[Scan]
initial_time=2016-02-17T17:46:11
final_time=2016-02-17T17:46:30
ip_count=19
run=1032
dataset=5
scan=99
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-8.16989E-1
ql1_imon=1.37658E-8
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=1.93225E-9
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=5.76007E-10
ql4_vset=
ql4_vmon=-9.14221E0
ql4_imon=2.828E-10
mult1=-9.55978E-9
mult2=-2.65873E-9
rf_tmon=-3.72534E-3
rf_agc=3.41567E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=1.62473E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66716E0
bslens_imon=2.27183E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19993E1
lens5a_imon=1.97995E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12515E2
lens4a_imon=2.04986E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53886E1
cs_ef1b_imon=2.99637E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04835E1
cs_ea1_imon=2.44219E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36238E0
lens1_imon=2.44742E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64689E1
os_ef1alow_imon=2.99038E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04148E1
cs_ea2_imon=1.55245E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84307E1
cs_ef1a_imon=2.98215E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.52523E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10999E1
os_restr1_imon=4.31188E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15001E1
os_ea1_imon=2.27425E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63298E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25464E0
cs_ionrep_imon=1.24251E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93477E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01871E1
cs_anode1_imon=3.11463E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=3.49204E-8
tplens_vset=1.4E-1
tplens_vmon=1.62298E0
tplens_imon=-4.12737E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26512E1
iondef3_imon=1.51695E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26657E1
iondef2_imon=1.59405E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.9851E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.02474E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.261E0
ionrepsh_imon=1.92728E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33817E1
lens5b_imon=2.18607E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75281E1
cs_ef2b_imon=3.14308E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55364E0
os_ea2_imon=-7.32152E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.0055E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71619E1
cs_ef2a_imon=3.16516E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07514E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.06988E-1
os_ef2bup_imon=-5.33634E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10537E1
os_restr2_imon=3.48403E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.31264E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0199E1
cs_anode2_imon=2.25459E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73123E1
iondef1_imon=1.11464E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68004E1
iondef4_imon=1.08728E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.02564E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=8.92086E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11205E0
cs_ionaccel_imon=-2.05035E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02108E2
cs_ionfocb_imon=1.4729E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56068E1
einzel_imon=7.5793E-6
window_vset=0.0E0
window_vmon=1.70814E-1
window_imon=-1.18582E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.392E-4
mask2_vset=0.0E0
mask2_vmon=-1.86369E1
mask2_imon=-8.1156E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.2454E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.5736E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.2683E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43005E0
defgridb_imon=6.27206E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3329E1
os_fil1_imon=9.47498E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06549E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64492E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30837E1
cs_fil1_imon=9.99401E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62933E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6695E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.90756E-2
os_fil2_imon=-2.85587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94087E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.71487E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3382E-1
cs_fil2_imon=-2.06993E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02394E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2254E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.33094E-2
chamber_ion_pmon=1.72777E-8
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.50454E-1
res40_imon=-2.74273E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09619E0	-8.17394E-1	-7.98607E-1	-9.1311E0	-9.14195E0	5.45979E-3	9.31501E-2	2.73033E1	-3.26633E1	-3.26573E1	2.68232E1					
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09611E0	-8.1749E-1	-7.98774E-1	-9.13103E0	-9.14221E0	5.62668E-3	9.32455E-2	2.72751E1	-3.26517E1	-3.26027E1	2.67957E1	1.72143E-8	2.52384E-3	2.52384E-3	6.3074E-3	2.33308E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.17513E-1	-7.98941E-1	-9.13086E0	-9.14211E0	5.6982E-3	9.32455E-2	2.73113E1	-3.26635E1	-3.26797E1	2.68054E1	1.72638E-8	2.51498E-3	2.51498E-3	6.33021E-3	2.32853E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.1737E-1	-7.98631E-1	-9.13095E0	-9.14202E0	5.67436E-3	9.3317E-2	2.72853E1	-3.26446E1	-3.26512E1	2.67926E1	1.72955E-8	2.51854E-3	2.51854E-3	6.31761E-3	2.32397E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-8.17251E-1	-7.98464E-1	-9.13117E0	-9.14197E0	5.38826E-3	9.3174E-2	2.73141E1	-3.26783E1	-3.26356E1	2.68088E1	1.73227E-8	2.51552E-3	2.51552E-3	6.32386E-3	2.32689E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.17299E-1	-7.98702E-1	-9.13093E0	-9.14183E0	5.55515E-3	9.34362E-2	2.73147E1	-3.26861E1	-3.26356E1	2.67938E1	1.73303E-8	2.5188E-3	2.5188E-3	6.33486E-3	2.33499E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-8.17204E-1	-7.98869E-1	-9.13084E0	-9.1423E0	5.65052E-3	9.30071E-2	2.73087E1	-3.26338E1	-3.26068E1	2.68406E1	1.72627E-8	2.51552E-3	2.51552E-3	6.32936E-3	2.32689E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.17657E-1	-7.98512E-1	-9.13119E0	-9.14223E0	5.76973E-3	9.33647E-2	2.72883E1	-3.26807E1	-3.2608E1	2.68088E1	1.72627E-8	2.51443E-3	2.51443E-3	6.31837E-3	2.32892E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.1718E-1	-7.98631E-1	-9.13095E0	-9.14223E0	5.48363E-3	9.29832E-2	2.72791E1	-3.26573E1	-3.26178E1	2.68256E1	1.72953E-8	2.51525E-3	2.51525E-3	6.3074E-3	2.32513E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.17251E-1	-7.98464E-1	-9.13138E0	-9.14242E0	5.34058E-3	9.33409E-2	2.73341E1	-3.26642E1	-3.26411E1	2.68169E1	1.72777E-8	2.51662E-3	2.51662E-3	6.29098E-3	2.32285E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.1737E-1	-7.98726E-1	-9.13119E0	-9.14228E0	5.50747E-3	9.30309E-2	2.73019E1	-3.26744E1	-3.26254E1	2.68163E1	1.73486E-8	2.50972E-3	2.50972E-3	6.33388E-3	2.32538E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.17275E-1	-7.98917E-1	-9.131E0	-9.14266E0	5.43594E-3	9.31025E-2	2.73493E1	-3.26986E1	-3.25918E1	2.6807E1	1.7256E-8	2.51158E-3	2.51158E-3	6.31879E-3	2.33484E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.17251E-1	-7.98702E-1	-9.13117E0	-9.14249E0	5.36442E-3	9.32217E-2	2.73063E1	-3.26404E1	-3.26554E1	2.67914E1	1.72702E-8	2.51225E-3	2.51225E-3	6.32386E-3	2.33297E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.17132E-1	-7.98416E-1	-9.13112E0	-9.14218E0	5.60284E-3	9.29594E-2	2.72809E1	-3.26567E1	-3.26608E1	2.681E1	1.712E-8	2.51863E-3	2.51863E-3	6.31555E-3	2.325E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.17037E-1	-7.98512E-1	-9.13117E0	-9.14195E0	5.55515E-3	9.31025E-2	2.73195E1	-3.26777E1	-3.26452E1	2.68226E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16822E-1	-7.98583E-1	-9.13138E0	-9.14202E0	5.05447E-3	9.30309E-2	2.73105E1	-3.26735E1	-3.26458E1	2.68334E1	1.70911E-8	2.5199E-3	2.5199E-3	6.3074E-3	2.33499E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.1687E-1	-7.98702E-1	-9.13155E0	-9.14199E0	5.38826E-3	9.29832E-2	2.73087E1	-3.26681E1	-3.2644E1	2.67806E1	1.72702E-8	2.51443E-3	2.51443E-3	6.31837E-3	2.32892E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.1706E-1	-7.98154E-1	-9.13162E0	-9.14171E0	5.45979E-3	9.30548E-2	2.73144E1	-3.26764E1	-3.26428E1	2.68024E1	1.73248E-8	2.51525E-3	2.51525E-3	6.31278E-3	2.3291E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.17156E-1	-7.98464E-1	-9.13157E0	-9.14178E0	5.4121E-3	9.32693E-2	2.72805E1	-3.26428E1	-3.26621E1	2.67878E1	1.72953E-8	2.51954E-3	2.51954E-3	6.31278E-3	2.32711E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-8.16989E-1	-7.98488E-1	-9.13122E0	-9.14221E0	5.26905E-3	9.31025E-2	2.73123E1	-3.26657E1	-3.26512E1	2.68004E1	1.72777E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.33094E-2