[Scan]
initial_time=2016-02-17T17:55:03
final_time=2016-02-17T17:55:23
ip_count=19
run=1032
dataset=5
scan=119
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08817E-4
ql1_vset=
ql1_vmon=-8.16488E-1
ql1_imon=1.36748E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=1.90397E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=4.00829E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=3.00539E-10
mult1=-9.84875E-9
mult2=-2.74855E-9
rf_tmon=-4.28411E-3
rf_agc=3.37121E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=1.58492E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65736E0
bslens_imon=2.46893E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19765E1
lens5a_imon=1.9812E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.04994E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53796E1
cs_ef1b_imon=3.00577E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02255E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05088E1
cs_ea1_imon=2.44947E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3702E0
lens1_imon=2.7981E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.97549E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04068E1
cs_ea2_imon=1.54161E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84112E1
cs_ef1a_imon=2.99027E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.52516E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11226E1
os_restr1_imon=4.2895E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15205E1
os_ea1_imon=2.27674E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63888E1
os_ef1bup_imon=3.09623E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25092E0
cs_ionrep_imon=1.24571E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=3.0919E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.49378E-8
tplens_vset=1.4E-1
tplens_vmon=1.58185E0
tplens_imon=-3.05966E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26579E1
iondef3_imon=1.50515E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26957E1
iondef2_imon=1.59364E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98533E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.0244E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26272E0
ionrepsh_imon=1.93767E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33888E1
lens5b_imon=2.18861E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74393E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58598E0
os_ea2_imon=-4.79397E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06142E2
lens4b_imon=2.00548E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71342E1
cs_ef2a_imon=3.19461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06417E0
os_ef2alow_imon=-2.65554E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.26856E-1
os_ef2bup_imon=-5.29365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.4732E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.30848E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01677E1
cs_anode2_imon=2.26047E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73105E1
iondef1_imon=1.08609E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67571E1
iondef4_imon=1.08521E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.02452E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.8269E-1
olens1_imon=8.88321E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11032E0
cs_ionaccel_imon=-1.94556E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.69144E-6
window_vset=0.0E0
window_vmon=1.81904E-1
window_imon=-1.14909E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.8623E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.72141E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.3729E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.14803E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47643E0
defgridb_imon=6.08975E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33294E1
os_fil1_imon=9.48961E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0632E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64511E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30856E1
cs_fil1_imon=9.99711E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61849E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67283E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04064E-2
os_fil2_imon=-2.71402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81496E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72301E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.58188E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08816E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22594E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.32117E-2
chamber_ion_pmon=1.72364E-8
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.37688E-1
res40_imon=-2.68798E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16584E-1	-7.98297E-1	-9.13093E0	-9.14207E0	5.31673E-3	9.32932E-2	2.73105E1	-3.26549E1	-3.26182E1	2.68238E1	1.72552E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.33905E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.16607E-1	-7.98273E-1	-9.13053E0	-9.14207E0	5.60284E-3	9.34124E-2	2.73106E1	-3.26682E1	-3.26474E1	2.68106E1	1.731E-8	2.5131E-3	2.5131E-3	6.33977E-3	2.34505E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.16774E-1	-7.98607E-1	-9.13072E0	-9.14254E0	5.55515E-3	9.34124E-2	2.73063E1	-3.26596E1	-3.26092E1	2.6796E1	1.72441E-8	2.51693E-3	2.51693E-3	6.33538E-3	2.31844E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.16631E-1	-7.98273E-1	-9.13086E0	-9.14242E0	6.05583E-3	9.32932E-2	2.73169E1	-3.26508E1	-3.2675E1	2.68118E1	1.71873E-8	2.51724E-3	2.51724E-3	6.32342E-3	2.32526E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.16584E-1	-7.9844E-1	-9.13093E0	-9.14214E0	5.50747E-3	9.30309E-2	2.73303E1	-3.26446E1	-3.26482E1	2.68082E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.16774E-1	-7.98178E-1	-9.13084E0	-9.14259E0	5.65052E-3	9.32932E-2	2.72949E1	-3.265E1	-3.2605E1	2.6792E1	1.70023E-8	2.51443E-3	2.51443E-3	6.3074E-3	2.33499E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16774E-1	-7.9813E-1	-9.1311E0	-9.14245E0	5.38826E-3	9.34124E-2	2.7324E1	-3.26496E1	-3.26195E1	2.68047E1	1.70096E-8	2.52428E-3	2.52428E-3	6.29098E-3	2.32084E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16751E-1	-7.97939E-1	-9.13129E0	-9.14223E0	5.36442E-3	9.35793E-2	2.7278E1	-3.26897E1	-3.26366E1	2.67956E1	1.70463E-8	2.51847E-3	2.51847E-3	6.3074E-3	2.33507E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.16679E-1	-7.98321E-1	-9.13095E0	-9.14216E0	5.19753E-3	9.33886E-2	2.72967E1	-3.26609E1	-3.26188E1	2.6816E1	1.72584E-8	2.51954E-3	2.51954E-3	6.29665E-3	2.32711E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16441E-1	-7.98225E-1	-9.13124E0	-9.14176E0	5.126E-3	9.3627E-2	2.72919E1	-3.26831E1	-3.26194E1	2.68304E1	1.72702E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.32689E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16655E-1	-7.98154E-1	-9.13098E0	-9.14237E0	5.07832E-3	9.35793E-2	2.73051E1	-3.26699E1	-3.26476E1	2.67571E1	1.72702E-8	2.50898E-3	2.50898E-3	6.3074E-3	2.33297E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.16751E-1	-7.97725E-1	-9.13122E0	-9.14228E0	5.29289E-3	9.35316E-2	2.73216E1	-3.26714E1	-3.2636E1	2.67845E1	1.72702E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.33499E-2
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.16774E-1	-7.97939E-1	-9.13115E0	-9.1423E0	5.45979E-3	9.30309E-2	2.73435E1	-3.27023E1	-3.26092E1	2.6807E1	1.72658E-8	2.51525E-3	2.51525E-3	6.28592E-3	2.32315E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.16655E-1	-7.97892E-1	-9.13074E0	-9.14202E0	5.10216E-3	9.33886E-2	2.72997E1	-3.26801E1	-3.26494E1	2.67908E1	1.72552E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.32487E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.16488E-1	-7.98059E-1	-9.131E0	-9.14197E0	5.17368E-3	9.34362E-2	2.72865E1	-3.26813E1	-3.2614E1	2.67788E1	1.72103E-8	2.51662E-3	2.51662E-3	6.29645E-3	2.33297E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.1625E-1	-7.98035E-1	-9.13131E0	-9.14204E0	5.126E-3	9.35316E-2	2.73075E1	-3.26464E1	-3.26669E1	2.67613E1	1.72028E-8	2.51771E-3	2.51771E-3	6.3074E-3	2.33702E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16274E-1	-7.98416E-1	-9.13112E0	-9.14149E0	5.34058E-3	9.34601E-2	2.7349E1	-3.26831E1	-3.26236E1	2.67523E1	1.72852E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.32084E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16274E-1	-7.98535E-1	-9.13141E0	-9.14185E0	5.45979E-3	9.34362E-2	2.73057E1	-3.26968E1	-3.26142E1	2.68268E1	1.72627E-8	2.51662E-3	2.51662E-3	6.32936E-3	2.32084E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.16369E-1	-7.98512E-1	-9.13134E0	-9.14226E0	5.24521E-3	9.34362E-2	2.73092E1	-3.26655E1	-3.2662E1	2.68574E1	1.72879E-8	2.52384E-3	2.52384E-3	6.30202E-3	2.33109E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.16488E-1	-7.98321E-1	-9.13148E0	-9.14199E0	5.29289E-3	9.33886E-2	2.73105E1	-3.26957E1	-3.26579E1	2.67571E1	1.72364E-8	2.51525E-3	2.51525E-3	6.31278E-3	2.32117E-2