[Scan]
initial_time=2016-02-17T17:42:37
final_time=2016-02-17T17:42:57
ip_count=19
run=1032
dataset=5
scan=91
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08826E-4
ql1_vset=
ql1_vmon=-8.17776E-1
ql1_imon=1.37424E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=1.91572E-9
ql3_vset=
ql3_vmon=-9.13119E0
ql3_imon=9.28259E-10
ql4_vset=
ql4_vmon=-9.14209E0
ql4_imon=2.55728E-10
mult1=-8.92163E-9
mult2=-2.71462E-9
rf_tmon=-6.40503E-3
rf_agc=3.27808E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=1.61892E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66073E0
bslens_imon=2.77928E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19707E1
lens5a_imon=1.98559E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12527E2
lens4a_imon=2.04988E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=2.99784E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02384E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0479E1
cs_ea1_imon=2.45568E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3984E0
lens1_imon=2.58462E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.98306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04285E1
cs_ea2_imon=1.5411E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84142E1
cs_ef1a_imon=2.97874E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.52219E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11568E1
os_restr1_imon=4.30716E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1536E1
os_ea1_imon=2.30247E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63479E1
os_ef1bup_imon=3.06884E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24188E0
cs_ionrep_imon=1.2455E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91868E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=3.11461E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.49283E-8
tplens_vset=1.4E-1
tplens_vmon=1.61259E0
tplens_imon=-4.00285E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26314E1
iondef3_imon=1.49424E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26735E1
iondef2_imon=1.59265E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.98515E-4
ql6_vset=1.0E-1
ql6_vmon=9.29117E-2
ql6_imon=4.00885E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29175E0
ionrepsh_imon=1.91097E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33483E1
lens5b_imon=2.18891E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73714E1
cs_ef2b_imon=3.11352E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50444E0
os_ea2_imon=-5.76927E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00536E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71522E1
cs_ef2a_imon=3.18885E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06117E0
os_ef2alow_imon=-2.72402E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90817E-1
os_ef2bup_imon=-5.36573E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10967E1
os_restr2_imon=3.48113E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.29063E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02043E1
cs_anode2_imon=2.26227E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73129E1
iondef1_imon=1.09409E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67776E1
iondef4_imon=1.07152E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.02434E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=8.90838E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-1.83023E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47151E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=2.01725E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.85876E1
mask2_imon=-6.6255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.7433E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.36621E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.42967E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46172E0
defgridb_imon=6.26888E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33267E1
os_fil1_imon=9.48018E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07654E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64704E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30879E1
cs_fil1_imon=9.99969E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61465E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67228E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.97053E-2
os_fil2_imon=-2.61191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9351E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.56899E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.46174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.59582E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22612E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.33507E-2
chamber_ion_pmon=1.72511E-8
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.15754E-1
res40_imon=-2.68798E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09673E0	-8.17323E-1	-7.9844E-1	-9.13124E0	-9.1424E0	5.62668E-3	9.31025E-2	2.72842E1	-3.26863E1	-3.26109E1	2.6783E1	1.73303E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.32487E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09634E0	-8.178E-1	-7.98297E-1	-9.131E0	-9.14261E0	5.26905E-3	9.30786E-2	2.73302E1	-3.26848E1	-3.26413E1	2.68052E1	1.72217E-8	2.52492E-3	2.52492E-3	6.32356E-3	2.32513E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.18157E-1	-7.98225E-1	-9.13084E0	-9.14221E0	5.34058E-3	9.30309E-2	2.73281E1	-3.2659E1	-3.26325E1	2.67884E1	1.72441E-8	2.51693E-3	2.51693E-3	6.3074E-3	2.32873E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.18419E-1	-7.98798E-1	-9.13081E0	-9.14209E0	5.50747E-3	9.28879E-2	2.73169E1	-3.26632E1	-3.26142E1	2.67949E1	1.71484E-8	2.51417E-3	2.51417E-3	6.33436E-3	2.35909E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.18181E-1	-7.98869E-1	-9.13131E0	-9.14209E0	4.81606E-3	9.29117E-2	2.73051E1	-3.26632E1	-3.26242E1	2.68214E1	1.71557E-8	2.52061E-3	2.52061E-3	6.29665E-3	2.3291E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.18086E-1	-7.98941E-1	-9.13131E0	-9.14209E0	5.126E-3	9.28164E-2	2.72973E1	-3.26729E1	-3.25948E1	2.68142E1	1.7229E-8	2.52061E-3	2.52061E-3	6.31278E-3	2.32513E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.18014E-1	-7.98392E-1	-9.131E0	-9.14237E0	5.79357E-3	9.28164E-2	2.72859E1	-3.26711E1	-3.26014E1	2.67769E1	1.72437E-8	2.51954E-3	2.51954E-3	6.31817E-3	2.34105E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.17728E-1	-7.98535E-1	-9.13084E0	-9.14223E0	5.72205E-3	9.3174E-2	2.73201E1	-3.26603E1	-3.2647E1	2.68045E1	1.72103E-8	2.52099E-3	2.52099E-3	6.28006E-3	2.32487E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.17919E-1	-7.98726E-1	-9.13103E0	-9.14235E0	5.6982E-3	9.31501E-2	2.73088E1	-3.2678E1	-3.26315E1	2.68526E1	1.7313E-8	2.52027E-3	2.52027E-3	6.35223E-3	2.3432E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.17966E-1	-7.98655E-1	-9.13115E0	-9.14207E0	5.48363E-3	9.30071E-2	2.72799E1	-3.26903E1	-3.265E1	2.67974E1	1.72252E-8	2.5199E-3	2.5199E-3	6.34588E-3	2.32285E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.17919E-1	-7.98702E-1	-9.13105E0	-9.14207E0	5.6982E-3	9.32455E-2	2.73417E1	-3.26703E1	-3.26225E1	2.67812E1	1.72627E-8	2.52099E-3	2.52099E-3	6.32386E-3	2.32487E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.17895E-1	-7.98702E-1	-9.13103E0	-9.14218E0	5.65052E-3	9.29594E-2	2.72845E1	-3.2688E1	-3.26549E1	2.67955E1	1.72732E-8	2.51847E-3	2.51847E-3	6.33436E-3	2.33905E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0968E0	-8.18062E-1	-7.98631E-1	-9.13088E0	-9.14214E0	5.93662E-3	9.27687E-2	2.72973E1	-3.2629E1	-3.26422E1	2.68154E1	1.72627E-8	2.51443E-3	2.51443E-3	6.32936E-3	2.32487E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.178E-1	-7.98559E-1	-9.13148E0	-9.14192E0	5.8651E-3	9.29594E-2	2.72903E1	-3.26832E1	-3.26089E1	2.6795E1	1.72252E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.33297E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.17919E-1	-7.98416E-1	-9.13134E0	-9.14195E0	5.43594E-3	9.2864E-2	2.73093E1	-3.26723E1	-3.26392E1	2.68124E1	1.72511E-8	2.51525E-3	2.51525E-3	6.31817E-3	2.33109E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.17609E-1	-7.9844E-1	-9.13143E0	-9.14233E0	5.55515E-3	9.30071E-2	2.73082E1	-3.26762E1	-3.2637E1	2.67884E1	1.72477E-8	2.51443E-3	2.51443E-3	6.32936E-3	2.32689E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.17728E-1	-7.98535E-1	-9.13105E0	-9.14237E0	5.8651E-3	9.31501E-2	2.73405E1	-3.26779E1	-3.26325E1	2.68304E1	1.72702E-8	2.51334E-3	2.51334E-3	6.32661E-3	2.32588E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.17847E-1	-7.98345E-1	-9.1315E0	-9.14209E0	5.57899E-3	9.27925E-2	2.72962E1	-3.26803E1	-3.26207E1	2.6792E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.17943E-1	-7.98631E-1	-9.13129E0	-9.14218E0	5.67436E-3	9.26018E-2	2.73003E1	-3.26621E1	-3.2626E1	2.6801E1	1.72879E-8	2.51954E-3	2.51954E-3	6.32356E-3	2.3291E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.17776E-1	-7.98655E-1	-9.13119E0	-9.14209E0	5.53131E-3	9.29117E-2	2.73129E1	-3.26735E1	-3.26314E1	2.67776E1	1.72511E-8	2.52169E-3	2.52169E-3	6.32356E-3	2.33507E-2