[Scan]
initial_time=2016-02-17T17:44:51
final_time=2016-02-17T17:45:10
ip_count=19
run=1032
dataset=5
scan=96
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08795E-4
ql1_vset=
ql1_vmon=-8.17776E-1
ql1_imon=1.37788E-8
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=1.94076E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=6.95741E-10
ql4_vset=
ql4_vmon=-9.14237E0
ql4_imon=2.88665E-10
mult1=-9.70427E-9
mult2=-2.72061E-9
rf_tmon=-5.53984E-3
rf_agc=3.23602E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=1.60707E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67755E0
bslens_imon=2.53054E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19845E1
lens5a_imon=1.97911E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53783E1
cs_ef1b_imon=3.01032E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05234E1
cs_ea1_imon=2.44847E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43565E0
lens1_imon=2.58822E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64579E1
os_ef1alow_imon=2.96653E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03714E1
cs_ea2_imon=1.54543E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84325E1
cs_ef1a_imon=2.99468E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.52566E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11297E1
os_restr1_imon=4.28991E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15396E1
os_ea1_imon=2.27543E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63514E1
os_ef1bup_imon=3.07948E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22326E0
cs_ionrep_imon=1.2437E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93179E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01444E1
cs_anode1_imon=3.09338E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=3.49036E-8
tplens_vset=1.4E-1
tplens_vmon=1.60118E0
tplens_imon=3.47012E-9
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.491E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26543E1
iondef2_imon=1.57968E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0295E2
lens6_imon=2.98634E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.0627E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31158E0
ionrepsh_imon=1.93116E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33381E1
lens5b_imon=2.19396E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75243E1
cs_ef2b_imon=3.12431E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5429E0
os_ea2_imon=-8.32879E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00641E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71362E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0841E0
os_ef2alow_imon=-2.57111E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16924E-1
os_ef2bup_imon=-5.33741E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=3.45898E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.30505E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01856E1
cs_anode2_imon=2.25445E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.10202E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67758E1
iondef4_imon=1.08851E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.03113E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=8.91122E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12551E0
cs_ionaccel_imon=-1.91776E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47139E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56208E1
einzel_imon=7.69131E-6
window_vset=0.0E0
window_vmon=1.67295E-1
window_imon=-1.06632E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.38952E-4
mask2_vset=0.0E0
mask2_vmon=-1.86228E1
mask2_imon=-5.5546E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92685E3
multa_neg_imon=7.664E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.96824E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.22419E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46773E0
defgridb_imon=6.11026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33309E1
os_fil1_imon=9.49712E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07011E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64474E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30854E1
cs_fil1_imon=9.99449E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61879E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67006E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.90604E-2
os_fil2_imon=-2.77344E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87181E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61668E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33273E-1
cs_fil2_imon=-2.47805E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62454E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22555E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.33318E-2
chamber_ion_pmon=1.70176E-8
chamber_cvt_pmon=2.51709E-3
foreline_cvt_pmon=2.51709E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.50518E-1
res40_imon=-2.70664E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.17442E-1	-7.98535E-1	-9.13115E0	-9.14254E0	5.65052E-3	9.31025E-2	2.73033E1	-3.26549E1	-3.26518E1	2.6819E1	1.72852E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.32689E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.17466E-1	-7.98726E-1	-9.13112E0	-9.14221E0	5.6982E-3	9.3317E-2	2.73063E1	-3.26474E1	-3.26358E1	2.67926E1	1.72852E-8	2.52099E-3	2.52099E-3	6.34037E-3	2.32487E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.17227E-1	-7.9844E-1	-9.13119E0	-9.14233E0	5.74589E-3	9.32455E-2	2.72964E1	-3.26828E1	-3.25918E1	2.68076E1	1.72594E-8	2.51693E-3	2.51693E-3	6.32418E-3	2.33905E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0965E0	-8.17251E-1	-7.98464E-1	-9.13122E0	-9.14207E0	5.36442E-3	9.31501E-2	2.72901E1	-3.26422E1	-3.25978E1	2.67914E1	1.72688E-8	2.51393E-3	2.51393E-3	6.31269E-3	2.33905E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.1718E-1	-7.98392E-1	-9.13103E0	-9.14247E0	5.48363E-3	9.32217E-2	2.73123E1	-3.26885E1	-3.26128E1	2.67974E1	1.73002E-8	2.51116E-3	2.51116E-3	6.31288E-3	2.32689E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.17037E-1	-7.98249E-1	-9.13105E0	-9.14247E0	5.50747E-3	9.32932E-2	2.73327E1	-3.26759E1	-3.26008E1	2.6816E1	1.73378E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.32487E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.1687E-1	-7.98249E-1	-9.13095E0	-9.14252E0	6.00815E-3	9.31263E-2	2.73045E1	-3.26663E1	-3.26585E1	2.6813E1	1.72777E-8	2.51443E-3	2.51443E-3	6.29098E-3	2.32689E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.17156E-1	-7.98225E-1	-9.13105E0	-9.14261E0	5.74589E-3	9.33409E-2	2.72715E1	-3.26446E1	-3.26621E1	2.67902E1	1.72327E-8	2.51552E-3	2.51552E-3	6.34037E-3	2.32892E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.17084E-1	-7.98106E-1	-9.13093E0	-9.14242E0	5.60284E-3	9.31978E-2	2.73039E1	-3.26705E1	-3.26356E1	2.67914E1	1.72477E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.31882E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.17394E-1	-7.9813E-1	-9.13086E0	-9.14276E0	5.50747E-3	9.30309E-2	2.73193E1	-3.26997E1	-3.25989E1	2.67932E1	1.72252E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.33297E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.17561E-1	-7.9813E-1	-9.13124E0	-9.14216E0	5.50747E-3	9.31978E-2	2.73279E1	-3.26843E1	-3.26038E1	2.684E1	1.72953E-8	2.51203E-3	2.51203E-3	6.31817E-3	2.35909E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.17466E-1	-7.98273E-1	-9.13146E0	-9.14221E0	5.34058E-3	9.33409E-2	2.73169E1	-3.26644E1	-3.26319E1	2.67902E1	1.72927E-8	2.52099E-3	2.52099E-3	6.29645E-3	2.32689E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.17108E-1	-7.98106E-1	-9.13112E0	-9.14209E0	5.79357E-3	9.30071E-2	2.72978E1	-3.26738E1	-3.26517E1	2.68106E1	1.72511E-8	2.52061E-3	2.52061E-3	6.28592E-3	2.33308E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.17323E-1	-7.98368E-1	-9.13112E0	-9.14209E0	5.45979E-3	9.29594E-2	2.73322E1	-3.26997E1	-3.2649E1	2.68076E1	1.72594E-8	2.5225E-3	2.5225E-3	6.32978E-3	2.32873E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.17585E-1	-7.98559E-1	-9.13153E0	-9.14211E0	5.36442E-3	9.33409E-2	2.72967E1	-3.26921E1	-3.26446E1	2.68088E1	1.7229E-8	2.51203E-3	2.51203E-3	6.32896E-3	2.31919E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09286E0	-8.17418E-1	-7.98488E-1	-9.13117E0	-9.14185E0	5.74589E-3	9.3174E-2	2.73255E1	-3.27035E1	-3.25984E1	2.6795E1	1.72777E-8	2.51552E-3	2.51552E-3	6.3074E-3	2.32689E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09371E0	-8.17323E-1	-7.98512E-1	-9.13119E0	-9.14228E0	5.57899E-3	9.33886E-2	2.72696E1	-3.2647E1	-3.26122E1	2.68046E1	1.73002E-8	2.52538E-3	2.52538E-3	6.3074E-3	2.33094E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.178E-1	-7.98607E-1	-9.1311E0	-9.14247E0	5.74589E-3	9.28879E-2	2.73163E1	-3.26331E1	-3.26443E1	2.6803E1	1.72702E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.34516E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.1799E-1	-7.9844E-1	-9.13136E0	-9.14221E0	5.53131E-3	9.3317E-2	2.73364E1	-3.26944E1	-3.26162E1	2.68112E1	1.72143E-8	2.51525E-3	2.51525E-3	6.30202E-3	2.3291E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.17776E-1	-7.98631E-1	-9.13124E0	-9.14237E0	5.60284E-3	9.32217E-2	2.73051E1	-3.26543E1	-3.26224E1	2.67758E1	1.70176E-8	2.51709E-3	2.51709E-3	6.3074E-3	2.33318E-2