[Scan]
initial_time=2016-02-17T17:50:10
final_time=2016-02-17T17:50:29
ip_count=19
run=1032
dataset=5
scan=108
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08803E-4
ql1_vset=
ql1_vmon=-8.16679E-1
ql1_imon=1.37107E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=1.95106E-9
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=4.3937E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=2.89428E-10
mult1=-9.42733E-9
mult2=-2.68468E-9
rf_tmon=-5.11926E-3
rf_agc=3.22821E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=1.60631E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68392E0
bslens_imon=2.83151E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2004E1
lens5a_imon=1.97314E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05308E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53462E1
cs_ef1b_imon=3.01171E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02003E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04852E1
cs_ea1_imon=2.47203E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40953E0
lens1_imon=2.67759E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6466E1
os_ef1alow_imon=2.96881E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03766E1
cs_ea2_imon=1.56931E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83967E1
cs_ef1a_imon=2.99712E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.52778E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11521E1
os_restr1_imon=4.28157E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15662E1
os_ea1_imon=2.28823E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63849E1
os_ef1bup_imon=3.08513E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22946E0
cs_ionrep_imon=1.23793E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91925E2
cs_nozzle_imon=1.93465E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01491E1
cs_anode1_imon=3.11212E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=3.49073E-8
tplens_vset=1.4E-1
tplens_vmon=1.58635E0
tplens_imon=-3.64654E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26404E1
iondef3_imon=1.50775E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26705E1
iondef2_imon=1.56298E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98952E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=4.01551E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27775E0
ionrepsh_imon=1.90613E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34089E1
lens5b_imon=2.19814E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74258E1
cs_ef2b_imon=3.11477E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54334E0
os_ea2_imon=-6.95136E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00763E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71729E1
cs_ef2a_imon=3.17713E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08183E0
os_ef2alow_imon=-2.55594E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.42146E-1
os_ef2bup_imon=-5.37342E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10998E1
os_restr2_imon=3.47127E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23101E2
cs_ionfoca_imon=6.29521E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01808E1
cs_anode2_imon=2.25714E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73033E1
iondef1_imon=1.108E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68184E1
iondef4_imon=1.08547E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.02413E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=8.9124E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12056E0
cs_ionaccel_imon=-1.93229E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0205E2
cs_ionfocb_imon=1.47222E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56044E1
einzel_imon=7.56399E-6
window_vset=0.0E0
window_vmon=1.65768E-1
window_imon=-1.06095E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39168E-4
mask2_vset=0.0E0
mask2_vmon=-1.86182E1
mask2_imon=-6.76146E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.90645E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=7.01007E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.02366E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29252E0
defgridb_imon=5.96883E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3326E1
os_fil1_imon=9.4834E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07447E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64648E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30923E1
cs_fil1_imon=1.00111E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62888E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66784E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.00442E-2
os_fil2_imon=-2.62338E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80705E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74099E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3569E-1
cs_fil2_imon=-2.21793E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.8654E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22591E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.32285E-2
chamber_ion_pmon=1.72927E-8
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.17338E-1
res40_imon=-2.63556E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.1718E-1	-7.98678E-1	-9.13138E0	-9.14216E0	5.65052E-3	9.3317E-2	2.73322E1	-3.26378E1	-3.26337E1	2.67836E1	1.7004E-8	2.51944E-3	2.51944E-3	6.31429E-3	2.3365E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.1718E-1	-7.98702E-1	-9.13117E0	-9.14171E0	5.50747E-3	9.32455E-2	2.73045E1	-3.26614E1	-3.26354E1	2.67884E1	1.70028E-8	2.5131E-3	2.5131E-3	6.29665E-3	2.32315E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.16965E-1	-7.98678E-1	-9.13119E0	-9.14171E0	5.6982E-3	9.32455E-2	2.73558E1	-3.26573E1	-3.26531E1	2.68053E1	1.72437E-8	2.51417E-3	2.51417E-3	6.31817E-3	2.33308E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.17084E-1	-7.98416E-1	-9.131E0	-9.14192E0	5.84126E-3	9.3174E-2	2.73159E1	-3.2644E1	-3.26549E1	2.68106E1	1.72658E-8	2.51525E-3	2.51525E-3	6.32896E-3	2.31919E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.17156E-1	-7.98321E-1	-9.13115E0	-9.14228E0	5.76973E-3	9.29594E-2	2.73099E1	-3.26494E1	-3.25972E1	2.68052E1	1.73002E-8	2.51662E-3	2.51662E-3	6.32936E-3	2.33499E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.17084E-1	-7.98488E-1	-9.13103E0	-9.14197E0	5.36442E-3	9.32932E-2	2.7308E1	-3.26986E1	-3.25865E1	2.6807E1	1.72702E-8	2.51334E-3	2.51334E-3	6.31837E-3	2.32487E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.17132E-1	-7.9844E-1	-9.1315E0	-9.14204E0	5.48363E-3	9.33647E-2	2.73131E1	-3.26285E1	-3.26315E1	2.67864E1	1.72805E-8	2.5131E-3	2.5131E-3	6.31278E-3	2.32315E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.17108E-1	-7.9875E-1	-9.1316E0	-9.14223E0	5.48363E-3	9.32932E-2	2.73193E1	-3.26649E1	-3.26443E1	2.67995E1	1.72747E-8	2.51359E-3	2.51359E-3	6.31299E-3	2.33285E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.17037E-1	-7.98678E-1	-9.13126E0	-9.14226E0	5.67436E-3	9.32217E-2	2.72654E1	-3.2647E1	-3.26374E1	2.67866E1	1.72953E-8	2.51203E-3	2.51203E-3	6.32896E-3	2.32117E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.17037E-1	-7.98583E-1	-9.13129E0	-9.14185E0	5.60284E-3	9.31978E-2	2.736E1	-3.2688E1	-3.2616E1	2.68052E1	1.73077E-8	2.51443E-3	2.51443E-3	6.3074E-3	2.32892E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.17084E-1	-7.98702E-1	-9.13148E0	-9.1418E0	5.50747E-3	9.32932E-2	2.73243E1	-3.26723E1	-3.26284E1	2.68028E1	1.72584E-8	2.51632E-3	2.51632E-3	6.33436E-3	2.32315E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16917E-1	-7.98893E-1	-9.13155E0	-9.1423E0	5.05447E-3	9.33647E-2	2.73261E1	-3.2647E1	-3.26837E1	2.6801E1	1.72477E-8	2.51334E-3	2.51334E-3	6.3074E-3	2.32689E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16774E-1	-7.98631E-1	-9.13155E0	-9.14192E0	5.55515E-3	9.27687E-2	2.73255E1	-3.26825E1	-3.26032E1	2.67956E1	1.72852E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.32892E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.16703E-1	-7.98607E-1	-9.1315E0	-9.14209E0	5.65052E-3	9.34601E-2	2.73387E1	-3.27169E1	-3.26343E1	2.67659E1	1.72627E-8	2.52647E-3	2.52647E-3	6.32386E-3	2.32892E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.16774E-1	-7.98869E-1	-9.13143E0	-9.14259E0	5.84126E-3	9.32217E-2	2.73201E1	-3.26338E1	-3.26266E1	2.68298E1	1.72732E-8	2.52169E-3	2.52169E-3	6.30202E-3	2.34505E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.16607E-1	-7.99036E-1	-9.13155E0	-9.14199E0	5.74589E-3	9.32932E-2	2.73063E1	-3.26602E1	-3.25959E1	2.67974E1	1.72927E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.32285E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09364E0	-8.16607E-1	-7.98917E-1	-9.13136E0	-9.14207E0	5.45979E-3	9.34124E-2	2.73417E1	-3.27017E1	-3.26278E1	2.67902E1	1.73026E-8	2.51632E-3	2.51632E-3	6.31278E-3	2.33109E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.16584E-1	-7.9875E-1	-9.13148E0	-9.14218E0	5.45979E-3	9.32693E-2	2.72961E1	-3.26717E1	-3.26669E1	2.67896E1	1.72327E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.32487E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.16488E-1	-7.98774E-1	-9.13165E0	-9.14204E0	5.43594E-3	9.34362E-2	2.72986E1	-3.26649E1	-3.2629E1	2.6829E1	1.7229E-8	2.51954E-3	2.51954E-3	6.32896E-3	2.33507E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.16679E-1	-7.98559E-1	-9.13115E0	-9.14202E0	5.34058E-3	9.32693E-2	2.73033E1	-3.26705E1	-3.26404E1	2.68184E1	1.72927E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.32285E-2