[Scan]
initial_time=2016-02-17T17:57:43
final_time=2016-02-17T17:58:02
ip_count=19
run=1032
dataset=5
scan=125
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08818E-4
ql1_vset=
ql1_vmon=-8.16798E-1
ql1_imon=1.36408E-8
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=1.95346E-9
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=3.55947E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=2.81763E-10
mult1=-9.60794E-9
mult2=-2.63478E-9
rf_tmon=-4.00172E-3
rf_agc=3.42829E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.88894E-3
ql5_imon=1.60327E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63489E0
bslens_imon=2.71439E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19965E1
lens5a_imon=1.97442E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.05338E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53724E1
cs_ef1b_imon=3.0155E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02254E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04772E1
cs_ea1_imon=2.46577E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38938E0
lens1_imon=2.59543E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.98306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04213E1
cs_ea2_imon=1.55624E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84586E1
cs_ef1a_imon=2.99531E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.52565E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11153E1
os_restr1_imon=4.30247E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15378E1
os_ea1_imon=2.27183E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63113E1
os_ef1bup_imon=3.07172E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23888E0
cs_ionrep_imon=1.23432E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93352E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=3.08505E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=3.48437E-8
tplens_vset=1.4E-1
tplens_vmon=1.59517E0
tplens_imon=-1.33518E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26422E1
iondef3_imon=1.51407E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26512E1
iondef2_imon=1.59085E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02974E2
lens6_imon=2.98331E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=4.06957E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2509E0
ionrepsh_imon=1.93801E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.16296E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7479E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.60418E0
os_ea2_imon=-5.44483E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.0068E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71348E1
cs_ef2a_imon=3.19606E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06237E0
os_ef2alow_imon=-2.72041E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.35266E-1
os_ef2bup_imon=-5.38375E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=3.46779E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.31046E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01665E1
cs_anode2_imon=2.25398E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7358E1
iondef1_imon=1.0858E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68106E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.02453E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=8.89739E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13975E0
cs_ionaccel_imon=-1.978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02054E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56279E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=1.90313E-1
window_imon=-9.61679E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.38972E-4
mask2_vset=0.0E0
mask2_vmon=-1.86392E1
mask2_imon=-7.45441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.69644E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.82765E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.10523E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56999E0
defgridb_imon=5.98769E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33289E1
os_fil1_imon=9.47922E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07804E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64577E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30866E1
cs_fil1_imon=9.99393E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61921E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67171E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.91894E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.71078E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-2.26353E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=3.55357E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22464E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.32892E-2
chamber_ion_pmon=1.70096E-8
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40102E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.67411E-1
res40_imon=-2.64833E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.16441E-1	-7.97772E-1	-9.131E0	-9.14187E0	5.45979E-3	9.33886E-2	2.73234E1	-3.26319E1	-3.26396E1	2.68105E1					
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.16202E-1	-7.9813E-1	-9.13103E0	-9.14149E0	5.29289E-3	9.35316E-2	2.72957E1	-3.26847E1	-3.26235E1	2.67982E1	1.72761E-8	2.52025E-3	2.52025E-3	6.31269E-3	2.32928E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.16202E-1	-7.98202E-1	-9.13091E0	-9.14197E0	5.36442E-3	9.32455E-2	2.73149E1	-3.2666E1	-3.26353E1	2.67955E1	1.72716E-8	2.51384E-3	2.51384E-3	6.3131E-3	2.33063E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.16202E-1	-7.98106E-1	-9.13091E0	-9.14202E0	5.43594E-3	9.31263E-2	2.72636E1	-3.26975E1	-3.26002E1	2.67974E1	1.72183E-8	2.51077E-3	2.51077E-3	6.3074E-3	2.32733E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16369E-1	-7.98225E-1	-9.13134E0	-9.14183E0	5.4121E-3	9.33886E-2	2.72853E1	-3.26573E1	-3.26314E1	2.68028E1	1.72477E-8	2.52099E-3	2.52099E-3	6.30192E-3	2.31882E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.16083E-1	-7.98416E-1	-9.13107E0	-9.14197E0	5.65052E-3	9.33886E-2	2.73145E1	-3.26579E1	-3.2613E1	2.6789E1	1.72477E-8	2.51552E-3	2.51552E-3	6.32386E-3	2.32689E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16154E-1	-7.98178E-1	-9.13138E0	-9.14207E0	5.57899E-3	9.31263E-2	2.72916E1	-3.26646E1	-3.26266E1	2.681E1	1.72777E-8	2.51007E-3	2.51007E-3	6.32936E-3	2.33499E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.16298E-1	-7.98249E-1	-9.13134E0	-9.14199E0	5.4121E-3	9.29117E-2	2.72803E1	-3.2639E1	-3.26331E1	2.68064E1	1.72627E-8	2.51116E-3	2.51116E-3	6.31288E-3	2.33094E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16059E-1	-7.98368E-1	-9.13124E0	-9.14192E0	5.26905E-3	9.32693E-2	2.73087E1	-3.26741E1	-3.2632E1	2.67944E1	1.72327E-8	2.52318E-3	2.52318E-3	6.30192E-3	2.33094E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.16226E-1	-7.98154E-1	-9.13117E0	-9.14216E0	5.00679E-3	9.33409E-2	2.72823E1	-3.26711E1	-3.26434E1	2.68112E1	1.73002E-8	2.51334E-3	2.51334E-3	6.30192E-3	2.32487E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.1625E-1	-7.98225E-1	-9.13098E0	-9.14187E0	5.22137E-3	9.33409E-2	2.73111E1	-3.26879E1	-3.26164E1	2.68184E1	1.72702E-8	2.51443E-3	2.51443E-3	6.3074E-3	2.33297E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.16607E-1	-7.98368E-1	-9.13105E0	-9.14185E0	5.19753E-3	9.34124E-2	2.73027E1	-3.26837E1	-3.2635E1	2.67932E1	1.72364E-8	2.51954E-3	2.51954E-3	6.26985E-3	2.32711E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.1656E-1	-7.98559E-1	-9.13141E0	-9.14209E0	5.22137E-3	9.30786E-2	2.73039E1	-3.26687E1	-3.26176E1	2.67962E1	1.72589E-8	2.51443E-3	2.51443E-3	6.31563E-3	2.3279E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.16464E-1	-7.98464E-1	-9.13143E0	-9.14218E0	5.31673E-3	9.33886E-2	2.72715E1	-3.26549E1	-3.26224E1	2.68226E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.16798E-1	-7.98321E-1	-9.13129E0	-9.14195E0	5.22137E-3	9.34601E-2	2.73128E1	-3.2639E1	-3.26307E1	2.67885E1	1.72402E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.32487E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.16703E-1	-7.98059E-1	-9.13098E0	-9.14197E0	5.31673E-3	9.3174E-2	2.73092E1	-3.26803E1	-3.26054E1	2.68124E1	1.72702E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.32487E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.1687E-1	-7.98082E-1	-9.13143E0	-9.14192E0	5.34058E-3	9.32455E-2	2.73213E1	-3.26867E1	-3.26368E1	2.68004E1	1.72584E-8	2.51739E-3	2.51739E-3	6.3074E-3	2.32315E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.16798E-1	-7.98202E-1	-9.131E0	-9.14185E0	5.43594E-3	9.31978E-2	2.73346E1	-3.26703E1	-3.2652E1	2.68146E1	1.72702E-8	2.51443E-3	2.51443E-3	6.31837E-3	2.32487E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09634E0	-8.16607E-1	-7.98273E-1	-9.13126E0	-9.14211E0	5.26905E-3	9.32455E-2	2.73009E1	-3.26675E1	-3.26218E1	2.6831E1	1.70675E-8	2.51919E-3	2.51919E-3	6.31269E-3	2.32733E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.16798E-1	-7.98082E-1	-9.13138E0	-9.14199E0	5.88894E-3	9.32693E-2	2.7358E1	-3.26512E1	-3.26422E1	2.68106E1	1.70096E-8	2.52209E-3	2.52209E-3	6.30192E-3	2.32892E-2