[Scan]
initial_time=2016-02-17T17:46:38
final_time=2016-02-17T17:46:57
ip_count=19
run=1032
dataset=5
scan=100
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08762E-4
ql1_vset=
ql1_vmon=-8.17013E-1
ql1_imon=1.37007E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=1.99426E-9
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=5.82647E-10
ql4_vset=
ql4_vmon=-9.1423E0
ql4_imon=2.79367E-10
mult1=-1.01498E-8
mult2=-2.79446E-9
rf_tmon=-3.88757E-3
rf_agc=3.39825E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=1.62061E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64751E0
bslens_imon=2.61346E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19935E1
lens5a_imon=2.00146E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05183E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=2.98378E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02016E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05036E1
cs_ea1_imon=2.43261E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37797E0
lens1_imon=2.66032E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6441E1
os_ef1alow_imon=2.98342E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03768E1
cs_ea2_imon=1.56418E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=2.98594E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.52511E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10967E1
os_restr1_imon=4.31869E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1533E1
os_ea1_imon=2.2812E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63389E1
os_ef1bup_imon=3.06595E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25871E0
cs_ionrep_imon=1.25667E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91885E2
cs_nozzle_imon=1.93384E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=3.09839E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=3.4881E-8
tplens_vset=1.4E-1
tplens_vmon=1.60178E0
tplens_imon=-3.85865E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26344E1
iondef3_imon=1.50037E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2647E1
iondef2_imon=1.58508E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98418E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=4.01379E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26592E0
ionrepsh_imon=1.92323E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34126E1
lens5b_imon=2.18279E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74435E1
cs_ef2b_imon=3.11388E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55371E0
os_ea2_imon=-6.20187E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00572E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71017E1
cs_ef2a_imon=3.18885E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0936E0
os_ef2alow_imon=-2.72762E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10638E-1
os_ef2bup_imon=-5.48826E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.47608E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23022E2
cs_ionfoca_imon=6.29748E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.25686E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73111E1
iondef1_imon=1.09842E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6798E1
iondef4_imon=1.08053E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71791E1
olens3_imon=1.02381E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=8.92955E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10672E0
cs_ionaccel_imon=-1.8879E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=1.81303E-1
window_imon=-1.04097E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.39019E-4
mask2_vset=0.0E0
mask2_vmon=-1.86422E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.24222E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93749E3
defgrida_imon=6.56449E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.19175E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34141E0
defgridb_imon=6.07061E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33269E1
os_fil1_imon=9.48216E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07059E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64454E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30864E1
cs_fil1_imon=9.99807E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62684E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66981E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.80286E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.71078E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.02326E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0341E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22588E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.33297E-2
chamber_ion_pmon=1.72927E-8
chamber_cvt_pmon=2.52647E-3
foreline_cvt_pmon=2.52647E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.15153E-1
res40_imon=-2.6123E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.17204E-1	-7.98774E-1	-9.13122E0	-9.14192E0	5.57899E-3	9.30786E-2	2.73275E1	-3.26508E1	-3.26201E1	2.67866E1	1.72584E-8	2.51739E-3	2.51739E-3	6.30202E-3	2.32711E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.16894E-1	-7.98821E-1	-9.13117E0	-9.14192E0	5.34058E-3	9.30786E-2	2.72829E1	-3.26867E1	-3.26518E1	2.68322E1	1.72477E-8	2.52428E-3	2.52428E-3	6.32386E-3	2.32892E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.16894E-1	-7.98941E-1	-9.13131E0	-9.14171E0	5.53131E-3	9.30071E-2	2.73173E1	-3.26306E1	-3.26382E1	2.68065E1	1.72927E-8	2.51443E-3	2.51443E-3	6.30192E-3	2.32689E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.16774E-1	-7.9875E-1	-9.13107E0	-9.14185E0	5.67436E-3	9.28402E-2	2.72949E1	-3.26585E1	-3.26675E1	2.6781E1	1.72255E-8	2.51709E-3	2.51709E-3	6.33388E-3	2.32928E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.1718E-1	-7.98917E-1	-9.13129E0	-9.14171E0	5.57899E-3	9.32455E-2	2.73291E1	-3.26951E1	-3.26488E1	2.68106E1	1.72658E-8	2.51096E-3	2.51096E-3	6.33436E-3	2.32117E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.1706E-1	-7.98821E-1	-9.1311E0	-9.14235E0	5.26905E-3	9.33647E-2	2.73027E1	-3.26536E1	-3.26428E1	2.6837E1	1.72702E-8	2.5199E-3	2.5199E-3	6.30192E-3	2.32285E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.1706E-1	-7.98535E-1	-9.13136E0	-9.14233E0	5.34058E-3	9.3317E-2	2.72751E1	-3.26735E1	-3.26128E1	2.68046E1	1.73206E-8	2.50803E-3	2.50803E-3	6.32418E-3	2.33079E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.16917E-1	-7.98798E-1	-9.13115E0	-9.14207E0	5.22137E-3	9.28879E-2	2.73309E1	-3.2653E1	-3.26302E1	2.68058E1	1.73174E-8	2.51739E-3	2.51739E-3	6.32896E-3	2.33507E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.17108E-1	-7.98655E-1	-9.1311E0	-9.14176E0	5.07832E-3	9.29594E-2	2.72833E1	-3.26467E1	-3.26467E1	2.67938E1	1.72852E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.32689E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.17013E-1	-7.98988E-1	-9.13138E0	-9.14211E0	5.00679E-3	9.30071E-2	2.73075E1	-3.265E1	-3.26302E1	2.67968E1	1.72852E-8	2.51771E-3	2.51771E-3	6.29645E-3	2.33499E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.17275E-1	-7.99108E-1	-9.13117E0	-9.1419E0	5.43594E-3	9.29832E-2	2.73219E1	-3.26681E1	-3.26488E1	2.6804E1	1.72177E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.33297E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.17108E-1	-7.99274E-1	-9.13119E0	-9.14183E0	5.62668E-3	9.30548E-2	2.73249E1	-3.26627E1	-3.26807E1	2.6789E1	1.712E-8	2.51809E-3	2.51809E-3	6.31283E-3	2.32801E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.17204E-1	-7.99084E-1	-9.13143E0	-9.14197E0	5.29289E-3	9.29356E-2	2.73165E1	-3.26627E1	-3.26098E1	2.67998E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.17275E-1	-7.99084E-1	-9.13136E0	-9.14214E0	5.36442E-3	9.32455E-2	2.73303E1	-3.26819E1	-3.26416E1	2.68064E1	1.70023E-8	2.52318E-3	2.52318E-3	6.34588E-3	2.32892E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.1737E-1	-7.9906E-1	-9.13143E0	-9.14202E0	5.43594E-3	9.34124E-2	2.72992E1	-3.2652E1	-3.26402E1	2.68256E1	1.72927E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.32487E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.1706E-1	-7.99084E-1	-9.13122E0	-9.14199E0	5.53131E-3	9.31263E-2	2.7346E1	-3.26741E1	-3.26362E1	2.67972E1	1.72531E-8	2.51863E-3	2.51863E-3	6.32099E-3	2.324E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.17156E-1	-7.98869E-1	-9.13119E0	-9.14223E0	5.60284E-3	9.33409E-2	2.73051E1	-3.26765E1	-3.26188E1	2.6796E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.17108E-1	-7.9875E-1	-9.13124E0	-9.14207E0	5.53131E-3	9.29594E-2	2.73289E1	-3.2688E1	-3.26405E1	2.68196E1	1.72518E-8	2.51693E-3	2.51693E-3	6.31299E-3	2.33079E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.16965E-1	-7.98774E-1	-9.1311E0	-9.14209E0	5.60284E-3	9.29832E-2	2.73574E1	-3.26921E1	-3.26398E1	2.6795E1	1.72471E-8	2.51287E-3	2.51287E-3	6.30212E-3	2.33123E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.17013E-1	-7.98583E-1	-9.13126E0	-9.1423E0	5.38826E-3	9.30071E-2	2.73111E1	-3.2647E1	-3.26344E1	2.6798E1	1.72927E-8	2.52647E-3	2.52647E-3	6.33486E-3	2.33297E-2