[Scan]
initial_time=2016-02-17T17:47:58
final_time=2016-02-17T17:48:17
ip_count=19
run=1032
dataset=5
scan=103
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08827E-4
ql1_vset=
ql1_vmon=-8.16584E-1
ql1_imon=1.37157E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=1.93783E-9
ql3_vset=
ql3_vmon=-9.13105E0
ql3_imon=5.06902E-10
ql4_vset=
ql4_vmon=-9.14166E0
ql4_imon=2.77817E-10
mult1=-9.04203E-9
mult2=-2.75254E-9
rf_tmon=-4.77679E-3
rf_agc=3.2949E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=1.64454E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69678E0
bslens_imon=2.81173E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20151E1
lens5a_imon=1.95748E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.05212E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5364E1
cs_ef1b_imon=2.99928E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04639E2
lens23_imon=1.02013E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04934E1
cs_ea1_imon=2.44919E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4008E0
lens1_imon=2.63509E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03624E1
cs_ea2_imon=1.55588E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=2.99063E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.52599E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.30031E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15348E1
os_ea1_imon=2.30211E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21064E0
cs_ionrep_imon=1.2163E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91911E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=3.09947E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20589E0
olens4_imon=3.48934E-8
tplens_vset=1.4E-1
tplens_vmon=1.55311E0
tplens_imon=-4.65174E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26518E1
iondef3_imon=1.50181E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26741E1
iondef2_imon=1.55985E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.98562E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.02441E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27373E0
ionrepsh_imon=1.90088E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33838E1
lens5b_imon=2.21054E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74964E1
cs_ef2b_imon=3.12289E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.61199E0
os_ea2_imon=-7.03101E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71558E1
cs_ef2a_imon=3.18668E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06717E0
os_ef2alow_imon=-2.63392E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.15444E-1
os_ef2bup_imon=-5.41978E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10877E1
os_restr2_imon=3.47572E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.29279E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.26767E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72841E1
iondef1_imon=1.1013E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6798E1
iondef4_imon=1.09206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.03544E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=8.90118E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11512E0
cs_ionaccel_imon=-1.978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47183E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.74911E-6
window_vset=0.0E0
window_vmon=1.92115E-1
window_imon=-1.09863E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-7.85084E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.8118E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.7231E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50106E3
multb_neg_imon=7.18814E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38051E0
defgridb_imon=5.94083E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33272E1
os_fil1_imon=9.48355E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06729E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64504E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30886E1
cs_fil1_imon=9.99519E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62492E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66941E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.89314E-2
os_fil2_imon=-2.62392E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.7549E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68758E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.4257E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06414E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22462E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.33499E-2
chamber_ion_pmon=1.72477E-8
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.28368E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.1706E-1	-7.98368E-1	-9.13115E0	-9.14214E0	5.50747E-3	9.32455E-2	2.72597E1	-3.26614E1	-3.26307E1	2.67902E1	1.72852E-8	2.51007E-3	2.51007E-3	6.31288E-3	2.32892E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.16965E-1	-7.98512E-1	-9.13136E0	-9.14195E0	5.4121E-3	9.29117E-2	2.73219E1	-3.26765E1	-3.2623E1	2.68163E1	1.72833E-8	2.51603E-3	2.51603E-3	6.31269E-3	2.33123E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.16989E-1	-7.98655E-1	-9.1311E0	-9.14211E0	5.79357E-3	9.29356E-2	2.72961E1	-3.26308E1	-3.26573E1	2.68046E1	1.72823E-8	2.5147E-3	2.5147E-3	6.33538E-3	2.33492E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.1718E-1	-7.97987E-1	-9.13122E0	-9.14209E0	5.74589E-3	9.29832E-2	2.73075E1	-3.2641E1	-3.26242E1	2.67984E1	1.73077E-8	2.52099E-3	2.52099E-3	6.32936E-3	2.32285E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.17299E-1	-7.98297E-1	-9.13124E0	-9.14183E0	5.74589E-3	9.31263E-2	2.72865E1	-3.26687E1	-3.26218E1	2.68244E1	1.72732E-8	2.51417E-3	2.51417E-3	6.35059E-3	2.32315E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.17323E-1	-7.98345E-1	-9.13134E0	-9.14185E0	5.84126E-3	9.33886E-2	2.72955E1	-3.26783E1	-3.2635E1	2.68094E1	1.72976E-8	2.51693E-3	2.51693E-3	6.30182E-3	2.33079E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.1718E-1	-7.98321E-1	-9.13079E0	-9.1423E0	5.60284E-3	9.3317E-2	2.72985E1	-3.26819E1	-3.26218E1	2.68051E1	1.72511E-8	2.51632E-3	2.51632E-3	6.32896E-3	2.32315E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.17084E-1	-7.98559E-1	-9.13107E0	-9.14218E0	5.76973E-3	9.33409E-2	2.73009E1	-3.26765E1	-3.2644E1	2.68169E1	1.70092E-8	2.51804E-3	2.51804E-3	6.34661E-3	2.32873E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.17156E-1	-7.98297E-1	-9.13146E0	-9.14223E0	5.8651E-3	9.33647E-2	2.73315E1	-3.26518E1	-3.262E1	2.68118E1	1.70173E-8	2.51739E-3	2.51739E-3	6.31817E-3	2.32513E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.17418E-1	-7.98178E-1	-9.13141E0	-9.14218E0	5.84126E-3	9.36031E-2	2.73063E1	-3.2662E1	-3.26467E1	2.67908E1	1.71953E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.33499E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.17513E-1	-7.98345E-1	-9.13115E0	-9.1423E0	5.67436E-3	9.34601E-2	2.73063E1	-3.27167E1	-3.26206E1	2.6804E1	1.72552E-8	2.52318E-3	2.52318E-3	6.32936E-3	2.33905E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.17299E-1	-7.9875E-1	-9.13162E0	-9.14202E0	5.53131E-3	9.35078E-2	2.73269E1	-3.26856E1	-3.26154E1	2.6792E1	1.73174E-8	2.51525E-3	2.51525E-3	6.33436E-3	2.32513E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.17323E-1	-7.98583E-1	-9.13115E0	-9.14207E0	5.67436E-3	9.377E-2	2.73123E1	-3.26488E1	-3.26579E1	2.67932E1	1.72658E-8	2.5131E-3	2.5131E-3	6.31278E-3	2.33905E-2
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.17037E-1	-7.98774E-1	-9.13129E0	-9.14209E0	5.6982E-3	9.34839E-2	2.73428E1	-3.27475E1	-3.26567E1	2.68106E1	1.72927E-8	2.52428E-3	2.52428E-3	6.32386E-3	2.33094E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.17013E-1	-7.98488E-1	-9.1311E0	-9.14183E0	5.91278E-3	9.32217E-2	2.73008E1	-3.26303E1	-3.26425E1	2.6795E1	1.72879E-8	2.51739E-3	2.51739E-3	6.31278E-3	2.32315E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.1706E-1	-7.98607E-1	-9.13105E0	-9.14202E0	5.8651E-3	9.35078E-2	2.72943E1	-3.26266E1	-3.26494E1	2.67842E1	1.72747E-8	2.52027E-3	2.52027E-3	6.30182E-3	2.32873E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16917E-1	-7.98631E-1	-9.13134E0	-9.14211E0	5.53131E-3	9.32932E-2	2.73027E1	-3.26242E1	-3.26488E1	2.67895E1	1.72627E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.32285E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16798E-1	-7.98726E-1	-9.13131E0	-9.14199E0	5.38826E-3	9.33886E-2	2.73157E1	-3.26661E1	-3.26048E1	2.68088E1	1.72671E-8	2.51915E-3	2.51915E-3	6.3074E-3	2.32873E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16894E-1	-7.9844E-1	-9.1311E0	-9.14195E0	5.26905E-3	9.32693E-2	2.72974E1	-3.26655E1	-3.26089E1	2.6822E1	1.72905E-8	2.52131E-3	2.52131E-3	6.29684E-3	2.32928E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.16584E-1	-7.9844E-1	-9.13105E0	-9.14166E0	5.45979E-3	9.32217E-2	2.72841E1	-3.26741E1	-3.26518E1	2.6798E1	1.72477E-8	2.51552E-3	2.51552E-3	6.32936E-3	2.33499E-2