[Scan]
initial_time=2016-02-17T17:48:51
final_time=2016-02-17T17:49:10
ip_count=19
run=1032
dataset=5
scan=105
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08769E-4
ql1_vset=
ql1_vmon=-8.16751E-1
ql1_imon=1.37337E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=1.91205E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=5.05853E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=2.86627E-10
mult1=-8.87281E-9
mult2=-2.67426E-9
rf_tmon=-4.39739E-3
rf_agc=3.34861E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=1.63647E-9
bslens_vset=-6.2E0
bslens_vmon=-6.60484E0
bslens_imon=2.58346E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20007E1
lens5a_imon=1.98134E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.04997E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53562E1
cs_ef1b_imon=3.01045E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02385E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04994E1
cs_ea1_imon=2.4254E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38786E0
lens1_imon=2.66059E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6447E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03745E1
cs_ea2_imon=1.54793E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=2.99423E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.52621E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.31112E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15483E1
os_ea1_imon=2.29464E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23741E0
cs_ionrep_imon=1.22434E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91903E2
cs_nozzle_imon=1.9346E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=3.10199E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20594E0
olens4_imon=3.48952E-8
tplens_vset=1.4E-1
tplens_vmon=1.59491E0
tplens_imon=-2.96149E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26284E1
iondef3_imon=1.48769E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26785E1
iondef2_imon=1.57878E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98526E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.01914E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2974E0
ionrepsh_imon=1.91706E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33437E1
lens5b_imon=2.19951E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74399E1
cs_ef2b_imon=3.14091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.60532E0
os_ea2_imon=-6.08352E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06136E2
lens4b_imon=2.00693E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70393E1
cs_ef2a_imon=3.16794E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07498E0
os_ef2alow_imon=-2.63392E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.26856E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.4714E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.3261E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.25218E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7321E1
iondef1_imon=1.07558E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67956E1
iondef4_imon=1.09674E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.03621E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=8.89055E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09951E0
cs_ionaccel_imon=-1.91313E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47244E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56387E1
einzel_imon=7.60855E-6
window_vset=0.0E0
window_vmon=1.85508E-1
window_imon=-1.01934E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39008E-4
mask2_vset=0.0E0
mask2_vmon=-1.8608E1
mask2_imon=-7.09401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.62645E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93683E3
defgrida_imon=6.44375E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.10856E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.57822E0
defgridb_imon=6.08013E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33278E1
os_fil1_imon=9.49027E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06897E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64681E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30848E1
cs_fil1_imon=1.00018E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.60702E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67014E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.75322E-2
os_fil2_imon=-2.96029E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60484E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.75607E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.98064E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22567E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.33297E-2
chamber_ion_pmon=1.73152E-8
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.68612E-1
res40_imon=-2.74925E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-8.16846E-1	-7.98702E-1	-9.13155E0	-9.14214E0	5.26905E-3	9.33409E-2	2.73057E1	-3.26921E1	-3.26201E1	2.68274E1	1.73283E-8	2.51915E-3	2.51915E-3	6.28511E-3	2.33285E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16774E-1	-7.98821E-1	-9.13124E0	-9.14199E0	5.26905E-3	9.35555E-2	2.73135E1	-3.26801E1	-3.26278E1	2.68148E1	1.7229E-8	2.51739E-3	2.51739E-3	6.3074E-3	2.33507E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.17037E-1	-7.98607E-1	-9.13098E0	-9.14173E0	5.96046E-3	9.31978E-2	2.72815E1	-3.26608E1	-3.26183E1	2.67937E1	1.72594E-8	2.52473E-3	2.52473E-3	6.31858E-3	2.32873E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.16917E-1	-7.98512E-1	-9.13103E0	-9.14192E0	5.55515E-3	9.31025E-2	2.73193E1	-3.2662E1	-3.2636E1	2.68154E1	1.71176E-8	2.52131E-3	2.52131E-3	6.31798E-3	2.32149E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.16798E-1	-7.98488E-1	-9.13112E0	-9.14237E0	5.29289E-3	9.32693E-2	2.73033E1	-3.26825E1	-3.26476E1	2.67866E1	1.69811E-8	2.51739E-3	2.51739E-3	6.31817E-3	2.32711E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16798E-1	-7.98178E-1	-9.13131E0	-9.1419E0	5.62668E-3	9.3317E-2	2.72895E1	-3.26651E1	-3.25821E1	2.68064E1	1.70096E-8	2.51552E-3	2.51552E-3	6.32386E-3	2.33094E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16751E-1	-7.98678E-1	-9.13124E0	-9.14207E0	5.26905E-3	9.29832E-2	2.72835E1	-3.27113E1	-3.26374E1	2.67968E1	1.72671E-8	2.5147E-3	2.5147E-3	6.32418E-3	2.32461E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.16727E-1	-7.9875E-1	-9.13146E0	-9.14214E0	5.36442E-3	9.30071E-2	2.73003E1	-3.26897E1	-3.2644E1	2.68088E1	1.72511E-8	2.52492E-3	2.52492E-3	6.32356E-3	2.32711E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.16941E-1	-7.98559E-1	-9.13153E0	-9.14237E0	5.57899E-3	9.30309E-2	2.73328E1	-3.26809E1	-3.26107E1	2.67824E1	1.72477E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.31681E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.16607E-1	-7.98512E-1	-9.13167E0	-9.14168E0	5.53131E-3	9.31978E-2	2.7291E1	-3.2675E1	-3.26634E1	2.68244E1	1.73152E-8	2.51443E-3	2.51443E-3	6.3514E-3	2.32892E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16917E-1	-7.98154E-1	-9.1315E0	-9.14161E0	5.60284E-3	9.32932E-2	2.73664E1	-3.26915E1	-3.26014E1	2.68034E1	1.72702E-8	2.5188E-3	2.5188E-3	6.31563E-3	2.33398E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.17013E-1	-7.98464E-1	-9.13148E0	-9.14185E0	5.57899E-3	9.31978E-2	2.73189E1	-3.26807E1	-3.26128E1	2.67746E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.16727E-1	-7.9844E-1	-9.13119E0	-9.14171E0	5.45979E-3	9.33647E-2	2.73249E1	-3.26639E1	-3.26326E1	2.68028E1	1.73002E-8	2.52099E-3	2.52099E-3	6.30192E-3	2.33499E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09379E0	-8.16631E-1	-7.98345E-1	-9.1311E0	-9.14199E0	5.31673E-3	9.32932E-2	2.73502E1	-3.26933E1	-3.25773E1	2.67782E1	1.72627E-8	2.51552E-3	2.51552E-3	6.31837E-3	2.32285E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.1687E-1	-7.98273E-1	-9.13119E0	-9.14192E0	5.29289E-3	9.32217E-2	2.73021E1	-3.26767E1	-3.26354E1	2.67854E1	1.72777E-8	2.51334E-3	2.51334E-3	6.32936E-3	2.32487E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16536E-1	-7.98368E-1	-9.13119E0	-9.1418E0	5.22137E-3	9.33409E-2	2.72922E1	-3.26805E1	-3.26174E1	2.67956E1	1.72889E-8	2.51607E-3	2.51607E-3	6.32386E-3	2.33094E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.16631E-1	-7.98655E-1	-9.13119E0	-9.1419E0	5.24521E-3	9.32217E-2	2.73405E1	-3.26891E1	-3.25942E1	2.6785E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.16631E-1	-7.98535E-1	-9.1315E0	-9.14173E0	5.60284E-3	9.35078E-2	2.73181E1	-3.26726E1	-3.26231E1	2.6819E1	1.72953E-8	2.51417E-3	2.51417E-3	6.30202E-3	2.32711E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16846E-1	-7.98678E-1	-9.13129E0	-9.14192E0	5.45979E-3	9.35316E-2	2.73117E1	-3.2632E1	-3.26284E1	2.67992E1	1.72511E-8	2.51954E-3	2.51954E-3	6.3074E-3	2.32315E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.16751E-1	-7.98583E-1	-9.13129E0	-9.14199E0	5.126E-3	9.32455E-2	2.7321E1	-3.26785E1	-3.26284E1	2.67956E1	1.73152E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.33297E-2