[Scan]
initial_time=2016-02-17T17:56:23
final_time=2016-02-17T17:56:43
ip_count=19
run=1032
dataset=5
scan=122
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09627E0
qbias_imon=-1.08844E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=1.36571E-8
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=1.91991E-9
ql3_vset=
ql3_vmon=-9.13119E0
ql3_imon=3.78227E-10
ql4_vset=
ql4_vmon=-9.14166E0
ql4_imon=2.79653E-10
mult1=-1.01739E-8
mult2=-2.68468E-9
rf_tmon=-4.8549E-3
rf_agc=3.45352E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=1.60018E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65796E0
bslens_imon=2.60343E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20131E1
lens5a_imon=1.98793E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53673E1
cs_ef1b_imon=3.01832E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04577E2
lens23_imon=1.01951E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0474E1
cs_ea1_imon=2.45442E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37846E0
lens1_imon=2.56095E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64655E1
os_ef1alow_imon=2.97036E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.5586E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84174E1
cs_ef1a_imon=2.99051E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.5278E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1117E1
os_restr1_imon=4.29721E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15441E1
os_ea1_imon=2.27497E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63398E1
os_ef1bup_imon=3.08435E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.31286E0
cs_ionrep_imon=1.25562E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93268E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01885E1
cs_anode1_imon=3.09199E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=3.49096E-8
tplens_vset=1.4E-1
tplens_vmon=1.59247E0
tplens_imon=-1.67929E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26458E1
iondef3_imon=1.49843E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27017E1
iondef2_imon=1.57736E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02964E2
lens6_imon=2.98558E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=4.0218E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30696E0
ionrepsh_imon=1.94015E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34006E1
lens5b_imon=2.19109E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74461E1
cs_ef2b_imon=3.11423E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.59129E0
os_ea2_imon=-8.01483E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.0046E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.708E1
cs_ef2a_imon=3.17192E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.67884E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.30825E-1
os_ef2bup_imon=-5.39996E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10701E1
os_restr2_imon=3.47218E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.29787E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01601E1
cs_anode2_imon=2.26036E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73165E1
iondef1_imon=1.08609E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6795E1
iondef4_imon=1.0819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.02644E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=8.90148E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13304E0
cs_ionaccel_imon=-1.95599E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47244E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56434E1
einzel_imon=7.75734E-6
window_vset=0.0E0
window_vmon=1.97414E-1
window_imon=-1.23661E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39265E-4
mask2_vset=0.0E0
mask2_vmon=-1.86402E1
mask2_imon=-8.36956E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.56922E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.73392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.07016E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=6.12868E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33292E1
os_fil1_imon=9.48803E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06901E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64519E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30873E1
cs_fil1_imon=1.00057E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62239E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67165E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98999E-2
os_fil2_imon=-2.72131E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91815E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61671E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34521E-1
cs_fil2_imon=-2.41433E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.77107E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2255E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.33507E-2
chamber_ion_pmon=1.7207E-8
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.33924E-1
res40_imon=-2.67536E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09657E0	-8.16298E-1	-7.98011E-1	-9.13129E0	-9.14209E0	5.45979E-3	9.31025E-2	2.73189E1	-3.26687E1	-3.26326E1	2.67571E1	1.70173E-8	2.52384E-3	2.52384E-3	6.32896E-3	2.33308E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09611E0	-8.1625E-1	-7.97915E-1	-9.13141E0	-9.14176E0	5.60284E-3	9.32217E-2	2.73418E1	-3.26915E1	-3.26321E1	2.68225E1	1.70096E-8	2.51771E-3	2.51771E-3	6.29645E-3	2.32689E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16226E-1	-7.98249E-1	-9.1315E0	-9.14192E0	5.50747E-3	9.2864E-2	2.73126E1	-3.26625E1	-3.26376E1	2.68262E1	1.70168E-8	2.51693E-3	2.51693E-3	6.31299E-3	2.32461E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.1625E-1	-7.98273E-1	-9.13131E0	-9.14176E0	5.45979E-3	9.30786E-2	2.73183E1	-3.26428E1	-3.2629E1	2.68256E1	1.71463E-8	2.52236E-3	2.52236E-3	6.33388E-3	2.32343E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.16417E-1	-7.98082E-1	-9.13167E0	-9.14152E0	5.53131E-3	9.30786E-2	2.72957E1	-3.26703E1	-3.26413E1	2.68065E1	1.72552E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.32892E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16369E-1	-7.98249E-1	-9.13153E0	-9.14183E0	5.67436E-3	9.29832E-2	2.73225E1	-3.26921E1	-3.262E1	2.67854E1	1.71975E-8	2.52297E-3	2.52297E-3	6.32099E-3	2.32901E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.16512E-1	-7.97844E-1	-9.13131E0	-9.14183E0	5.60284E-3	9.34601E-2	2.72955E1	-3.26657E1	-3.25972E1	2.6807E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.16727E-1	-7.98011E-1	-9.1315E0	-9.14199E0	5.36442E-3	9.33409E-2	2.72973E1	-3.26699E1	-3.2623E1	2.6819E1	1.72852E-8	2.51443E-3	2.51443E-3	6.34588E-3	2.32689E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16727E-1	-7.9844E-1	-9.13146E0	-9.14154E0	5.4121E-3	9.30786E-2	2.73039E1	-3.26386E1	-3.26573E1	2.68316E1	1.72327E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.32689E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16655E-1	-7.98512E-1	-9.13138E0	-9.14168E0	5.31673E-3	9.30548E-2	2.73063E1	-3.26627E1	-3.26236E1	2.67962E1	1.72777E-8	2.51552E-3	2.51552E-3	6.33486E-3	2.32285E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.1656E-1	-7.98225E-1	-9.13148E0	-9.14187E0	5.24521E-3	9.29832E-2	2.72931E1	-3.26536E1	-3.26488E1	2.68418E1	1.72252E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.33702E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.16298E-1	-7.98392E-1	-9.13136E0	-9.14176E0	5.79357E-3	9.30548E-2	2.73163E1	-3.26744E1	-3.26408E1	2.68232E1	1.70466E-8	2.5199E-3	2.5199E-3	6.3074E-3	2.33499E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09634E0	-8.16607E-1	-7.98368E-1	-9.1311E0	-9.14176E0	5.48363E-3	9.32217E-2	2.73093E1	-3.265E1	-3.26164E1	2.68028E1	1.72511E-8	2.51417E-3	2.51417E-3	6.3074E-3	2.33507E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09696E0	-8.16774E-1	-7.98583E-1	-9.13119E0	-9.14156E0	5.38826E-3	9.28164E-2	2.73474E1	-3.26411E1	-3.26498E1	2.67995E1	1.73002E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.32487E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.16798E-1	-7.98678E-1	-9.1311E0	-9.14171E0	5.50747E-3	9.30548E-2	2.73105E1	-3.26603E1	-3.26368E1	2.68208E1	1.72688E-8	2.51603E-3	2.51603E-3	6.31798E-3	2.32733E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09696E0	-8.16488E-1	-7.98559E-1	-9.13143E0	-9.14183E0	5.38826E-3	9.29832E-2	2.73139E1	-3.26614E1	-3.26319E1	2.67978E1	1.72552E-8	2.51334E-3	2.51334E-3	6.30192E-3	2.32689E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09711E0	-8.16607E-1	-7.98512E-1	-9.13134E0	-9.14164E0	5.36442E-3	9.27687E-2	2.73075E1	-3.26878E1	-3.26315E1	2.67695E1	1.72658E-8	2.52061E-3	2.52061E-3	6.30202E-3	2.33109E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09627E0	-8.16607E-1	-7.98821E-1	-9.13124E0	-9.14176E0	5.24521E-3	9.28879E-2	2.72951E1	-3.26779E1	-3.26048E1	2.67931E1	1.72702E-8	2.50789E-3	2.50789E-3	6.32386E-3	2.32892E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09665E0	-8.16703E-1	-7.98607E-1	-9.13155E0	-9.14199E0	5.43594E-3	9.26018E-2	2.72974E1	-3.26974E1	-3.26236E1	2.67523E1	1.72177E-8	2.51334E-3	2.51334E-3	6.3074E-3	2.32689E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09627E0	-8.16631E-1	-7.98178E-1	-9.13119E0	-9.14166E0	5.74589E-3	9.30309E-2	2.73165E1	-3.27017E1	-3.26458E1	2.6795E1	1.7207E-8	2.51417E-3	2.51417E-3	6.29128E-3	2.33507E-2