[Scan]
initial_time=2016-02-17T17:54:36
final_time=2016-02-17T17:54:56
ip_count=19
run=1032
dataset=5
scan=118
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=1.36524E-8
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=1.99865E-9
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=4.17399E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=2.94125E-10
mult1=-9.94508E-9
mult2=-2.89626E-9
rf_tmon=-5.49778E-3
rf_agc=3.24864E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=1.64299E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66385E0
bslens_imon=2.60343E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20161E1
lens5a_imon=1.96457E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05157E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=3.0036E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05012E1
cs_ea1_imon=2.43849E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38495E0
lens1_imon=2.77686E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.9845E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03832E1
cs_ea2_imon=1.5455E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=2.98847E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.52433E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11015E1
os_restr1_imon=4.30067E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15359E1
os_ea1_imon=2.29409E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.07316E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24561E0
cs_ionrep_imon=1.22696E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.93317E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=3.10199E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=3.49436E-8
tplens_vset=1.4E-1
tplens_vmon=1.57418E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26152E1
iondef3_imon=1.52002E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26915E1
iondef2_imon=1.54621E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98608E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.02859E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2462E0
ionrepsh_imon=1.91502E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33599E1
lens5b_imon=2.19038E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.60722E0
os_ea2_imon=-7.80247E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71432E1
cs_ef2a_imon=3.18993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09781E0
os_ef2alow_imon=-2.77808E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.19048E-1
os_ef2bup_imon=-5.37293E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10739E1
os_restr2_imon=3.47392E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.31202E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.25542E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73315E1
iondef1_imon=1.11015E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68058E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.02583E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=8.89907E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-1.96719E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56177E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=1.83706E-1
window_imon=-1.08061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39124E-4
mask2_vset=0.0E0
mask2_vmon=-1.86272E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.65063E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.78347E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.13033E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34355E0
defgridb_imon=6.07559E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33309E1
os_fil1_imon=9.48132E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06512E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64472E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30866E1
cs_fil1_imon=9.98462E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62282E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67113E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98999E-2
os_fil2_imon=-2.66597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.86349E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.21547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13021E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22462E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.33507E-2
chamber_ion_pmon=1.72584E-8
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.94731E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.16274E-1	-7.98345E-1	-9.13122E0	-9.14214E0	5.43594E-3	9.33409E-2	2.73291E1	-3.26482E1	-3.26404E1	2.68004E1	1.72402E-8	2.5199E-3	2.5199E-3	6.34037E-3	2.32689E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.16345E-1	-7.98154E-1	-9.13129E0	-9.14228E0	5.84126E-3	9.34601E-2	2.72901E1	-3.26735E1	-3.2629E1	2.67872E1	1.72879E-8	2.51739E-3	2.51739E-3	6.3074E-3	2.32711E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.16345E-1	-7.98655E-1	-9.13136E0	-9.14226E0	5.57899E-3	9.37462E-2	2.72994E1	-3.27063E1	-3.26061E1	2.68255E1	1.72594E-8	2.51804E-3	2.51804E-3	6.29067E-3	2.32255E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16321E-1	-7.98464E-1	-9.13112E0	-9.14214E0	5.57899E-3	9.32932E-2	2.72708E1	-3.26383E1	-3.26682E1	2.67951E1	1.72257E-8	2.51752E-3	2.51752E-3	6.28703E-3	2.33716E-2
5.0E0	0.0E0	1.0E0	8.24E2	5.17E2	-2.09503E0	-8.16345E-1	-7.98416E-1	-9.13105E0	-9.14204E0	5.14984E-3	9.34601E-2	2.73045E1	-3.26579E1	-3.26284E1	2.6789E1	1.72747E-8	2.5147E-3	2.5147E-3	6.34661E-3	2.32461E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.16512E-1	-7.98607E-1	-9.13126E0	-9.14199E0	5.45979E-3	9.32932E-2	2.72644E1	-3.26767E1	-3.2577E1	2.6807E1	1.72327E-8	2.52209E-3	2.52209E-3	6.29645E-3	2.33094E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.16369E-1	-7.98392E-1	-9.13107E0	-9.14187E0	5.57899E-3	9.31025E-2	2.73504E1	-3.26719E1	-3.26156E1	2.6804E1	1.70096E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.33094E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.16679E-1	-7.98011E-1	-9.13117E0	-9.14187E0	5.48363E-3	9.31025E-2	2.72793E1	-3.26326E1	-3.26002E1	2.68058E1	1.69912E-8	2.51716E-3	2.51716E-3	6.31563E-3	2.32285E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16679E-1	-7.98464E-1	-9.13107E0	-9.14216E0	5.34058E-3	9.29356E-2	2.73213E1	-3.26807E1	-3.26416E1	2.68112E1					
1.3E1	0.0E0	2.0E0	5.25E2	3.53E2	-2.09572E0	-8.1687E-1	-7.98416E-1	-9.13093E0	-9.14214E0	5.126E-3	9.30786E-2	2.73285E1	-3.26524E1	-3.26272E1	2.67878E1	1.72402E-8	2.51225E-3	2.51225E-3	6.32386E-3	2.32689E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16774E-1	-7.98416E-1	-9.13098E0	-9.14233E0	5.48363E-3	9.31263E-2	2.7347E1	-3.27021E1	-3.26413E1	2.67887E1	1.72777E-8	2.5199E-3	2.5199E-3	6.30192E-3	2.32285E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09371E0	-8.1656E-1	-7.98368E-1	-9.13103E0	-9.14195E0	5.45979E-3	9.32455E-2	2.73261E1	-3.27125E1	-3.25888E1	2.6829E1	1.73227E-8	2.51443E-3	2.51443E-3	6.32386E-3	2.32892E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16512E-1	-7.98535E-1	-9.13093E0	-9.14195E0	5.38826E-3	9.32932E-2	2.72955E1	-3.26861E1	-3.265E1	2.67758E1	1.72852E-8	2.51334E-3	2.51334E-3	6.32936E-3	2.32892E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.16345E-1	-7.98392E-1	-9.13112E0	-9.14183E0	5.36442E-3	9.3174E-2	2.73263E1	-3.27104E1	-3.26608E1	2.68046E1	1.72217E-8	2.51525E-3	2.51525E-3	6.31278E-3	2.33109E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.16441E-1	-7.98631E-1	-9.13091E0	-9.14228E0	5.36442E-3	9.33647E-2	2.73467E1	-3.27099E1	-3.26395E1	2.68118E1	1.73002E-8	2.51225E-3	2.51225E-3	6.32386E-3	2.32689E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16393E-1	-7.98416E-1	-9.13107E0	-9.14197E0	5.34058E-3	9.32455E-2	2.72951E1	-3.26868E1	-3.26732E1	2.67998E1	1.72702E-8	2.51334E-3	2.51334E-3	6.31837E-3	2.32689E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16536E-1	-7.98297E-1	-9.13122E0	-9.14214E0	5.48363E-3	9.34124E-2	2.73165E1	-3.26741E1	-3.26308E1	2.68058E1	1.72702E-8	2.52209E-3	2.52209E-3	6.31288E-3	2.33094E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.16607E-1	-7.98726E-1	-9.13112E0	-9.14218E0	5.72205E-3	9.3174E-2	2.72967E1	-3.2638E1	-3.2647E1	2.67938E1	1.72702E-8	2.51225E-3	2.51225E-3	6.30192E-3	2.32487E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.17013E-1	-7.98464E-1	-9.13098E0	-9.14202E0	5.60284E-3	9.34362E-2	2.73417E1	-3.26933E1	-3.26219E1	2.67995E1	1.72511E-8	2.51417E-3	2.51417E-3	6.32896E-3	2.3291E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16631E-1	-7.98631E-1	-9.13112E0	-9.14204E0	5.55515E-3	9.34124E-2	2.73315E1	-3.26915E1	-3.26152E1	2.68058E1	1.72584E-8	2.51417E-3	2.51417E-3	6.31278E-3	2.33507E-2