[Scan]
initial_time=2016-02-17T17:57:16
final_time=2016-02-17T17:57:36
ip_count=19
run=1032
dataset=5
scan=124
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08747E-4
ql1_vset=
ql1_vmon=-8.16321E-1
ql1_imon=1.36036E-8
ql2_vset=
ql2_vmon=-7.9813E-1
ql2_imon=1.89525E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=3.72899E-10
ql4_vset=
ql4_vmon=-9.14209E0
ql4_imon=2.77865E-10
mult1=-9.6561E-9
mult2=-2.76253E-9
rf_tmon=-3.70131E-3
rf_agc=3.39464E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=1.62334E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66326E0
bslens_imon=2.45831E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19942E1
lens5a_imon=1.9851E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05061E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53666E1
cs_ef1b_imon=3.00826E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04587E2
lens23_imon=1.02181E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05224E1
cs_ea1_imon=2.42788E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40441E0
lens1_imon=2.73085E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64529E1
os_ef1alow_imon=2.9612E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0405E1
cs_ea2_imon=1.55789E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84403E1
cs_ef1a_imon=2.99729E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.52627E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11359E1
os_restr1_imon=4.29378E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14834E1
os_ea1_imon=2.29833E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6299E1
os_ef1bup_imon=3.07372E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25918E0
cs_ionrep_imon=1.22165E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93501E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01868E1
cs_anode1_imon=3.1038E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.48958E-8
tplens_vset=1.4E-1
tplens_vmon=1.6261E0
tplens_imon=-2.42257E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26164E1
iondef3_imon=1.51188E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26681E1
iondef2_imon=1.57523E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02975E2
lens6_imon=2.98459E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.04896E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25505E0
ionrepsh_imon=1.93201E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33858E1
lens5b_imon=2.17906E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74436E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5618E0
os_ea2_imon=-7.51931E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00655E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71405E1
cs_ef2a_imon=3.17598E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07372E0
os_ef2alow_imon=-2.56656E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.17082E-1
os_ef2bup_imon=-5.323E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.46755E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.31025E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0175E1
cs_anode2_imon=2.25776E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73267E1
iondef1_imon=1.09033E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.0876E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.0261E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=8.89976E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11658E0
cs_ionaccel_imon=-1.7881E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02054E2
cs_ionfocb_imon=1.47063E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56429E1
einzel_imon=7.71615E-6
window_vset=0.0E0
window_vmon=1.84787E-1
window_imon=-1.13349E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39204E-4
mask2_vset=0.0E0
mask2_vmon=-1.86309E1
mask2_imon=-7.23031E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.63293E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.76931E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.31084E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41146E0
defgridb_imon=6.04373E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33305E1
os_fil1_imon=9.49255E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06946E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6474E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30938E1
cs_fil1_imon=1.00245E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62802E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67077E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.00265E-2
os_fil2_imon=-2.79145E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77314E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.53571E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33402E-1
cs_fil2_imon=-2.12505E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.82116E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22627E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.31882E-2
chamber_ion_pmon=1.72177E-8
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.41517E-1
res40_imon=-2.6621E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.16488E-1	-7.98392E-1	-9.13112E0	-9.14197E0	5.60284E-3	9.32693E-2	2.73075E1	-3.26974E1	-3.26089E1	2.67812E1	1.7185E-8	2.51954E-3	2.51954E-3	6.33436E-3	2.33308E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16846E-1	-7.98225E-1	-9.13103E0	-9.14204E0	5.4121E-3	9.33409E-2	2.73247E1	-3.26597E1	-3.26132E1	2.67986E1	1.72702E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.32689E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.16655E-1	-7.98154E-1	-9.13122E0	-9.14245E0	5.4121E-3	9.31025E-2	2.73323E1	-3.2695E1	-3.26405E1	2.68146E1	1.71756E-8	2.51804E-3	2.51804E-3	6.33538E-3	2.32666E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.16774E-1	-7.98392E-1	-9.13131E0	-9.14233E0	5.48363E-3	9.34124E-2	2.73009E1	-3.26903E1	-3.25882E1	2.67926E1	1.73268E-8	2.51603E-3	2.51603E-3	6.33919E-3	2.33123E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09696E0	-8.16655E-1	-7.97772E-1	-9.13136E0	-9.14211E0	5.24521E-3	9.35078E-2	2.73139E1	-3.2675E1	-3.26266E1	2.68106E1	1.72143E-8	2.52061E-3	2.52061E-3	6.33436E-3	2.33308E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09688E0	-8.16655E-1	-7.98082E-1	-9.13134E0	-9.14214E0	5.26905E-3	9.30309E-2	2.73273E1	-3.26681E1	-3.26164E1	2.68094E1	1.72477E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.32285E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.16488E-1	-7.97892E-1	-9.13115E0	-9.14218E0	5.38826E-3	9.33409E-2	2.72865E1	-3.26843E1	-3.26326E1	2.68172E1	1.72552E-8	2.5199E-3	2.5199E-3	6.30192E-3	2.32487E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.16417E-1	-7.97653E-1	-9.13129E0	-9.14204E0	5.67436E-3	9.31501E-2	2.73364E1	-3.26561E1	-3.26644E1	2.68024E1	1.72768E-8	2.51364E-3	2.51364E-3	6.30471E-3	2.32117E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16321E-1	-7.97892E-1	-9.13122E0	-9.1419E0	5.55515E-3	9.34601E-2	2.72839E1	-3.26337E1	-3.2649E1	2.68214E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.16512E-1	-7.98106E-1	-9.13112E0	-9.14202E0	5.38826E-3	9.35793E-2	2.72945E1	-3.26738E1	-3.26089E1	2.6807E1	1.72777E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.33297E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16274E-1	-7.98273E-1	-9.13119E0	-9.14226E0	5.17368E-3	9.33409E-2	2.73261E1	-3.26591E1	-3.26284E1	2.67764E1	1.72658E-8	2.51417E-3	2.51417E-3	6.32896E-3	2.33109E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.16321E-1	-7.98321E-1	-9.13119E0	-9.14195E0	5.57899E-3	9.30309E-2	2.72937E1	-3.26428E1	-3.26981E1	2.68124E1	1.72702E-8	2.51771E-3	2.51771E-3	6.29098E-3	2.32487E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.16178E-1	-7.97987E-1	-9.13141E0	-9.14202E0	5.53131E-3	9.35078E-2	2.73352E1	-3.27056E1	-3.25989E1	2.6783E1	1.72552E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.33297E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.1625E-1	-7.98154E-1	-9.13126E0	-9.14183E0	5.53131E-3	9.35078E-2	2.73219E1	-3.26458E1	-3.2623E1	2.6816E1	1.73026E-8	2.52061E-3	2.52061E-3	6.31278E-3	2.33109E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.16321E-1	-7.97915E-1	-9.13148E0	-9.14199E0	5.38826E-3	9.32693E-2	2.73243E1	-3.26585E1	-3.26278E1	2.67848E1	1.73002E-8	2.51552E-3	2.51552E-3	6.32386E-3	2.32689E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16536E-1	-7.97987E-1	-9.13124E0	-9.14204E0	5.38826E-3	9.30786E-2	2.72919E1	-3.26807E1	-3.26074E1	2.68052E1	1.72777E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.32892E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.16417E-1	-7.9813E-1	-9.13131E0	-9.14187E0	5.38826E-3	9.32217E-2	2.72865E1	-3.26242E1	-3.26392E1	2.68174E1	1.72584E-8	2.51096E-3	2.51096E-3	6.33977E-3	2.32513E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.16298E-1	-7.98345E-1	-9.13098E0	-9.14216E0	5.31673E-3	9.31263E-2	2.73022E1	-3.26724E1	-3.26098E1	2.67804E1	1.72213E-8	2.51581E-3	2.51581E-3	6.31299E-3	2.33079E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.16345E-1	-7.9844E-1	-9.13124E0	-9.14216E0	5.57899E-3	9.3174E-2	2.73207E1	-3.26651E1	-3.26464E1	2.67704E1	1.72688E-8	2.52131E-3	2.52131E-3	6.31269E-3	2.32538E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16321E-1	-7.9813E-1	-9.13124E0	-9.14209E0	5.26905E-3	9.33886E-2	2.73267E1	-3.26681E1	-3.26164E1	2.67974E1	1.72177E-8	2.51225E-3	2.51225E-3	6.32386E-3	2.31882E-2