[Scan]
initial_time=2016-02-17T17:56:50
final_time=2016-02-17T17:57:09
ip_count=19
run=1032
dataset=5
scan=123
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09371E0
qbias_imon=-1.08824E-4
ql1_vset=
ql1_vmon=-8.16584E-1
ql1_imon=1.3646E-8
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=1.98408E-9
ql3_vset=
ql3_vmon=-9.13119E0
ql3_imon=3.50845E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=3.08692E-10
mult1=-9.76447E-9
mult2=-2.73258E-9
rf_tmon=-5.66601E-3
rf_agc=3.31834E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=1.60263E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64769E0
bslens_imon=2.74874E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19743E1
lens5a_imon=1.99125E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.04854E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53668E1
cs_ef1b_imon=2.99637E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02235E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05227E1
cs_ea1_imon=2.4445E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39888E0
lens1_imon=2.57611E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64727E1
os_ef1alow_imon=2.9784E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03874E1
cs_ea2_imon=1.54315E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84531E1
cs_ef1a_imon=2.97765E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.52772E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11329E1
os_restr1_imon=4.30665E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15251E1
os_ea1_imon=2.28436E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63816E1
os_ef1bup_imon=3.0701E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27536E0
cs_ionrep_imon=1.22875E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=3.09105E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=3.49157E-8
tplens_vset=1.4E-1
tplens_vmon=1.59368E0
tplens_imon=-3.843E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.48879E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26446E1
iondef2_imon=1.57474E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98379E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.03342E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27903E0
ionrepsh_imon=1.91779E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33811E1
lens5b_imon=2.2109E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74913E1
cs_ef2b_imon=3.12698E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58083E0
os_ea2_imon=-7.11195E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0613E2
lens4b_imon=2.0067E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70846E1
cs_ef2a_imon=3.17302E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08949E0
os_ef2alow_imon=-2.64542E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.24454E-1
os_ef2bup_imon=-5.44487E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=3.46232E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.31691E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01921E1
cs_anode2_imon=2.26881E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73135E1
iondef1_imon=1.10754E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68364E1
iondef4_imon=1.09252E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.02279E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=8.90118E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10457E0
cs_ionaccel_imon=-1.98673E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47346E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56187E1
einzel_imon=7.47077E-6
window_vset=0.0E0
window_vmon=1.87032E-1
window_imon=-8.67698E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.38889E-4
mask2_vset=0.0E0
mask2_vmon=-1.8607E1
mask2_imon=-6.99282E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92609E3
multa_neg_imon=7.56768E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.56496E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.28119E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41887E0
defgridb_imon=6.09482E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33303E1
os_fil1_imon=9.47735E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07011E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64483E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30821E1
cs_fil1_imon=9.97979E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62228E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67036E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.08174E-2
os_fil2_imon=-2.5627E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99077E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69677E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35971E-1
cs_fil2_imon=-2.3132E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55414E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22539E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.32117E-2
chamber_ion_pmon=1.72732E-8
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40041E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.75404E-1
res40_imon=-2.64917E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.16441E-1	-7.98416E-1	-9.1311E0	-9.14216E0	5.19753E-3	9.32932E-2	2.73352E1	-3.26549E1	-3.26478E1	2.67937E1	1.70096E-8	2.51552E-3	2.51552E-3	6.32386E-3	2.32689E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16369E-1	-7.98178E-1	-9.13155E0	-9.14202E0	5.48363E-3	9.3174E-2	2.72823E1	-3.26939E1	-3.26248E1	2.68016E1	1.71997E-8	2.52276E-3	2.52276E-3	6.32356E-3	2.33109E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.16393E-1	-7.97987E-1	-9.13134E0	-9.14171E0	5.57899E-3	9.2864E-2	2.73281E1	-3.26744E1	-3.26307E1	2.67884E1	1.729E-8	2.51804E-3	2.51804E-3	6.31299E-3	2.32461E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16202E-1	-7.97796E-1	-9.13115E0	-9.14211E0	5.74589E-3	9.32217E-2	2.73135E1	-3.26855E1	-3.26218E1	2.68082E1	1.72511E-8	2.52384E-3	2.52384E-3	6.32356E-3	2.32711E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.16393E-1	-7.97677E-1	-9.13122E0	-9.14257E0	5.48363E-3	9.34124E-2	2.72965E1	-3.26646E1	-3.26285E1	2.67932E1	1.72552E-8	2.51552E-3	2.51552E-3	6.32936E-3	2.32892E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.16512E-1	-7.98082E-1	-9.13131E0	-9.14214E0	5.53131E-3	9.3317E-2	2.73207E1	-3.26353E1	-3.26718E1	2.68279E1	1.72365E-8	2.52473E-3	2.52473E-3	6.32418E-3	2.33079E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09627E0	-8.16345E-1	-7.98011E-1	-9.13124E0	-9.14211E0	5.36442E-3	9.35078E-2	2.72907E1	-3.26572E1	-3.26254E1	2.68101E1	1.72931E-8	2.5199E-3	2.5199E-3	6.29703E-3	2.3237E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.16488E-1	-7.97939E-1	-9.13098E0	-9.14218E0	5.36442E-3	9.34124E-2	2.72823E1	-3.26735E1	-3.26056E1	2.68256E1	1.72208E-8	2.51758E-3	2.51758E-3	6.33065E-3	2.32618E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.1656E-1	-7.98035E-1	-9.13112E0	-9.14187E0	5.53131E-3	9.33409E-2	2.72895E1	-3.26705E1	-3.26561E1	2.68124E1	1.73227E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.33094E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.16441E-1	-7.97963E-1	-9.13117E0	-9.14195E0	5.53131E-3	9.32932E-2	2.73105E1	-3.26476E1	-3.26302E1	2.68214E1	1.72177E-8	2.51007E-3	2.51007E-3	6.30192E-3	2.34109E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16226E-1	-7.97868E-1	-9.13136E0	-9.14209E0	5.43594E-3	9.30071E-2	2.73157E1	-3.27045E1	-3.26467E1	2.68274E1	1.72103E-8	2.52318E-3	2.52318E-3	6.29645E-3	2.33499E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.16464E-1	-7.98225E-1	-9.13141E0	-9.14185E0	5.43594E-3	9.33647E-2	2.72937E1	-3.26687E1	-3.26374E1	2.68076E1	1.72584E-8	2.52384E-3	2.52384E-3	6.32896E-3	2.32711E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.16083E-1	-7.98559E-1	-9.13119E0	-9.14204E0	5.38826E-3	9.30071E-2	2.73222E1	-3.26484E1	-3.26148E1	2.68279E1	1.72327E-8	2.51225E-3	2.51225E-3	6.31837E-3	2.33094E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09364E0	-8.16226E-1	-7.98202E-1	-9.13126E0	-9.14176E0	5.29289E-3	9.32455E-2	2.73118E1	-3.26854E1	-3.26199E1	2.67889E1	1.72805E-8	2.52384E-3	2.52384E-3	6.2752E-3	2.33308E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.16417E-1	-7.98368E-1	-9.13103E0	-9.14187E0	5.55515E-3	9.32932E-2	2.7321E1	-3.26596E1	-3.26378E1	2.68157E1	1.72252E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.33702E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.1656E-1	-7.98249E-1	-9.13115E0	-9.14226E0	5.8651E-3	9.3317E-2	2.7288E1	-3.26213E1	-3.26372E1	2.68382E1	1.72777E-8	2.52538E-3	2.52538E-3	6.31837E-3	2.32487E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16488E-1	-7.98273E-1	-9.13124E0	-9.14204E0	5.65052E-3	9.32455E-2	2.73094E1	-3.26866E1	-3.2626E1	2.67962E1	1.7229E-8	2.51954E-3	2.51954E-3	6.31817E-3	2.32711E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.16607E-1	-7.97987E-1	-9.13093E0	-9.1419E0	5.36442E-3	9.31263E-2	2.7344E1	-3.26779E1	-3.26142E1	2.68259E1	1.72927E-8	2.51662E-3	2.51662E-3	6.32936E-3	2.32689E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-8.16607E-1	-7.98011E-1	-9.13124E0	-9.1419E0	5.19753E-3	9.30786E-2	2.72856E1	-3.26608E1	-3.2659E1	2.67811E1	1.731E-8	2.51417E-3	2.51417E-3	6.31817E-3	2.3291E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09371E0	-8.16584E-1	-7.98106E-1	-9.13119E0	-9.14187E0	5.60284E-3	9.32217E-2	2.73135E1	-3.26446E1	-3.26224E1	2.68364E1	1.72732E-8	2.51739E-3	2.51739E-3	6.33436E-3	2.32117E-2