[Scan]
initial_time=2016-02-17T17:45:18
final_time=2016-02-17T17:45:37
ip_count=19
run=1032
dataset=5
scan=97
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08823E-4
ql1_vset=
ql1_vmon=-8.1706E-1
ql1_imon=1.37635E-8
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=1.95979E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=6.47867E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=2.70975E-10
mult1=-9.70427E-9
mult2=-2.79646E-9
rf_tmon=-5.32955E-3
rf_agc=3.2895E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=1.61107E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66798E0
bslens_imon=2.6282E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1996E1
lens5a_imon=1.98014E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05001E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53718E1
cs_ef1b_imon=3.02198E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04935E1
cs_ea1_imon=2.44451E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37138E0
lens1_imon=2.78394E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64584E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0392E1
cs_ea2_imon=1.55895E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84514E1
cs_ef1a_imon=3.00108E-5
olens2_vset=9.7E-1
olens2_vmon=9.69696E-1
olens2_imon=1.52847E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11586E1
os_restr1_imon=4.31905E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15648E1
os_ea1_imon=2.27604E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63515E1
os_ef1bup_imon=3.05045E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24502E0
cs_ionrep_imon=1.23687E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93367E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01401E1
cs_anode1_imon=3.10163E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=3.49827E-8
tplens_vset=1.4E-1
tplens_vmon=1.60014E0
tplens_imon=-1.96244E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25996E1
iondef3_imon=1.49489E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26669E1
iondef2_imon=1.5947E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98615E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=4.01915E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32584E0
ionrepsh_imon=1.91997E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.16738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.756E1
cs_ef2b_imon=3.13875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54528E0
os_ea2_imon=-6.17434E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.17659E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05876E0
os_ef2alow_imon=-2.57626E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.33464E-1
os_ef2bup_imon=-5.00533E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10631E1
os_restr2_imon=3.46563E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.30601E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01635E1
cs_anode2_imon=2.24785E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73345E1
iondef1_imon=1.08786E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67986E1
iondef4_imon=1.10287E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.02696E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=8.91709E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10491E0
cs_ionaccel_imon=-2.26631E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47626E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56087E1
einzel_imon=7.44998E-6
window_vset=0.0E0
window_vmon=1.36854E-1
window_imon=-7.38233E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82576E2
mask1_imon=2.38792E-4
mask2_vset=0.0E0
mask2_vmon=-1.86704E1
mask2_imon=-8.3554E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.18342E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.68083E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.11971E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43508E0
defgridb_imon=6.13222E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33289E1
os_fil1_imon=9.47574E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07443E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64567E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30908E1
cs_fil1_imon=1.00082E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61849E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67155E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.88869E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.63442E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.17943E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=2.89284E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22604E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.33706E-2
chamber_ion_pmon=1.72364E-8
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.40381E-1
res40_imon=-2.86097E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.17442E-1	-7.98535E-1	-9.13115E0	-9.14209E0	5.60284E-3	9.31263E-2	2.73171E1	-3.26693E1	-3.26416E1	2.68502E1	1.72852E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.32892E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.17704E-1	-7.98607E-1	-9.13155E0	-9.14261E0	5.79357E-3	9.31263E-2	2.73051E1	-3.26392E1	-3.26434E1	2.6798E1	1.72658E-8	2.51417E-3	2.51417E-3	6.31278E-3	2.33109E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09657E0	-8.17323E-1	-7.98631E-1	-9.13141E0	-9.1424E0	5.76973E-3	9.30548E-2	2.73387E1	-3.26761E1	-3.26585E1	2.68764E1	1.72823E-8	2.51693E-3	2.51693E-3	6.30182E-3	2.33079E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09711E0	-8.17251E-1	-7.98583E-1	-9.13119E0	-9.14235E0	5.6982E-3	9.29594E-2	2.73363E1	-3.26784E1	-3.26553E1	2.67945E1	1.72575E-8	2.51783E-3	2.51783E-3	6.28667E-3	2.31988E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09711E0	-8.17084E-1	-7.9844E-1	-9.13103E0	-9.14209E0	5.91278E-3	9.31978E-2	2.73039E1	-3.26785E1	-3.26313E1	2.678E1	1.72872E-8	2.52179E-3	2.52179E-3	6.31879E-3	2.33484E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09634E0	-8.17418E-1	-7.9875E-1	-9.13122E0	-9.14209E0	5.6982E-3	9.30786E-2	2.72941E1	-3.26615E1	-3.2645E1	2.6789E1	1.72732E-8	2.51954E-3	2.51954E-3	6.33977E-3	2.32117E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-8.17442E-1	-7.98488E-1	-9.13124E0	-9.14197E0	5.84126E-3	9.30309E-2	2.72993E1	-3.26567E1	-3.26249E1	2.68298E1	1.72671E-8	2.51359E-3	2.51359E-3	6.31858E-3	2.33079E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09688E0	-8.17084E-1	-7.98845E-1	-9.13095E0	-9.14218E0	5.81741E-3	9.30309E-2	2.72997E1	-3.26699E1	-3.26092E1	2.68099E1	1.72905E-8	2.51393E-3	2.51393E-3	6.31798E-3	2.32928E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.1749E-1	-7.98512E-1	-9.13107E0	-9.14228E0	5.74589E-3	9.31501E-2	2.72985E1	-3.2638E1	-3.2614E1	2.67926E1	1.72477E-8	2.51771E-3	2.51771E-3	6.28552E-3	2.33702E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09634E0	-8.17585E-1	-7.98678E-1	-9.13138E0	-9.14237E0	5.43594E-3	9.28402E-2	2.73081E1	-3.26609E1	-3.26308E1	2.67716E1	1.73002E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.31882E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.17752E-1	-7.98512E-1	-9.13098E0	-9.14237E0	5.60284E-3	9.30786E-2	2.72829E1	-3.26627E1	-3.26464E1	2.6816E1	1.72627E-8	2.51225E-3	2.51225E-3	6.31288E-3	2.32487E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.17108E-1	-7.98488E-1	-9.13107E0	-9.14223E0	5.60284E-3	9.30309E-2	2.73147E1	-3.26645E1	-3.26627E1	2.68064E1	1.72658E-8	2.51525E-3	2.51525E-3	6.33436E-3	2.32513E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.1706E-1	-7.98607E-1	-9.13115E0	-9.14245E0	5.6982E-3	9.31501E-2	2.73424E1	-3.26723E1	-3.26242E1	2.67932E1	1.72852E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.32892E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.16965E-1	-7.97963E-1	-9.13098E0	-9.14221E0	5.74589E-3	9.29117E-2	2.72933E1	-3.26484E1	-3.2652E1	2.68196E1	1.72747E-8	2.51581E-3	2.51581E-3	6.35223E-3	2.32873E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.17132E-1	-7.98345E-1	-9.13148E0	-9.14214E0	5.6982E-3	9.32217E-2	2.73201E1	-3.26879E1	-3.2632E1	2.6792E1	1.72658E-8	2.52169E-3	2.52169E-3	6.3074E-3	2.33706E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.17323E-1	-7.9844E-1	-9.1315E0	-9.14197E0	5.74589E-3	9.32693E-2	2.72991E1	-3.26813E1	-3.26308E1	2.67962E1	1.72177E-8	2.51116E-3	2.51116E-3	6.3074E-3	2.32285E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.17442E-1	-7.98535E-1	-9.13124E0	-9.14221E0	5.79357E-3	9.31978E-2	2.72967E1	-3.26663E1	-3.26248E1	2.68112E1	1.72927E-8	2.51552E-3	2.51552E-3	6.29098E-3	2.32285E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09665E0	-8.17299E-1	-7.98678E-1	-9.13134E0	-9.14254E0	5.79357E-3	9.32455E-2	2.7334E1	-3.26638E1	-3.26195E1	2.68047E1	1.70392E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.34516E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.17013E-1	-7.98464E-1	-9.13129E0	-9.14223E0	5.38826E-3	9.33886E-2	2.73393E1	-3.26467E1	-3.26313E1	2.67896E1	1.69955E-8	2.51203E-3	2.51203E-3	6.32896E-3	2.3291E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.1706E-1	-7.98607E-1	-9.13124E0	-9.14195E0	5.48363E-3	9.30309E-2	2.73345E1	-3.26669E1	-3.25996E1	2.67986E1	1.72364E-8	2.51954E-3	2.51954E-3	6.31278E-3	2.33706E-2