[Scan]
initial_time=2016-02-17T17:45:44
final_time=2016-02-17T17:46:04
ip_count=19
run=1032
dataset=5
scan=98
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08814E-4
ql1_vset=
ql1_vmon=-8.17204E-1
ql1_imon=1.37656E-8
ql2_vset=
ql2_vmon=-7.98774E-1
ql2_imon=1.89788E-9
ql3_vset=
ql3_vmon=-9.13095E0
ql3_imon=6.76084E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=2.79236E-10
mult1=-9.17448E-9
mult2=-2.75454E-9
rf_tmon=-3.9116E-3
rf_agc=3.46254E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=1.61616E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66494E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19971E1
lens5a_imon=1.99064E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12511E2
lens4a_imon=2.04952E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53598E1
cs_ef1b_imon=3.01117E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.0224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05156E1
cs_ea1_imon=2.43657E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34973E0
lens1_imon=2.85859E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.98234E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03666E1
cs_ea2_imon=1.53858E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=2.98703E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.52353E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11087E1
os_restr1_imon=4.29599E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15444E1
os_ea1_imon=2.29814E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63773E1
os_ef1bup_imon=3.07568E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26952E0
cs_ionrep_imon=1.24045E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93384E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01611E1
cs_anode1_imon=3.10199E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=3.49274E-8
tplens_vset=1.4E-1
tplens_vmon=1.56092E0
tplens_imon=-1.08283E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26524E1
iondef3_imon=1.47982E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26969E1
iondef2_imon=1.57896E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02948E2
lens6_imon=2.9862E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.01919E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=1.9344E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33856E1
lens5b_imon=2.20009E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74375E1
cs_ef2b_imon=3.11785E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5477E0
os_ea2_imon=-5.44483E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00486E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71636E1
cs_ef2a_imon=3.19101E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07198E0
os_ef2alow_imon=-2.70239E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1244E-1
os_ef2bup_imon=-5.41978E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10679E1
os_restr2_imon=3.47104E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23118E2
cs_ionfoca_imon=6.32704E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.25794E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73303E1
iondef1_imon=1.09012E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.06935E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.02871E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=8.90684E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11753E0
cs_ionaccel_imon=-1.89511E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47248E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.75992E-6
window_vset=0.0E0
window_vmon=1.83105E-1
window_imon=-1.10944E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.86392E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.38281E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.71229E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.26745E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43164E0
defgridb_imon=6.29411E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33305E1
os_fil1_imon=9.48535E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06692E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64566E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=9.99153E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61873E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67253E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.02212E-2
os_fil2_imon=-2.80412E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73914E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-2.52782E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.8572E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22542E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.3291E-2
chamber_ion_pmon=1.7229E-8
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.68302E-1
res40_imon=-2.56905E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.1737E-1	-7.98941E-1	-9.13115E0	-9.14221E0	5.6982E-3	9.3317E-2	2.73243E1	-3.26663E1	-3.26591E1	2.67776E1	1.72552E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.34109E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.17418E-1	-7.98678E-1	-9.1311E0	-9.14223E0	5.74589E-3	9.31025E-2	2.73003E1	-3.26867E1	-3.26212E1	2.6786E1	1.72511E-8	2.51954E-3	2.51954E-3	6.30202E-3	2.35106E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.1737E-1	-7.98678E-1	-9.13122E0	-9.1418E0	5.48363E-3	9.32932E-2	2.73034E1	-3.26573E1	-3.25901E1	2.68024E1	1.72976E-8	2.5147E-3	2.5147E-3	6.31858E-3	2.33285E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.17418E-1	-7.98583E-1	-9.13122E0	-9.14195E0	5.55515E-3	9.3317E-2	2.72823E1	-3.26603E1	-3.26098E1	2.6825E1	1.73123E-8	2.52342E-3	2.52342E-3	6.32858E-3	2.33318E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.17299E-1	-7.98345E-1	-9.13124E0	-9.14204E0	5.34058E-3	9.30786E-2	2.73261E1	-3.27161E1	-3.26206E1	2.681E1	1.73152E-8	2.5199E-3	2.5199E-3	6.33486E-3	2.33297E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.17394E-1	-7.98678E-1	-9.13134E0	-9.14228E0	5.31673E-3	9.32693E-2	2.73255E1	-3.26657E1	-3.26585E1	2.68196E1	1.73453E-8	2.51552E-3	2.51552E-3	6.32386E-3	2.32689E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.17275E-1	-7.98702E-1	-9.13115E0	-9.14214E0	5.29289E-3	9.32217E-2	2.73237E1	-3.26512E1	-3.26284E1	2.67854E1	1.72511E-8	2.51203E-3	2.51203E-3	6.28592E-3	2.33109E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09619E0	-8.17251E-1	-7.98869E-1	-9.13124E0	-9.14221E0	5.07832E-3	9.30309E-2	2.73098E1	-3.26785E1	-3.26278E1	2.68028E1	1.72252E-8	2.5199E-3	2.5199E-3	6.34588E-3	2.32892E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09611E0	-8.17156E-1	-7.98917E-1	-9.13143E0	-9.14221E0	5.24521E-3	9.30071E-2	2.72867E1	-3.26676E1	-3.26009E1	2.6855E1	1.72627E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.32487E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.17227E-1	-7.98941E-1	-9.13131E0	-9.1423E0	5.50747E-3	9.28879E-2	2.73315E1	-3.26561E1	-3.26446E1	2.67968E1	1.72702E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.32487E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.17227E-1	-7.98488E-1	-9.13122E0	-9.14218E0	5.31673E-3	9.27448E-2	2.7334E1	-3.26956E1	-3.26242E1	2.67908E1	1.72702E-8	2.51771E-3	2.51771E-3	6.3074E-3	2.33094E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.17323E-1	-7.98655E-1	-9.13088E0	-9.14207E0	5.29289E-3	9.33409E-2	2.72955E1	-3.26759E1	-3.26579E1	2.67776E1	1.72627E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.32892E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.17299E-1	-7.98726E-1	-9.13098E0	-9.14187E0	5.10216E-3	9.30548E-2	2.72829E1	-3.26591E1	-3.26278E1	2.68028E1	1.72327E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.33094E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.1718E-1	-7.98535E-1	-9.13072E0	-9.14214E0	5.38826E-3	9.33409E-2	2.72788E1	-3.26627E1	-3.26707E1	2.67932E1	1.72477E-8	2.5199E-3	2.5199E-3	6.28552E-3	2.32487E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.17013E-1	-7.98488E-1	-9.13105E0	-9.14197E0	5.36442E-3	9.31978E-2	2.73021E1	-3.26573E1	-3.26437E1	2.6831E1	1.729E-8	2.51693E-3	2.51693E-3	6.3074E-3	2.32873E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.17084E-1	-7.98607E-1	-9.13076E0	-9.14199E0	5.31673E-3	9.31501E-2	2.73173E1	-3.26572E1	-3.26493E1	2.6774E1	1.71484E-8	2.51954E-3	2.51954E-3	6.29665E-3	2.32711E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.1706E-1	-7.98774E-1	-9.13084E0	-9.14221E0	5.57899E-3	9.31978E-2	2.73104E1	-3.2659E1	-3.27015E1	2.6822E1	1.70023E-8	2.52099E-3	2.52099E-3	6.33486E-3	2.33094E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.1706E-1	-7.98726E-1	-9.13107E0	-9.1423E0	5.38826E-3	9.30548E-2	2.72974E1	-3.26661E1	-3.26514E1	2.68053E1	1.71357E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.33499E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.17418E-1	-7.98512E-1	-9.13131E0	-9.14211E0	5.34058E-3	9.33647E-2	2.73213E1	-3.2644E1	-3.26639E1	2.68046E1	1.72364E-8	2.52599E-3	2.52599E-3	6.33436E-3	2.32513E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-8.17204E-1	-7.98774E-1	-9.13095E0	-9.14185E0	5.126E-3	9.34362E-2	2.73303E1	-3.26969E1	-3.26524E1	2.67974E1	1.7229E-8	2.52061E-3	2.52061E-3	6.32896E-3	2.3291E-2