[Scan]
initial_time=2016-02-17T17:41:17
final_time=2016-02-17T17:41:37
ip_count=19
run=1032
dataset=5
scan=88
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08804E-4
ql1_vset=
ql1_vmon=-8.17895E-1
ql1_imon=1.36141E-8
ql2_vset=
ql2_vmon=-7.98869E-1
ql2_imon=1.92966E-9
ql3_vset=
ql3_vmon=-9.13084E0
ql3_imon=1.2301E-9
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=2.35581E-10
mult1=-1.02341E-8
mult2=-2.67869E-9
rf_tmon=-4.933E-3
rf_agc=3.30512E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=1.60481E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67635E0
bslens_imon=2.57741E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20061E1
lens5a_imon=1.99208E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.05158E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53766E1
cs_ef1b_imon=2.99387E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02132E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0485E1
cs_ea1_imon=2.43513E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38518E0
lens1_imon=2.74323E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.97477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04129E1
cs_ea2_imon=1.56273E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=2.99604E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.52507E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11226E1
os_restr1_imon=4.29707E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1566E1
os_ea1_imon=2.29346E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24849E0
cs_ionrep_imon=1.24802E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93362E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02001E1
cs_anode1_imon=3.07676E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=3.49577E-8
tplens_vset=1.4E-1
tplens_vmon=1.60058E0
tplens_imon=-2.38062E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26446E1
iondef3_imon=1.50289E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.57715E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.98634E-4
ql6_vset=1.0E-1
ql6_vmon=9.28402E-2
ql6_imon=4.03403E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27914E0
ionrepsh_imon=1.92539E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3373E1
lens5b_imon=2.18423E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52968E0
os_ea2_imon=-6.49026E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70669E1
cs_ef2a_imon=3.17767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08399E0
os_ef2alow_imon=-2.74204E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.17246E-1
os_ef2bup_imon=-5.35491E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=3.47572E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.26119E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73153E1
iondef1_imon=1.0995E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67932E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.02669E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82904E-1
olens1_imon=8.90047E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10251E0
cs_ionaccel_imon=-1.86627E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.471E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56303E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=1.82504E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.86026E1
mask2_imon=-6.6255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.44049E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.62577E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.34315E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39555E0
defgridb_imon=6.38424E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33287E1
os_fil1_imon=9.48295E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07143E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64546E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30895E1
cs_fil1_imon=9.98762E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61807E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67016E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.86735E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03721E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59477E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.53382E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07014E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2251E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.33109E-2
chamber_ion_pmon=1.72879E-8
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.68302E-1
res40_imon=-2.71681E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.18229E-1	-7.98869E-1	-9.13064E0	-9.14209E0	5.45979E-3	9.3174E-2	2.72967E1	-3.26843E1	-3.2638E1	2.67962E1	1.72103E-8	2.51443E-3	2.51443E-3	6.3074E-3	2.32285E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.18157E-1	-7.98941E-1	-9.13072E0	-9.14202E0	5.36442E-3	9.30309E-2	2.73222E1	-3.26646E1	-3.26254E1	2.68118E1	1.72732E-8	2.5131E-3	2.5131E-3	6.31278E-3	2.32315E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.17752E-1	-7.99108E-1	-9.13067E0	-9.14209E0	5.55515E-3	9.33409E-2	2.73169E1	-3.2685E1	-3.26284E1	2.68256E1	1.72137E-8	2.51581E-3	2.51581E-3	6.29067E-3	2.33492E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09642E0	-8.17752E-1	-7.99108E-1	-9.13074E0	-9.14187E0	5.38826E-3	9.3317E-2	2.73027E1	-3.26478E1	-3.2636E1	2.67872E1	1.72437E-8	2.51954E-3	2.51954E-3	6.31817E-3	2.34505E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.17776E-1	-7.98678E-1	-9.13067E0	-9.14242E0	5.34058E-3	9.34362E-2	2.72997E1	-3.26675E1	-3.26476E1	2.67836E1	1.72927E-8	2.52538E-3	2.52538E-3	6.32936E-3	2.3472E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.17871E-1	-7.99012E-1	-9.13076E0	-9.14226E0	5.55515E-3	9.32932E-2	2.72898E1	-3.26836E1	-3.26334E1	2.6828E1	1.73002E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.33905E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.1811E-1	-7.98869E-1	-9.13086E0	-9.14249E0	5.36442E-3	9.30548E-2	2.73285E1	-3.26518E1	-3.26236E1	2.67974E1	1.72852E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.33499E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.17871E-1	-7.99203E-1	-9.13105E0	-9.14221E0	5.26905E-3	9.34124E-2	2.73287E1	-3.26455E1	-3.26478E1	2.68346E1	1.72252E-8	2.52209E-3	2.52209E-3	6.33486E-3	2.34109E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.18014E-1	-7.98678E-1	-9.13115E0	-9.14209E0	5.62668E-3	9.31978E-2	2.73045E1	-3.26657E1	-3.26524E1	2.67968E1	1.7158E-8	2.51552E-3	2.51552E-3	6.32386E-3	2.33297E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.17895E-1	-7.98655E-1	-9.13103E0	-9.14228E0	5.29289E-3	9.30548E-2	2.72937E1	-3.26615E1	-3.26362E1	2.68128E1	1.72103E-8	2.52099E-3	2.52099E-3	6.29645E-3	2.32892E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.18062E-1	-7.98702E-1	-9.13095E0	-9.14254E0	5.45979E-3	9.31263E-2	2.73219E1	-3.26645E1	-3.26236E1	2.6825E1	1.72143E-8	2.52061E-3	2.52061E-3	6.32356E-3	2.33706E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.18014E-1	-7.98583E-1	-9.13115E0	-9.14249E0	5.62668E-3	9.32455E-2	2.73294E1	-3.26671E1	-3.26231E1	2.67909E1	1.72518E-8	2.51359E-3	2.51359E-3	6.31299E-3	2.33699E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.17657E-1	-7.98392E-1	-9.13117E0	-9.14204E0	5.34058E-3	9.30309E-2	2.73563E1	-3.26734E1	-3.26135E1	2.67985E1	1.72362E-8	2.51783E-3	2.51783E-3	6.31779E-3	2.34291E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.17776E-1	-7.98392E-1	-9.13098E0	-9.14223E0	5.43594E-3	9.32455E-2	2.73279E1	-3.2653E1	-3.26651E1	2.68028E1	1.72605E-8	2.51411E-3	2.51411E-3	6.29581E-3	2.32832E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.17943E-1	-7.98559E-1	-9.1311E0	-9.14202E0	5.6982E-3	9.27925E-2	2.72859E1	-3.26476E1	-3.26188E1	2.67968E1	1.73077E-8	2.52099E-3	2.52099E-3	6.32386E-3	2.33297E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.17895E-1	-7.98726E-1	-9.13093E0	-9.14228E0	5.48363E-3	9.26971E-2	2.73231E1	-3.27029E1	-3.26543E1	2.67932E1	1.73002E-8	2.5188E-3	2.5188E-3	6.33486E-3	2.32487E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.18014E-1	-7.98798E-1	-9.13098E0	-9.14261E0	5.50747E-3	9.3317E-2	2.73045E1	-3.2644E1	-3.26284E1	2.68022E1	1.72477E-8	2.52209E-3	2.52209E-3	6.31288E-3	2.32285E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.18038E-1	-7.99155E-1	-9.13086E0	-9.14216E0	5.6982E-3	9.29117E-2	2.73092E1	-3.26762E1	-3.26437E1	2.68151E1	1.72702E-8	2.5188E-3	2.5188E-3	6.29645E-3	2.32892E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.17847E-1	-7.98965E-1	-9.13098E0	-9.14209E0	5.45979E-3	9.2864E-2	2.73399E1	-3.26602E1	-3.26284E1	2.6804E1	1.73248E-8	2.51632E-3	2.51632E-3	6.31817E-3	2.33308E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.17895E-1	-7.98869E-1	-9.13084E0	-9.14195E0	5.126E-3	9.28402E-2	2.73153E1	-3.26585E1	-3.26446E1	2.67932E1	1.72879E-8	2.51847E-3	2.51847E-3	6.31278E-3	2.33109E-2