[Scan]
initial_time=2016-02-17T17:43:04
final_time=2016-02-17T17:43:24
ip_count=19
run=1032
dataset=5
scan=92
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08767E-4
ql1_vset=
ql1_vmon=-8.17513E-1
ql1_imon=1.38016E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=1.9056E-9
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=8.68523E-10
ql4_vset=
ql4_vmon=-9.14164E0
ql4_imon=2.65312E-10
mult1=-9.74039E-9
mult2=-2.68468E-9
rf_tmon=-4.28411E-3
rf_agc=3.35138E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.76973E-3
ql5_imon=1.63037E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64498E0
bslens_imon=2.50432E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19836E1
lens5a_imon=1.9858E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=3.00963E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02255E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05159E1
cs_ea1_imon=2.43071E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37551E0
lens1_imon=2.6282E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64823E1
os_ef1alow_imon=2.96827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04109E1
cs_ea2_imon=1.53878E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84574E1
cs_ef1a_imon=2.99503E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.52587E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11338E1
os_restr1_imon=4.29617E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15129E1
os_ea1_imon=2.28665E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63566E1
os_ef1bup_imon=3.07635E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26154E0
cs_ionrep_imon=1.21988E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01954E1
cs_anode1_imon=3.10207E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20587E0
olens4_imon=3.49384E-8
tplens_vset=1.4E-1
tplens_vmon=1.61843E0
tplens_imon=-4.0153E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26056E1
iondef3_imon=1.50975E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26687E1
iondef2_imon=1.58904E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.98579E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=4.01014E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27864E0
ionrepsh_imon=1.9221E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33398E1
lens5b_imon=2.17056E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7438E1
cs_ef2b_imon=3.11736E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53938E0
os_ea2_imon=-6.81143E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06173E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70841E1
cs_ef2a_imon=3.18269E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10032E0
os_ef2alow_imon=-2.66494E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1229E-1
os_ef2bup_imon=-5.39301E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10845E1
os_restr2_imon=3.48191E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.31096E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01728E1
cs_anode2_imon=2.2687E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73267E1
iondef1_imon=1.10662E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67878E1
iondef4_imon=1.08399E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.02525E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=8.92329E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13477E0
cs_ionaccel_imon=-1.96989E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02059E2
cs_ionfocb_imon=1.47334E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56283E1
einzel_imon=7.75387E-6
window_vset=0.0E0
window_vmon=1.77141E-1
window_imon=-1.07675E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.39237E-4
mask2_vset=0.0E0
mask2_vmon=-1.86303E1
mask2_imon=-7.32698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92672E3
multa_neg_imon=7.43826E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.30565E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.19758E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4026E0
defgridb_imon=6.29857E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33284E1
os_fil1_imon=9.47894E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06924E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64593E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30886E1
cs_fil1_imon=9.99808E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62279E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6696E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.93934E-2
os_fil2_imon=-2.5823E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83127E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76224E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35395E-1
cs_fil2_imon=-2.368E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37948E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22612E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.32513E-2
chamber_ion_pmon=1.72584E-8
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.62885E-1
res40_imon=-2.66494E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.17776E-1	-7.98941E-1	-9.13122E0	-9.14207E0	5.36442E-3	9.30309E-2	2.73005E1	-3.26486E1	-3.26249E1	2.67763E1	1.73026E-8	2.51847E-3	2.51847E-3	6.30202E-3	2.32711E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.17728E-1	-7.98535E-1	-9.13119E0	-9.14211E0	5.38826E-3	9.30071E-2	2.73412E1	-3.26578E1	-3.26181E1	2.68088E1	1.71463E-8	2.52025E-3	2.52025E-3	6.30212E-3	2.32733E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.17585E-1	-7.98559E-1	-9.13112E0	-9.14209E0	5.36442E-3	9.30309E-2	2.73027E1	-3.26313E1	-3.26408E1	2.67968E1	1.70934E-8	2.51384E-3	2.51384E-3	6.3131E-3	2.32433E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.1749E-1	-7.98821E-1	-9.13105E0	-9.14204E0	5.48363E-3	9.30548E-2	2.73123E1	-3.26554E1	-3.2632E1	2.68227E1	1.72511E-8	2.52492E-3	2.52492E-3	6.29665E-3	2.31919E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.17966E-1	-7.98512E-1	-9.13136E0	-9.14202E0	5.36442E-3	9.29356E-2	2.73117E1	-3.26573E1	-3.26242E1	2.68052E1	1.72584E-8	2.51632E-3	2.51632E-3	6.32896E-3	2.32117E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.178E-1	-7.98821E-1	-9.13117E0	-9.14223E0	5.60284E-3	9.27687E-2	2.72992E1	-3.26679E1	-3.26266E1	2.6798E1	1.72927E-8	2.51443E-3	2.51443E-3	6.29645E-3	2.33297E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.17776E-1	-7.98941E-1	-9.13136E0	-9.14202E0	5.60284E-3	9.31501E-2	2.72901E1	-3.26621E1	-3.26044E1	2.6795E1	1.72552E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.33297E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.17728E-1	-7.98988E-1	-9.13153E0	-9.14192E0	5.57899E-3	9.2864E-2	2.72907E1	-3.265E1	-3.26224E1	2.68244E1	1.72584E-8	2.52061E-3	2.52061E-3	6.31817E-3	2.32711E-2
1.2E1	0.0E0	1.0E0	4.85E2	3.23E2	-2.09495E0	-8.17704E-1	-7.98607E-1	-9.13136E0	-9.14204E0	6.00815E-3	9.31263E-2	2.72769E1	-3.26464E1	-3.25954E1	2.68436E1	1.72627E-8	2.51662E-3	2.51662E-3	6.29645E-3	2.33905E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.17823E-1	-7.9875E-1	-9.13105E0	-9.14195E0	5.81741E-3	9.30548E-2	2.7285E1	-3.26986E1	-3.26166E1	2.6786E1	1.72177E-8	2.5188E-3	2.5188E-3	6.33486E-3	2.33297E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.17609E-1	-7.98464E-1	-9.1315E0	-9.14211E0	5.88894E-3	9.34124E-2	2.73177E1	-3.27137E1	-3.2635E1	2.6813E1	1.72852E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.32892E-2
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.17585E-1	-7.98464E-1	-9.13124E0	-9.1423E0	5.76973E-3	9.30309E-2	2.73207E1	-3.26855E1	-3.259E1	2.67891E1	1.72627E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.32487E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-8.17823E-1	-7.9844E-1	-9.13126E0	-9.14214E0	5.65052E-3	9.31025E-2	2.72937E1	-3.26795E1	-3.26356E1	2.67788E1	1.72658E-8	2.51417E-3	2.51417E-3	6.3074E-3	2.33905E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.17728E-1	-7.98559E-1	-9.13146E0	-9.14204E0	6.05583E-3	9.32455E-2	2.73198E1	-3.26921E1	-3.26319E1	2.68034E1	1.73227E-8	2.52428E-3	2.52428E-3	6.29098E-3	2.32689E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.17394E-1	-7.9844E-1	-9.13129E0	-9.14226E0	6.00815E-3	9.32217E-2	2.72919E1	-3.26891E1	-3.26158E1	2.68412E1	1.72584E-8	2.51739E-3	2.51739E-3	6.31817E-3	2.32315E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.17609E-1	-7.98488E-1	-9.13124E0	-9.14209E0	6.31809E-3	9.31978E-2	2.73175E1	-3.26856E1	-3.26508E1	2.6798E1	1.72402E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.32892E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.17609E-1	-7.9844E-1	-9.13141E0	-9.14216E0	6.03199E-3	9.31025E-2	2.73021E1	-3.26621E1	-3.26536E1	2.67816E1	1.72658E-8	2.52492E-3	2.52492E-3	6.32356E-3	2.31721E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.17847E-1	-7.98607E-1	-9.13119E0	-9.14187E0	5.65052E-3	9.28402E-2	2.73129E1	-3.26807E1	-3.26308E1	2.68046E1	1.72927E-8	2.52099E-3	2.52099E-3	6.32386E-3	2.33094E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09619E0	-8.17561E-1	-7.99084E-1	-9.13124E0	-9.14199E0	5.98431E-3	9.29117E-2	2.73116E1	-3.26773E1	-3.2639E1	2.6813E1	1.72477E-8	2.51334E-3	2.51334E-3	6.31288E-3	2.32892E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.17513E-1	-7.98655E-1	-9.13134E0	-9.14164E0	5.76973E-3	9.30786E-2	2.73267E1	-3.26687E1	-3.26056E1	2.67878E1	1.72584E-8	2.51847E-3	2.51847E-3	6.30202E-3	2.32513E-2