[Scan]
initial_time=2016-02-17T17:53:43
final_time=2016-02-17T17:54:03
ip_count=19
run=1032
dataset=5
scan=116
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08791E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=1.36649E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=1.90818E-9
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=3.86441E-10
ql4_vset=
ql4_vmon=-9.1423E0
ql4_imon=2.6263E-10
mult1=-9.32784E-9
mult2=-2.87767E-9
rf_tmon=-5.88136E-3
rf_agc=3.18227E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=1.61155E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66734E0
bslens_imon=2.56659E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20103E1
lens5a_imon=1.98848E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12555E2
lens4a_imon=2.0505E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53556E1
cs_ef1b_imon=3.00577E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04576E2
lens23_imon=1.02265E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05222E1
cs_ea1_imon=2.43405E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36956E0
lens1_imon=2.56299E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03858E1
cs_ea2_imon=1.57283E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=2.99171E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.52497E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.29202E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15516E1
os_ea1_imon=2.29274E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.08001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27253E0
cs_ionrep_imon=1.2437E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93568E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=3.09406E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.48568E-8
tplens_vset=1.4E-1
tplens_vmon=1.59337E0
tplens_imon=-1.08283E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26294E1
iondef3_imon=1.50397E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27063E1
iondef2_imon=1.57139E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03005E2
lens6_imon=2.98512E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=4.03351E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26652E0
ionrepsh_imon=1.92683E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33994E1
lens5b_imon=2.16909E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58856E0
os_ea2_imon=-5.73322E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06145E2
lens4b_imon=2.0076E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71138E1
cs_ef2a_imon=3.18813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10441E0
os_ef2alow_imon=-2.65915E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22652E-1
os_ef2bup_imon=-5.44501E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10901E1
os_restr2_imon=3.47176E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.29604E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.26803E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73182E1
iondef1_imon=1.09121E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.07728E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71792E1
olens3_imon=1.02801E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=8.89666E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12413E0
cs_ionaccel_imon=-1.88429E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47176E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.6482E-6
window_vset=0.0E0
window_vmon=1.73494E-1
window_imon=-1.03736E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39124E-4
mask2_vset=0.0E0
mask2_vmon=-1.8617E1
mask2_imon=-7.27421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.49456E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.61135E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.62795E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31134E0
defgridb_imon=6.52483E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33277E1
os_fil1_imon=9.48715E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06837E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64456E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30922E1
cs_fil1_imon=9.99405E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61375E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66936E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.95763E-2
os_fil2_imon=-2.67197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.62699E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.56386E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02209E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22575E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.33109E-2
chamber_ion_pmon=1.72805E-8
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.36777E-1
res40_imon=-2.62311E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.16727E-1	-7.98297E-1	-9.13107E0	-9.14173E0	5.60284E-3	9.3174E-2	2.73183E1	-3.27173E1	-3.26176E1	2.68304E1	1.72747E-8	2.51915E-3	2.51915E-3	6.32418E-3	2.32461E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.1656E-1	-7.98202E-1	-9.13129E0	-9.14187E0	5.45979E-3	9.35316E-2	2.73326E1	-3.26878E1	-3.26168E1	2.67864E1	1.72584E-8	2.51739E-3	2.51739E-3	6.33436E-3	2.33507E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.16536E-1	-7.97796E-1	-9.13148E0	-9.14183E0	5.6982E-3	9.34601E-2	2.73039E1	-3.27071E1	-3.26446E1	2.68146E1	1.72441E-8	2.51136E-3	2.51136E-3	6.32978E-3	2.33905E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.16488E-1	-7.98035E-1	-9.13134E0	-9.14159E0	5.38826E-3	9.31263E-2	2.73039E1	-3.26633E1	-3.26645E1	2.68124E1	1.72364E-8	2.51417E-3	2.51417E-3	6.31817E-3	2.33706E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.16607E-1	-7.98202E-1	-9.13153E0	-9.14183E0	5.72205E-3	9.34124E-2	2.73081E1	-3.26879E1	-3.2626E1	2.6789E1	1.72879E-8	2.51525E-3	2.51525E-3	6.32896E-3	2.33507E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.16751E-1	-7.98035E-1	-9.13143E0	-9.14187E0	5.53131E-3	9.33409E-2	2.7298E1	-3.26679E1	-3.26431E1	2.67978E1	1.72702E-8	2.5188E-3	2.5188E-3	6.30466E-3	2.33094E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.16679E-1	-7.97892E-1	-9.13115E0	-9.14211E0	5.36442E-3	9.33409E-2	2.72961E1	-3.26777E1	-3.2638E1	2.67998E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.17132E-1	-7.97915E-1	-9.13136E0	-9.14195E0	5.48363E-3	9.33647E-2	2.73181E1	-3.26296E1	-3.26284E1	2.67938E1	1.73077E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.32689E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.17084E-1	-7.97772E-1	-9.13146E0	-9.1418E0	5.38826E-3	9.33647E-2	2.73045E1	-3.26422E1	-3.26242E1	2.68088E1	1.72658E-8	2.51417E-3	2.51417E-3	6.3074E-3	2.33308E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16751E-1	-7.98225E-1	-9.13157E0	-9.14197E0	5.57899E-3	9.32693E-2	2.72979E1	-3.26801E1	-3.26164E1	2.67932E1	1.71411E-8	2.52492E-3	2.52492E-3	6.31817E-3	2.3291E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16727E-1	-7.98178E-1	-9.13126E0	-9.1419E0	5.31673E-3	9.3317E-2	2.72709E1	-3.26585E1	-3.26771E1	2.67992E1	1.69949E-8	2.52318E-3	2.52318E-3	6.32386E-3	2.33905E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.16417E-1	-7.98178E-1	-9.13122E0	-9.14137E0	5.34058E-3	9.3174E-2	2.73081E1	-3.26897E1	-3.26212E1	2.68106E1	1.70092E-8	2.52585E-3	2.52585E-3	6.31858E-3	2.34113E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16464E-1	-7.98273E-1	-9.13136E0	-9.1413E0	5.29289E-3	9.32455E-2	2.72883E1	-3.26627E1	-3.2593E1	2.68052E1	1.71134E-8	2.51552E-3	2.51552E-3	6.3074E-3	2.33702E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.16679E-1	-7.98345E-1	-9.13138E0	-9.14183E0	5.22137E-3	9.30309E-2	2.73502E1	-3.26368E1	-3.26176E1	2.68028E1	1.72879E-8	2.51632E-3	2.51632E-3	6.28592E-3	2.31919E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.16798E-1	-7.98202E-1	-9.13119E0	-9.1419E0	5.60284E-3	9.32693E-2	2.73364E1	-3.27133E1	-3.26366E1	2.67873E1	1.72702E-8	2.51662E-3	2.51662E-3	6.34037E-3	2.32892E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.16774E-1	-7.98273E-1	-9.13119E0	-9.14216E0	5.76973E-3	9.31263E-2	2.72927E1	-3.26443E1	-3.26767E1	2.68166E1	1.72143E-8	2.51739E-3	2.51739E-3	6.33436E-3	2.33109E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.1687E-1	-7.98202E-1	-9.1311E0	-9.14211E0	5.29289E-3	9.29356E-2	2.73222E1	-3.26744E1	-3.26884E1	2.67902E1	1.72402E-8	2.51116E-3	2.51116E-3	6.31288E-3	2.31882E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-8.16607E-1	-7.98059E-1	-9.13112E0	-9.14178E0	5.60284E-3	9.31978E-2	2.73155E1	-3.26735E1	-3.26272E1	2.68001E1	1.73077E-8	2.51116E-3	2.51116E-3	6.31837E-3	2.32285E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16607E-1	-7.98345E-1	-9.13124E0	-9.1419E0	5.67436E-3	9.29594E-2	2.73135E1	-3.26536E1	-3.26789E1	2.68034E1	1.72364E-8	2.51954E-3	2.51954E-3	6.29665E-3	2.33109E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16417E-1	-7.98559E-1	-9.13115E0	-9.1423E0	5.4121E-3	9.29594E-2	2.73182E1	-3.27063E1	-3.26294E1	2.68076E1	1.72805E-8	2.51954E-3	2.51954E-3	6.33436E-3	2.33109E-2