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64481E1
os_ef1alow_imon=2.96897E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04223E1
cs_ea2_imon=1.5567E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84504E1
cs_ef1a_imon=2.99816E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.52548E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11123E1
os_restr1_imon=4.28713E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15502E1
os_ea1_imon=2.28357E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63769E1
os_ef1bup_imon=3.0767E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26137E0
cs_ionrep_imon=1.22576E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.93451E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01688E1
cs_anode1_imon=3.09964E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=3.50942E-8
tplens_vset=1.4E-1
tplens_vmon=1.62289E0
tplens_imon=-4.75731E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26506E1
iondef3_imon=1.50281E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2633E1
iondef2_imon=1.58659E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98429E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=4.01258E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26948E0
ionrepsh_imon=1.93247E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33744E1
lens5b_imon=2.17198E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74814E1
cs_ef2b_imon=3.11423E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50181E0
os_ea2_imon=-4.82684E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00477E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71484E1
cs_ef2a_imon=3.18513E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09974E0
os_ef2alow_imon=-2.68927E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.33142E-1
os_ef2bup_imon=-5.49032E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10596E1
os_restr2_imon=3.47566E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.32188E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.25793E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72972E1
iondef1_imon=1.09749E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68005E1
iondef4_imon=1.09059E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71791E1
olens3_imon=1.02036E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=8.91522E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12609E0
cs_ionaccel_imon=-1.86563E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47132E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5622E1
einzel_imon=7.71564E-6
window_vset=0.0E0
window_vmon=1.62661E-1
window_imon=-1.10455E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39119E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-6.59718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.48825E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.42106E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.67945E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47611E0
defgridb_imon=6.14644E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3328E1
os_fil1_imon=9.46567E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06368E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64579E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30898E1
cs_fil1_imon=9.99044E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62905E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66825E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.84708E-2
os_fil2_imon=-2.79082E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98765E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75221E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37143E-1
cs_fil2_imon=-2.39696E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16518E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22592E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31717E-3
inlet_lpb_pmon=2.32463E-2
chamber_ion_pmon=1.72928E-8
chamber_cvt_pmon=2.51903E-3
foreline_cvt_pmon=2.51903E-3
chamber_tmon=1.40039E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.97058E-1
res40_imon=-2.73444E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=973
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09634E0	-8.18801E-1	-7.98726E-1	-9.13081E0	-9.1419E0	5.60284E-3	9.34601E-2	2.73223E1	-3.26858E1	-3.26076E1	2.67932E1	1.72761E-8	2.52025E-3	2.52025E-3	6.32328E-3	2.33123E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.18825E-1	-7.98535E-1	-9.13093E0	-9.14185E0	5.50747E-3	9.29356E-2	2.73128E1	-3.26933E1	-3.26301E1	2.68136E1	1.72763E-8	2.51758E-3	2.51758E-3	6.3016E-3	2.3369E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.18825E-1	-7.98416E-1	-9.13093E0	-9.1423E0	5.55515E-3	9.29832E-2	2.73099E1	-3.26777E1	-3.26663E1	2.6801E1	1.72879E-8	2.52276E-3	2.52276E-3	6.31278E-3	2.32711E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.19111E-1	-7.98655E-1	-9.13076E0	-9.14223E0	5.43594E-3	9.30548E-2	2.72964E1	-3.26515E1	-3.26382E1	2.67942E1	1.72702E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.32892E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09642E0	-8.18872E-1	-7.98535E-1	-9.13081E0	-9.1423E0	5.48363E-3	9.30309E-2	2.73381E1	-3.26567E1	-3.26544E1	2.67938E1	1.72362E-8	2.51472E-3	2.51472E-3	6.29703E-3	2.33137E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.19039E-1	-7.98965E-1	-9.13084E0	-9.14211E0	5.60284E-3	9.32932E-2	2.7303E1	-3.26813E1	-3.26265E1	2.67951E1	1.72732E-8	2.52169E-3	2.52169E-3	6.32356E-3	2.32513E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.19087E-1	-7.98917E-1	-9.13076E0	-9.14237E0	5.48363E-3	9.30548E-2	2.72795E1	-3.2686E1	-3.26329E1	2.6792E1	1.72493E-8	2.51377E-3	2.51377E-3	6.30255E-3	2.32471E-2
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.19302E-1	-7.98821E-1	-9.13086E0	-9.14221E0	5.4121E-3	9.29117E-2	2.72945E1	-3.26472E1	-3.26254E1	2.67734E1	1.73002E-8	2.51453E-3	2.51453E-3	6.34337E-3	2.3291E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.18992E-1	-7.98702E-1	-9.13138E0	-9.14209E0	5.72205E-3	9.2721E-2	2.72564E1	-3.26825E1	-3.26332E1	2.68112E1	1.72761E-8	2.51393E-3	2.51393E-3	6.32328E-3	2.33123E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.19039E-1	-7.98464E-1	-9.13117E0	-9.14216E0	5.48363E-3	9.30786E-2	2.73639E1	-3.26811E1	-3.26119E1	2.68094E1	1.72177E-8	2.51552E-3	2.51552E-3	6.31288E-3	2.31681E-2
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.1892E-1	-7.9906E-1	-9.13095E0	-9.14216E0	5.17368E-3	9.32932E-2	2.73169E1	-3.2639E1	-3.26543E1	2.68147E1	1.72405E-8	2.52179E-3	2.52179E-3	6.34164E-3	2.33484E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09665E0	-8.18801E-1	-7.98774E-1	-9.13095E0	-9.14178E0	5.10216E-3	9.35555E-2	2.73057E1	-3.26723E1	-3.26044E1	2.68166E1	1.72658E-8	2.51632E-3	2.51632E-3	6.31817E-3	2.32513E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.18706E-1	-7.98821E-1	-9.13103E0	-9.14202E0	5.53131E-3	9.31025E-2	2.73166E1	-3.2661E1	-3.26474E1	2.67984E1	1.72879E-8	2.51739E-3	2.51739E-3	6.3074E-3	2.3291E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.18658E-1	-7.9875E-1	-9.13112E0	-9.14207E0	5.34058E-3	9.34124E-2	2.72945E1	-3.26494E1	-3.26207E1	2.68223E1	1.72139E-8	2.51675E-3	2.51675E-3	6.31135E-3	2.33321E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.18634E-1	-7.98965E-1	-9.13112E0	-9.14199E0	5.50747E-3	9.30071E-2	2.73118E1	-3.26725E1	-3.26395E1	2.67878E1	1.72426E-8	2.51958E-3	2.51958E-3	6.31225E-3	2.33187E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.18849E-1	-7.99203E-1	-9.13079E0	-9.14199E0	5.10216E-3	9.3174E-2	2.73446E1	-3.26549E1	-3.26661E1	2.6828E1	1.729E-8	2.51581E-3	2.51581E-3	6.3074E-3	2.33285E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.18992E-1	-7.98941E-1	-9.13067E0	-9.14204E0	5.26905E-3	9.30071E-2	2.72912E1	-3.26677E1	-3.26457E1	2.67972E1	1.7229E-8	2.51525E-3	2.51525E-3	6.3074E-3	2.32315E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.18753E-1	-7.98917E-1	-9.13076E0	-9.14183E0	5.22137E-3	9.31025E-2	2.72971E1	-3.26545E1	-3.26351E1	2.68267E1	1.72978E-8	2.51077E-3	2.51077E-3	6.30212E-3	2.31954E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.18658E-1	-7.99108E-1	-9.13069E0	-9.14178E0	5.24521E-3	9.32217E-2	2.73033E1	-3.2667E1	-3.26572E1	2.67976E1	1.72504E-8	2.51575E-3	2.51575E-3	6.33863E-3	2.32945E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.18777E-1	-7.99155E-1	-9.13067E0	-9.14199E0	5.24521E-3	9.30309E-2	2.72972E1	-3.2633E1	-3.26506E1	2.68005E1	1.72928E-8	2.51903E-3	2.51903E-3	6.31717E-3	2.32463E-2