[Scan]
initial_time=2016-02-17T17:49:44
final_time=2016-02-17T17:50:04
ip_count=19
run=1032
dataset=5
scan=107
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.1656E-1
ql1_imon=1.36769E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=1.87179E-9
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=4.897E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=2.93148E-10
mult1=-1.00896E-8
mult2=-2.81442E-9
rf_tmon=-3.92362E-3
rf_agc=3.39404E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=1.56031E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65652E0
bslens_imon=2.63148E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20001E1
lens5a_imon=1.97947E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05125E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53568E1
cs_ef1b_imon=3.00613E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04661E2
lens23_imon=1.02229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04832E1
cs_ea1_imon=2.4236E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42663E0
lens1_imon=2.78649E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.54435E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=2.98594E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.52918E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11466E1
os_restr1_imon=4.2895E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15606E1
os_ea1_imon=2.27291E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63611E1
os_ef1bup_imon=3.07676E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2503E0
cs_ionrep_imon=1.22855E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93694E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01905E1
cs_anode1_imon=3.09406E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.49964E-8
tplens_vset=1.4E-1
tplens_vmon=1.58976E0
tplens_imon=-4.29124E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26651E1
iondef3_imon=1.51767E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26837E1
iondef2_imon=1.57066E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.98714E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.0264E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28635E0
ionrepsh_imon=1.91314E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3367E1
lens5b_imon=2.18639E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.11497E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.6198E0
os_ea2_imon=-6.70656E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00547E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70537E1
cs_ef2a_imon=3.18596E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07438E0
os_ef2alow_imon=-2.73843E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.27457E-1
os_ef2bup_imon=-5.38014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10823E1
os_restr2_imon=3.4732E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.31262E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.25866E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73315E1
iondef1_imon=1.07534E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67978E1
iondef4_imon=1.08377E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71794E1
olens3_imon=1.01866E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=8.8954E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13855E0
cs_ionaccel_imon=-1.7978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47172E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=7.77434E-6
window_vset=0.0E0
window_vmon=1.68689E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.86116E1
mask2_imon=-6.84173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.4477E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93748E3
defgrida_imon=6.80602E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.17733E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4557E0
defgridb_imon=6.15712E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33285E1
os_fil1_imon=9.47982E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06626E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64694E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=9.98384E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62282E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67152E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.91894E-2
os_fil2_imon=-2.70801E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97714E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59348E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.35963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05813E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22576E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.31882E-2
chamber_ion_pmon=1.72777E-8
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.47279E-1
res40_imon=-2.77087E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0965E0	-8.16703E-1	-7.98321E-1	-9.131E0	-9.1418E0	5.14984E-3	9.29832E-2	2.72721E1	-3.27133E1	-3.26207E1	2.68099E1	1.70023E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.33702E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09611E0	-8.16774E-1	-7.98345E-1	-9.13136E0	-9.14204E0	5.38826E-3	9.32217E-2	2.72824E1	-3.26401E1	-3.2656E1	2.68038E1	1.70028E-8	2.52276E-3	2.52276E-3	6.32356E-3	2.32513E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.16894E-1	-7.98416E-1	-9.13093E0	-9.14207E0	5.4121E-3	9.3174E-2	2.73222E1	-3.26673E1	-3.26402E1	2.6796E1	1.71149E-8	2.51693E-3	2.51693E-3	6.31299E-3	2.32666E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.16894E-1	-7.98702E-1	-9.13136E0	-9.14207E0	5.43594E-3	9.32693E-2	2.73291E1	-3.26873E1	-3.26224E1	2.68088E1	1.72437E-8	2.51203E-3	2.51203E-3	6.30202E-3	2.32315E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.16941E-1	-7.98655E-1	-9.13143E0	-9.14195E0	5.53131E-3	9.36985E-2	2.73315E1	-3.26711E1	-3.26891E1	2.68322E1	1.72627E-8	2.5068E-3	2.5068E-3	6.32386E-3	2.32285E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.16751E-1	-7.98559E-1	-9.13107E0	-9.14202E0	5.48363E-3	9.33886E-2	2.73417E1	-3.27098E1	-3.25989E1	2.67902E1	1.72552E-8	2.51334E-3	2.51334E-3	6.34037E-3	2.32892E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.16631E-1	-7.98464E-1	-9.13136E0	-9.14207E0	5.45979E-3	9.3174E-2	2.73207E1	-3.26488E1	-3.26314E1	2.67974E1	1.72658E-8	2.5131E-3	2.5131E-3	6.3074E-3	2.33109E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.1656E-1	-7.98607E-1	-9.13143E0	-9.14199E0	5.38826E-3	9.34601E-2	2.73231E1	-3.26915E1	-3.26326E1	2.68232E1	1.72777E-8	2.51334E-3	2.51334E-3	6.32386E-3	2.32487E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.16631E-1	-7.98392E-1	-9.13138E0	-9.14197E0	5.43594E-3	9.32217E-2	2.73263E1	-3.26437E1	-3.26236E1	2.67914E1	1.72477E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.33297E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16846E-1	-7.98321E-1	-9.13138E0	-9.14226E0	5.36442E-3	9.34362E-2	2.73105E1	-3.26512E1	-3.26416E1	2.67974E1	1.73248E-8	2.51632E-3	2.51632E-3	6.34518E-3	2.3291E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.16917E-1	-7.98225E-1	-9.13143E0	-9.14202E0	5.34058E-3	9.31263E-2	2.72991E1	-3.26795E1	-3.26302E1	2.67868E1	1.73152E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.33297E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.17227E-1	-7.98368E-1	-9.13148E0	-9.14214E0	5.29289E-3	9.35555E-2	2.72997E1	-3.26554E1	-3.25912E1	2.68088E1	1.72777E-8	2.52099E-3	2.52099E-3	6.3074E-3	2.32689E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09711E0	-8.16917E-1	-7.98488E-1	-9.13138E0	-9.14185E0	5.55515E-3	9.37462E-2	2.73333E1	-3.26567E1	-3.26482E1	2.67704E1	1.72477E-8	2.52099E-3	2.52099E-3	6.34588E-3	2.33094E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09711E0	-8.16965E-1	-7.98416E-1	-9.13126E0	-9.14185E0	5.65052E-3	9.35316E-2	2.73175E1	-3.27151E1	-3.26372E1	2.68106E1	1.73002E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.33905E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.1706E-1	-7.98869E-1	-9.13134E0	-9.14195E0	5.74589E-3	9.35316E-2	2.73124E1	-3.27068E1	-3.26034E1	2.68532E1	1.72584E-8	2.51954E-3	2.51954E-3	6.32896E-3	2.3291E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.17037E-1	-7.98774E-1	-9.13093E0	-9.14171E0	5.4121E-3	9.33886E-2	2.73141E1	-3.26609E1	-3.26152E1	2.67926E1	1.72441E-8	2.52362E-3	2.52362E-3	6.29624E-3	2.33285E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16751E-1	-7.98702E-1	-9.13119E0	-9.14223E0	5.24521E-3	9.33409E-2	2.73187E1	-3.26472E1	-3.26561E1	2.68214E1	1.72605E-8	2.51972E-3	2.51972E-3	6.31012E-3	2.33101E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16941E-1	-7.99108E-1	-9.13084E0	-9.14223E0	5.45979E-3	9.30071E-2	2.73057E1	-3.26795E1	-3.26278E1	2.68052E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16607E-1	-7.99012E-1	-9.13122E0	-9.14178E0	5.26905E-3	9.31025E-2	2.72939E1	-3.26915E1	-3.26095E1	2.68196E1	1.72511E-8	2.52061E-3	2.52061E-3	6.33977E-3	2.32513E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.1656E-1	-7.98583E-1	-9.13112E0	-9.14176E0	5.4121E-3	9.32455E-2	2.73315E1	-3.26837E1	-3.26651E1	2.67978E1	1.72777E-8	2.51443E-3	2.51443E-3	6.3074E-3	2.31882E-2