[Scan]
initial_time=2016-02-17T17:51:30
final_time=2016-02-17T17:51:49
ip_count=19
run=1032
dataset=5
scan=111
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08747E-4
ql1_vset=
ql1_vmon=-8.16441E-1
ql1_imon=1.3711E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=1.9515E-9
ql3_vset=
ql3_vmon=-9.13107E0
ql3_imon=4.11427E-10
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=2.66254E-10
mult1=-8.72898E-9
mult2=-2.50702E-9
rf_tmon=-4.96304E-3
rf_agc=3.30272E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=1.62368E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68837E0
bslens_imon=2.60264E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19983E1
lens5a_imon=1.98091E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.05024E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53362E1
cs_ef1b_imon=2.99113E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02258E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04934E1
cs_ea1_imon=2.43802E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38578E0
lens1_imon=2.69998E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64814E1
os_ef1alow_imon=2.97092E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03744E1
cs_ea2_imon=1.56598E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84039E1
cs_ef1a_imon=2.99001E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.52803E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.29167E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15318E1
os_ea1_imon=2.26173E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63429E1
os_ef1bup_imon=3.08881E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26712E0
cs_ionrep_imon=1.22207E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.919E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=3.09367E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=3.49622E-8
tplens_vset=1.4E-1
tplens_vmon=1.60238E0
tplens_imon=-2.66901E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26639E1
iondef3_imon=1.50505E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.5786E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98367E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.0651E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31338E0
ionrepsh_imon=1.93296E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.337E1
lens5b_imon=2.18459E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74482E1
cs_ef2b_imon=3.13522E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57835E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06144E2
lens4b_imon=2.00695E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71713E1
cs_ef2a_imon=3.17601E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09011E0
os_ef2alow_imon=-2.52192E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.03246E-1
os_ef2bup_imon=-5.34008E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10649E1
os_restr2_imon=3.48702E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.30144E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02065E1
cs_anode2_imon=2.26507E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73327E1
iondef1_imon=1.0858E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68007E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.02462E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=8.90305E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09459E0
cs_ionaccel_imon=-1.84451E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02118E2
cs_ionfocb_imon=1.47095E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55925E1
einzel_imon=7.75895E-6
window_vset=0.0E0
window_vmon=1.63953E-1
window_imon=-1.15213E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39391E-4
mask2_vset=0.0E0
mask2_vmon=-1.86494E1
mask2_imon=-9.01382E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.47654E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.46355E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.24582E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36247E0
defgridb_imon=6.1355E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33292E1
os_fil1_imon=9.4872E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06543E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64499E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30892E1
cs_fil1_imon=9.97636E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61536E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67191E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.90604E-2
os_fil2_imon=-2.68122E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0781E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.63731E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3503E-1
cs_fil2_imon=-2.68745E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28592E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22571E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.32513E-2
chamber_ion_pmon=1.70173E-8
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.07414E-1
res40_imon=-2.63794E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16393E-1	-7.98345E-1	-9.13138E0	-9.14195E0	5.24521E-3	9.29832E-2	2.73255E1	-3.26681E1	-3.26026E1	2.68296E1	1.72402E-8	2.5188E-3	2.5188E-3	6.32936E-3	2.34924E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16441E-1	-7.98535E-1	-9.13157E0	-9.14178E0	5.48363E-3	9.29832E-2	2.73243E1	-3.26783E1	-3.26098E1	2.67801E1	1.72552E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.33094E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16441E-1	-7.98893E-1	-9.13141E0	-9.14204E0	5.29289E-3	9.32932E-2	2.73075E1	-3.26837E1	-3.26669E1	2.6829E1	1.72402E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.33297E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.16751E-1	-7.98845E-1	-9.13153E0	-9.14202E0	5.38826E-3	9.30786E-2	2.73532E1	-3.26476E1	-3.26344E1	2.67974E1	1.72552E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.33905E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16679E-1	-7.98583E-1	-9.13177E0	-9.14235E0	5.126E-3	9.32693E-2	2.73134E1	-3.26815E1	-3.26467E1	2.681E1	1.72732E-8	2.52169E-3	2.52169E-3	6.35059E-3	2.32513E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09634E0	-8.17084E-1	-7.98559E-1	-9.13141E0	-9.14228E0	5.4121E-3	9.32217E-2	2.73087E1	-3.26693E1	-3.2644E1	2.68142E1	1.72777E-8	2.5188E-3	2.5188E-3	6.32936E-3	2.32487E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.16822E-1	-7.98392E-1	-9.13167E0	-9.14214E0	5.45979E-3	9.32217E-2	2.72921E1	-3.2649E1	-3.26608E1	2.68184E1	1.72702E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.33094E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09657E0	-8.16703E-1	-7.98321E-1	-9.1315E0	-9.14216E0	5.65052E-3	9.29594E-2	2.72829E1	-3.265E1	-3.2626E1	2.68105E1	1.72953E-8	2.51847E-3	2.51847E-3	6.30202E-3	2.3291E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.16774E-1	-7.98178E-1	-9.13138E0	-9.14173E0	5.31673E-3	9.26971E-2	2.73183E1	-3.26795E1	-3.26038E1	2.68106E1	1.73077E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.34109E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.1687E-1	-7.97963E-1	-9.13141E0	-9.14195E0	5.53131E-3	9.28164E-2	2.73393E1	-3.26874E1	-3.26024E1	2.68256E1	1.72777E-8	2.51334E-3	2.51334E-3	6.30192E-3	2.32487E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09619E0	-8.16798E-1	-7.98082E-1	-9.13157E0	-9.1423E0	5.45979E-3	9.32217E-2	2.72984E1	-3.26676E1	-3.26168E1	2.67902E1	1.72658E-8	2.51847E-3	2.51847E-3	6.32356E-3	2.33109E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16512E-1	-7.98249E-1	-9.13141E0	-9.14221E0	5.24521E-3	9.33647E-2	2.73139E1	-3.27121E1	-3.26296E1	2.67968E1	1.72627E-8	2.51443E-3	2.51443E-3	6.32936E-3	2.32892E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16417E-1	-7.98202E-1	-9.13105E0	-9.14204E0	5.50747E-3	9.32455E-2	2.73281E1	-3.27092E1	-3.26242E1	2.67873E1	1.72627E-8	2.52099E-3	2.52099E-3	6.3074E-3	2.33094E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.16679E-1	-7.98273E-1	-9.13122E0	-9.14216E0	5.48363E-3	9.31978E-2	2.72626E1	-3.26331E1	-3.27192E1	2.6792E1	1.72217E-8	2.51954E-3	2.51954E-3	6.31817E-3	2.32315E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.16703E-1	-7.98178E-1	-9.13124E0	-9.14187E0	6.1512E-3	9.29117E-2	2.73279E1	-3.26518E1	-3.25888E1	2.6807E1	1.72879E-8	2.51525E-3	2.51525E-3	6.33977E-3	2.32711E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.16536E-1	-7.9875E-1	-9.13126E0	-9.14202E0	6.07967E-3	9.28879E-2	2.73069E1	-3.26723E1	-3.26951E1	2.68136E1	1.73077E-8	2.51771E-3	2.51771E-3	6.3074E-3	2.33094E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16393E-1	-7.98488E-1	-9.13117E0	-9.14214E0	5.81741E-3	9.28164E-2	2.72772E1	-3.26784E1	-3.26476E1	2.68116E1	1.72658E-8	2.51632E-3	2.51632E-3	6.32896E-3	2.31919E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.16584E-1	-7.98106E-1	-9.13136E0	-9.14192E0	5.53131E-3	9.31978E-2	2.73222E1	-3.26676E1	-3.26223E1	2.68176E1	1.72362E-8	2.51575E-3	2.51575E-3	6.3074E-3	2.33329E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.16607E-1	-7.98249E-1	-9.1315E0	-9.14185E0	5.6982E-3	9.30786E-2	2.73257E1	-3.27056E1	-3.26254E1	2.67937E1	1.69935E-8	2.52066E-3	2.52066E-3	6.3131E-3	2.32433E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.16441E-1	-7.9844E-1	-9.13107E0	-9.14214E0	5.45979E-3	9.32455E-2	2.73327E1	-3.26585E1	-3.26639E1	2.68007E1	1.70173E-8	2.52169E-3	2.52169E-3	6.30202E-3	2.32513E-2