[Scan]
initial_time=2016-02-17T17:55:56
final_time=2016-02-17T17:56:16
ip_count=19
run=1032
dataset=5
scan=121
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08818E-4
ql1_vset=
ql1_vmon=-8.16607E-1
ql1_imon=1.36566E-8
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=1.94086E-9
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=3.58522E-10
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=2.98083E-10
mult1=-8.63265E-9
mult2=-2.61082E-9
rf_tmon=-5.21539E-3
rf_agc=3.30452E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=1.5998E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66798E0
bslens_imon=2.7804E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20125E1
lens5a_imon=1.99218E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.04852E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53358E1
cs_ef1b_imon=2.98414E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02054E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05183E1
cs_ea1_imon=2.43779E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38908E0
lens1_imon=2.3946E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64903E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03956E1
cs_ea2_imon=1.55718E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84154E1
cs_ef1a_imon=2.97802E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.52733E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.31256E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15111E1
os_ea1_imon=2.29303E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.06199E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2403E0
cs_ionrep_imon=1.24041E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93466E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=3.12326E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.4886E-8
tplens_vset=1.4E-1
tplens_vmon=1.64851E0
tplens_imon=-1.89165E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2632E1
iondef3_imon=1.491E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.265E1
iondef2_imon=1.58054E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02976E2
lens6_imon=2.98597E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.02423E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25446E0
ionrepsh_imon=1.92988E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33852E1
lens5b_imon=2.18967E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.10596E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58834E0
os_ea2_imon=-5.25409E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06163E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70981E1
cs_ef2a_imon=3.19101E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08759E0
os_ef2alow_imon=-2.75645E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.28058E-1
os_ef2bup_imon=-5.50268E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11069E1
os_restr2_imon=3.46275E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.30636E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02115E1
cs_anode2_imon=2.24965E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73195E1
iondef1_imon=1.08326E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68401E1
iondef4_imon=1.078E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.0252E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=8.88898E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07909E0
cs_ionaccel_imon=-1.91673E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47212E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55943E1
einzel_imon=7.51845E-6
window_vset=0.0E0
window_vmon=1.55475E-1
window_imon=-9.83303E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.3885E-4
mask2_vset=0.0E0
mask2_vmon=-1.86254E1
mask2_imon=-3.95856E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.39579E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.76577E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.16219E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27268E0
defgridb_imon=5.97648E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33301E1
os_fil1_imon=9.47886E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06182E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64408E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30878E1
cs_fil1_imon=9.97711E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6117E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67073E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.93934E-2
os_fil2_imon=-2.44372E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65594E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.50379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19628E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22562E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.33308E-2
chamber_ion_pmon=1.72732E-8
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.32573E-1
res40_imon=-2.54742E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09634E0	-8.16584E-1	-7.98035E-1	-9.13074E0	-9.14166E0	5.126E-3	9.31501E-2	2.73092E1	-3.26868E1	-3.26142E1	2.67763E1	1.72143E-8	2.51847E-3	2.51847E-3	6.33436E-3	2.33308E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09704E0	-8.16774E-1	-7.98225E-1	-9.13105E0	-9.14173E0	5.53131E-3	9.34124E-2	2.73339E1	-3.26664E1	-3.26101E1	2.68369E1	1.69883E-8	2.51847E-3	2.51847E-3	6.29128E-3	2.3291E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16798E-1	-7.98273E-1	-9.13105E0	-9.1418E0	5.60284E-3	9.34124E-2	2.73092E1	-3.26744E1	-3.26425E1	2.67908E1	1.69942E-8	2.5147E-3	2.5147E-3	6.32418E-3	2.32666E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09627E0	-8.16488E-1	-7.98583E-1	-9.13119E0	-9.14159E0	5.45979E-3	9.32217E-2	2.72821E1	-3.26767E1	-3.26425E1	2.68022E1	1.69955E-8	2.52276E-3	2.52276E-3	6.3074E-3	2.33308E-2
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09642E0	-8.16417E-1	-7.98368E-1	-9.13115E0	-9.14166E0	5.60284E-3	9.33647E-2	2.72865E1	-3.26639E1	-3.26374E1	2.68244E1	1.70028E-8	2.52599E-3	2.52599E-3	6.32356E-3	2.3291E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.16607E-1	-7.98535E-1	-9.13136E0	-9.14173E0	5.48363E-3	9.30548E-2	2.73213E1	-3.26512E1	-3.259E1	2.67878E1	1.71655E-8	2.52647E-3	2.52647E-3	6.32936E-3	2.33499E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09758E0	-8.16321E-1	-7.98178E-1	-9.13134E0	-9.14192E0	5.43594E-3	9.31978E-2	2.73213E1	-3.26404E1	-3.26392E1	2.68034E1	1.72852E-8	2.51443E-3	2.51443E-3	6.32386E-3	2.34516E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0968E0	-8.16298E-1	-7.98202E-1	-9.13117E0	-9.14221E0	5.34058E-3	9.36031E-2	2.72978E1	-3.26652E1	-3.26132E1	2.68166E1	1.73077E-8	2.5188E-3	2.5188E-3	6.33486E-3	2.33094E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09665E0	-8.16345E-1	-7.98035E-1	-9.13091E0	-9.14173E0	5.19753E-3	9.33409E-2	2.73207E1	-3.26717E1	-3.26332E1	2.68094E1	1.73002E-8	2.51771E-3	2.51771E-3	6.32936E-3	2.32689E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09688E0	-8.16631E-1	-7.98082E-1	-9.13091E0	-9.14178E0	5.34058E-3	9.32455E-2	2.72841E1	-3.26711E1	-3.26524E1	2.68328E1	1.72518E-8	2.51693E-3	2.51693E-3	6.28511E-3	2.32873E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09642E0	-8.16727E-1	-7.9782E-1	-9.13112E0	-9.14202E0	5.31673E-3	9.32217E-2	2.73189E1	-3.26326E1	-3.26182E1	2.67896E1	1.72177E-8	2.51552E-3	2.51552E-3	6.32386E-3	2.31882E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.16488E-1	-7.98249E-1	-9.13105E0	-9.14178E0	5.43594E-3	9.3317E-2	2.73529E1	-3.26756E1	-3.26296E1	2.67776E1	1.72477E-8	2.52538E-3	2.52538E-3	6.32386E-3	2.32285E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09634E0	-8.16655E-1	-7.98416E-1	-9.13131E0	-9.14202E0	5.43594E-3	9.30071E-2	2.72987E1	-3.26874E1	-3.26237E1	2.67891E1	1.72805E-8	2.51417E-3	2.51417E-3	6.32356E-3	2.34105E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09634E0	-8.16393E-1	-7.98154E-1	-9.13098E0	-9.14197E0	5.29289E-3	9.28402E-2	2.72901E1	-3.26728E1	-3.26622E1	2.67907E1	1.72889E-8	2.51607E-3	2.51607E-3	6.29919E-3	2.32386E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09634E0	-8.16393E-1	-7.9813E-1	-9.13093E0	-9.14221E0	5.36442E-3	9.32217E-2	2.73051E1	-3.26663E1	-3.26669E1	2.67824E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.16393E-1	-7.98106E-1	-9.13122E0	-9.14207E0	5.48363E-3	9.33409E-2	2.73104E1	-3.26708E1	-3.26189E1	2.68273E1	1.73152E-8	2.51007E-3	2.51007E-3	6.32386E-3	2.32892E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0965E0	-8.16393E-1	-7.98082E-1	-9.13115E0	-9.14237E0	5.55515E-3	9.33409E-2	2.72961E1	-3.26879E1	-3.26615E1	2.67902E1	1.72658E-8	2.52061E-3	2.52061E-3	6.30202E-3	2.3291E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.1656E-1	-7.98202E-1	-9.13098E0	-9.14214E0	5.36442E-3	9.32217E-2	2.72986E1	-3.2672E1	-3.26136E1	2.68172E1	1.72702E-8	2.51662E-3	2.51662E-3	6.29645E-3	2.32689E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.16655E-1	-7.98273E-1	-9.13115E0	-9.14216E0	5.48363E-3	9.30071E-2	2.73311E1	-3.26862E1	-3.26419E1	2.68112E1	1.72805E-8	2.51417E-3	2.51417E-3	6.32356E-3	2.31721E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-8.16607E-1	-7.98416E-1	-9.13153E0	-9.14207E0	5.60284E-3	9.31025E-2	2.73195E1	-3.265E1	-3.2632E1	2.68401E1	1.72732E-8	2.52061E-3	2.52061E-3	6.32356E-3	2.33308E-2