[Scan]
initial_time=2016-02-17T17:43:57
final_time=2016-02-17T17:44:17
ip_count=19
run=1032
dataset=5
scan=94
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08792E-4
ql1_vset=
ql1_vmon=-8.17418E-1
ql1_imon=1.38491E-8
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=1.93864E-9
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=7.77555E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=2.66576E-10
mult1=-1.01009E-8
mult2=-2.70362E-9
rf_tmon=-4.24613E-3
rf_agc=3.34202E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=1.65223E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68214E0
bslens_imon=2.75208E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19795E1
lens5a_imon=1.96811E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.05082E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53812E1
cs_ef1b_imon=3.03117E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.0233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05283E1
cs_ea1_imon=2.44522E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40677E0
lens1_imon=2.73085E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.9568E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03838E1
cs_ea2_imon=1.56001E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84267E1
cs_ef1a_imon=3.00476E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.52674E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11372E1
os_restr1_imon=4.29061E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15193E1
os_ea1_imon=2.29727E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63716E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22201E0
cs_ionrep_imon=1.2397E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93417E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01572E1
cs_anode1_imon=3.08852E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.4903E-8
tplens_vset=1.4E-1
tplens_vmon=1.59955E0
tplens_imon=-1.92705E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26413E1
iondef3_imon=1.51117E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2667E1
iondef2_imon=1.57311E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98558E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=4.00443E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30637E0
ionrepsh_imon=1.90723E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33587E1
lens5b_imon=2.17835E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74953E1
cs_ef2b_imon=3.13786E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52758E0
os_ea2_imon=-6.35131E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06167E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71009E1
cs_ef2a_imon=3.16393E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08352E0
os_ef2alow_imon=-2.50508E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.43568E-1
os_ef2bup_imon=-5.37911E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10666E1
os_restr2_imon=3.46801E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.31309E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01595E1
cs_anode2_imon=2.24994E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73008E1
iondef1_imon=1.10732E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.09685E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.03548E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=8.90415E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08265E0
cs_ionaccel_imon=-2.02202E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02107E2
cs_ionfocb_imon=1.47351E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55971E1
einzel_imon=7.52798E-6
window_vset=0.0E0
window_vmon=1.7772E-1
window_imon=-1.03505E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82595E2
mask1_imon=2.39032E-4
mask2_vset=0.0E0
mask2_vmon=-1.86396E1
mask2_imon=-5.51985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.44888E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.98168E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.25775E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43213E0
defgridb_imon=6.02604E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3327E1
os_fil1_imon=9.48705E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06773E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64442E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30917E1
cs_fil1_imon=9.99559E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62175E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67122E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.05331E-2
os_fil2_imon=-2.79661E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.93552E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6977E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.20582E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19993E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22567E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.05167E-1
res40_imon=-2.74139E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.17895E-1	-7.98559E-1	-9.13122E0	-9.14223E0	5.88894E-3	9.33647E-2	2.73281E1	-3.26608E1	-3.26219E1	2.68004E1	1.72805E-8	2.50989E-3	2.50989E-3	6.32896E-3	2.3291E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.17513E-1	-7.98583E-1	-9.13129E0	-9.14209E0	5.57899E-3	9.28164E-2	2.73082E1	-3.26554E1	-3.26015E1	2.67938E1	1.72658E-8	2.51847E-3	2.51847E-3	6.35059E-3	2.3291E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.17466E-1	-7.98655E-1	-9.13126E0	-9.14197E0	5.8651E-3	9.31025E-2	2.73159E1	-3.2654E1	-3.26457E1	2.68062E1	1.72378E-8	2.51857E-3	2.51857E-3	6.31487E-3	2.32435E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.17466E-1	-7.98631E-1	-9.13134E0	-9.14216E0	5.50747E-3	9.30548E-2	2.73138E1	-3.26642E1	-3.26312E1	2.67878E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.17275E-1	-7.98607E-1	-9.13117E0	-9.14202E0	5.38826E-3	9.30309E-2	2.73181E1	-3.26734E1	-3.2633E1	2.67856E1	1.72578E-8	2.51729E-3	2.51729E-3	6.31229E-3	2.3291E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.17418E-1	-7.98583E-1	-9.13129E0	-9.14209E0	5.45979E-3	9.33886E-2	2.73108E1	-3.26761E1	-3.26032E1	2.67926E1	1.72616E-8	2.51287E-3	2.51287E-3	6.3074E-3	2.32538E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.17466E-1	-7.98392E-1	-9.13136E0	-9.14214E0	5.55515E-3	9.33409E-2	2.73132E1	-3.26566E1	-3.26285E1	2.68184E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.17823E-1	-7.98202E-1	-9.13126E0	-9.14235E0	5.53131E-3	9.34839E-2	2.73023E1	-3.26747E1	-3.2654E1	2.68157E1	1.72823E-8	2.51581E-3	2.51581E-3	6.31858E-3	2.33492E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.17657E-1	-7.98202E-1	-9.13112E0	-9.14214E0	5.29289E-3	9.32932E-2	2.73289E1	-3.26828E1	-3.26173E1	2.68117E1	1.72775E-8	2.5185E-3	2.5185E-3	6.29171E-3	2.3226E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.17442E-1	-7.98225E-1	-9.131E0	-9.14223E0	5.4121E-3	9.33647E-2	2.73149E1	-3.26487E1	-3.26352E1	2.68256E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.1749E-1	-7.98154E-1	-9.13148E0	-9.14216E0	5.31673E-3	9.3174E-2	2.73352E1	-3.26671E1	-3.26556E1	2.67966E1	1.72627E-8	2.51443E-3	2.51443E-3	6.31837E-3	2.32689E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.17251E-1	-7.98321E-1	-9.13131E0	-9.14218E0	5.55515E-3	9.31263E-2	2.73159E1	-3.26822E1	-3.26574E1	2.68201E1	1.72732E-8	2.51417E-3	2.51417E-3	6.29128E-3	2.32513E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16989E-1	-7.98583E-1	-9.13138E0	-9.14197E0	5.53131E-3	9.29594E-2	2.73145E1	-3.26891E1	-3.26602E1	2.68082E1	1.72915E-8	2.52499E-3	2.52499E-3	6.3074E-3	2.31791E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.17132E-1	-7.9844E-1	-9.13103E0	-9.1423E0	5.76973E-3	9.29117E-2	2.73442E1	-3.26909E1	-3.26308E1	2.6807E1	1.72805E-8	2.51632E-3	2.51632E-3	6.32896E-3	2.33109E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.17323E-1	-7.98249E-1	-9.13081E0	-9.14226E0	5.48363E-3	9.29356E-2	2.73122E1	-3.26602E1	-3.26349E1	2.68238E1	1.72852E-8	2.51771E-3	2.51771E-3	6.30192E-3	2.33297E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.17466E-1	-7.98631E-1	-9.13105E0	-9.14226E0	5.45979E-3	9.26495E-2	2.73574E1	-3.26645E1	-3.26362E1	2.67956E1	1.73026E-8	2.52276E-3	2.52276E-3	6.31817E-3	2.35507E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.17442E-1	-7.98607E-1	-9.131E0	-9.1424E0	5.38826E-3	9.29117E-2	2.73189E1	-3.26855E1	-3.26182E1	2.67974E1	1.73152E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.33094E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.17204E-1	-7.98488E-1	-9.13119E0	-9.14257E0	5.50747E-3	9.28879E-2	2.73139E1	-3.26785E1	-3.26425E1	2.6803E1	1.72327E-8	2.51771E-3	2.51771E-3	6.3074E-3	2.32487E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.17251E-1	-7.98869E-1	-9.13122E0	-9.14249E0	5.4121E-3	9.28164E-2	2.73187E1	-3.26708E1	-3.26508E1	2.68028E1	1.72732E-8	2.51793E-3	2.51793E-3	6.32896E-3	2.32811E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.17418E-1	-7.98607E-1	-9.1311E0	-9.14204E0	5.45979E-3	9.29832E-2	2.73008E1	-3.2667E1	-3.26413E1	2.68052E1