[Scan]
initial_time=2016-02-17T17:41:44
final_time=2016-02-17T17:42:03
ip_count=19
run=1032
dataset=5
scan=89
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0965E0
qbias_imon=-1.08798E-4
ql1_vset=
ql1_vmon=-8.17847E-1
ql1_imon=1.36993E-8
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=1.91381E-9
ql3_vset=
ql3_vmon=-9.13084E0
ql3_imon=1.14383E-9
ql4_vset=
ql4_vmon=-9.14226E0
ql4_imon=2.35164E-10
mult1=-1.00414E-8
mult2=-2.71262E-9
rf_tmon=-5.09523E-3
rf_agc=3.33636E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=1.59651E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67388E0
bslens_imon=2.56449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19689E1
lens5a_imon=1.96492E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.0504E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53454E1
cs_ef1b_imon=3.00252E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02337E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05253E1
cs_ea1_imon=2.43956E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40441E0
lens1_imon=2.70961E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64536E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04351E1
cs_ea2_imon=1.55293E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8452E1
cs_ef1a_imon=2.98234E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.52606E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11232E1
os_restr1_imon=4.30139E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15193E1
os_ea1_imon=2.28453E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.07604E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23027E0
cs_ionrep_imon=1.22023E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93392E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02163E1
cs_anode1_imon=3.10055E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.49662E-8
tplens_vset=1.4E-1
tplens_vmon=1.56062E0
tplens_imon=-2.8473E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26302E1
iondef3_imon=1.49206E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.60567E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98371E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.01051E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28041E0
ionrepsh_imon=1.92245E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.15959E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74862E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53997E0
os_ea2_imon=-7.69629E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.00609E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71378E1
cs_ef2a_imon=3.17876E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06357E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.26256E-1
os_ef2bup_imon=-5.39816E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10655E1
os_restr2_imon=3.475E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.30742E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.25722E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73003E1
iondef1_imon=1.11405E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67686E1
iondef4_imon=1.09062E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.02251E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82881E-1
olens1_imon=8.91786E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11452E0
cs_ionaccel_imon=-1.96358E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47197E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=1.68088E-1
window_imon=-1.11305E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.8638E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.45242E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.56049E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.14803E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23724E0
defgridb_imon=6.24194E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33305E1
os_fil1_imon=9.49442E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07077E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64656E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=9.99507E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62005E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67156E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.82537E-2
os_fil2_imon=-2.62392E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79694E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74579E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.68999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01608E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22591E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.35742E-2
chamber_ion_pmon=1.72402E-8
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.53285E-1
res40_imon=-2.56184E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.18014E-1	-7.98655E-1	-9.13098E0	-9.14209E0	5.55515E-3	9.31263E-2	2.73157E1	-3.26697E1	-3.26307E1	2.68076E1	1.72658E-8	2.51525E-3	2.51525E-3	6.31278E-3	2.33308E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.18038E-1	-7.98798E-1	-9.13115E0	-9.14211E0	5.53131E-3	9.3174E-2	2.73406E1	-3.26799E1	-3.2626E1	2.67939E1	1.72732E-8	2.52061E-3	2.52061E-3	6.30202E-3	2.34105E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.17823E-1	-7.98607E-1	-9.13122E0	-9.14214E0	5.45979E-3	9.3317E-2	2.73234E1	-3.26661E1	-3.26596E1	2.67839E1	1.72327E-8	2.51952E-3	2.51952E-3	6.31879E-3	2.33063E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.17752E-1	-7.98631E-1	-9.13095E0	-9.14223E0	5.8651E-3	9.31025E-2	2.73087E1	-3.26344E1	-3.2641E1	2.68046E1	1.72471E-8	2.52448E-3	2.52448E-3	6.33388E-3	2.31954E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.17943E-1	-7.99012E-1	-9.13122E0	-9.14235E0	5.55515E-3	9.29832E-2	2.73181E1	-3.27003E1	-3.26508E1	2.6816E1	1.72177E-8	2.51225E-3	2.51225E-3	6.32936E-3	2.32487E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.17847E-1	-7.98965E-1	-9.13105E0	-9.14252E0	5.67436E-3	9.33409E-2	2.72935E1	-3.26664E1	-3.26327E1	2.6798E1	1.73152E-8	2.52538E-3	2.52538E-3	6.3074E-3	2.32487E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.1811E-1	-7.98702E-1	-9.13081E0	-9.14233E0	5.60284E-3	9.34124E-2	2.73069E1	-3.2695E1	-3.26248E1	2.68034E1	1.71953E-8	2.51552E-3	2.51552E-3	6.31837E-3	2.34312E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.18396E-1	-7.98512E-1	-9.13074E0	-9.14199E0	5.31673E-3	9.30309E-2	2.73063E1	-3.26416E1	-3.26158E1	2.68175E1	1.7054E-8	2.5188E-3	2.5188E-3	6.32936E-3	2.33499E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.1811E-1	-7.98535E-1	-9.13095E0	-9.14221E0	5.67436E-3	9.3174E-2	2.72862E1	-3.26809E1	-3.26254E1	2.68142E1	1.72437E-8	2.52276E-3	2.52276E-3	6.31278E-3	2.3291E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.18062E-1	-7.9844E-1	-9.13062E0	-9.14226E0	5.67436E-3	9.28164E-2	2.73263E1	-3.26526E1	-3.26048E1	2.6822E1	1.7229E-8	2.51847E-3	2.51847E-3	6.31817E-3	2.32513E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0965E0	-8.18062E-1	-7.98607E-1	-9.13067E0	-9.14207E0	5.48363E-3	9.30309E-2	2.73299E1	-3.26992E1	-3.26437E1	2.67978E1	1.72402E-8	2.51116E-3	2.51116E-3	6.3074E-3	2.33094E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0965E0	-8.17919E-1	-7.98559E-1	-9.13088E0	-9.14252E0	5.53131E-3	9.33647E-2	2.73153E1	-3.26657E1	-3.26434E1	2.6786E1	1.72511E-8	2.51632E-3	2.51632E-3	6.32356E-3	2.33308E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.178E-1	-7.98535E-1	-9.13081E0	-9.14202E0	5.34058E-3	9.31025E-2	2.72925E1	-3.26867E1	-3.26218E1	2.67998E1	1.72217E-8	2.52061E-3	2.52061E-3	6.32896E-3	2.33905E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.18062E-1	-7.98464E-1	-9.13107E0	-9.14204E0	5.67436E-3	9.27925E-2	2.73122E1	-3.26655E1	-3.25989E1	2.68304E1	1.72777E-8	2.51771E-3	2.51771E-3	6.33486E-3	2.32689E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09711E0	-8.18133E-1	-7.98535E-1	-9.13074E0	-9.14252E0	5.74589E-3	9.31025E-2	2.72871E1	-3.26771E1	-3.2629E1	2.67938E1	1.72477E-8	2.52318E-3	2.52318E-3	6.33486E-3	2.32689E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09673E0	-8.1811E-1	-7.98655E-1	-9.1306E0	-9.14223E0	5.74589E-3	9.32932E-2	2.73039E1	-3.26651E1	-3.2632E1	2.67956E1	1.72805E-8	2.5131E-3	2.5131E-3	6.3074E-3	2.33507E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09642E0	-8.17966E-1	-7.98845E-1	-9.131E0	-9.14214E0	5.48363E-3	9.27448E-2	2.73198E1	-3.26526E1	-3.26472E1	2.6803E1	1.72976E-8	2.51581E-3	2.51581E-3	6.32978E-3	2.33492E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09634E0	-8.18086E-1	-7.98726E-1	-9.131E0	-9.14209E0	5.26905E-3	9.31263E-2	2.73039E1	-3.26697E1	-3.26484E1	2.68221E1	1.72511E-8	2.51954E-3	2.51954E-3	6.32896E-3	2.33109E-2
2.2E1	0.0E0	3.0E0	8.89E2	6.17E2	-2.09565E0	-8.18253E-1	-7.98512E-1	-9.13088E0	-9.14245E0	5.29289E-3	9.28879E-2	2.73351E1	-3.26783E1	-3.26284E1	2.68244E1	1.72616E-8	2.52342E-3	2.52342E-3	6.32328E-3	2.34691E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0965E0	-8.17847E-1	-7.9875E-1	-9.13084E0	-9.14226E0	5.03063E-3	9.31263E-2	2.73003E1	-3.26567E1	-3.26302E1	2.67686E1	1.72402E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.35742E-2