[Scan]
initial_time=2016-02-17T17:58:10
final_time=2016-02-17T17:58:29
ip_count=19
run=1032
dataset=5
scan=126
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08788E-4
ql1_vset=
ql1_vmon=-8.16774E-1
ql1_imon=1.37063E-8
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=1.88595E-9
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=3.582E-10
ql4_vset=
ql4_vmon=-9.14156E0
ql4_imon=2.96009E-10
mult1=-9.39121E-9
mult2=-2.83039E-9
rf_tmon=-5.04716E-3
rf_agc=3.40426E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=1.61227E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65773E0
bslens_imon=2.72161E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=1.9755E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.05183E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53568E1
cs_ef1b_imon=3.01658E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02254E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04898E1
cs_ea1_imon=2.45316E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36715E0
lens1_imon=2.61346E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64801E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04081E1
cs_ea2_imon=1.57283E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=2.99351E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.52297E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11135E1
os_restr1_imon=4.30103E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15312E1
os_ea1_imon=2.28481E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63761E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21545E0
cs_ionrep_imon=1.22855E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93297E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02001E1
cs_anode1_imon=3.09767E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=3.49787E-8
tplens_vset=1.4E-1
tplens_vmon=1.57354E0
tplens_imon=-2.34457E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26801E1
iondef2_imon=1.58436E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02977E2
lens6_imon=2.9844E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.01515E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26712E0
ionrepsh_imon=1.92756E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34054E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74321E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.59938E0
os_ea2_imon=-6.74261E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.005E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71492E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07858E0
os_ef2alow_imon=-2.51499E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08836E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10529E1
os_restr2_imon=3.47536E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.31298E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.26299E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73357E1
iondef1_imon=1.08436E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67884E1
iondef4_imon=1.08485E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.02681E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=8.88986E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10551E0
cs_ionaccel_imon=-1.92033E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47287E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=1.98722E-1
window_imon=-1.05178E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39055E-4
mask2_vset=0.0E0
mask2_vmon=-1.86092E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.36118E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.73752E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.14488E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44668E0
defgridb_imon=6.25085E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33287E1
os_fil1_imon=9.47748E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06879E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64702E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30845E1
cs_fil1_imon=1.00004E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61879E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66972E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98343E-2
os_fil2_imon=-2.64194E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55997E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.15541E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.65588E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22561E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.32711E-2
chamber_ion_pmon=1.70209E-8
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.51794E-1
res40_imon=-2.64833E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.16464E-1	-7.98202E-1	-9.13162E0	-9.14199E0	5.48363E-3	9.32455E-2	2.73234E1	-3.26844E1	-3.26077E1	2.67986E1	1.72511E-8	2.50989E-3	2.50989E-3	6.33436E-3	2.33109E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.16512E-1	-7.98368E-1	-9.1316E0	-9.14183E0	5.57899E-3	9.32932E-2	2.72959E1	-3.27068E1	-3.26223E1	2.67974E1	1.72702E-8	2.51334E-3	2.51334E-3	6.32386E-3	2.32892E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.16488E-1	-7.98297E-1	-9.13134E0	-9.14156E0	5.55515E-3	9.33647E-2	2.73254E1	-3.26417E1	-3.26335E1	2.67868E1	1.72976E-8	2.51693E-3	2.51693E-3	6.31299E-3	2.33285E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.16226E-1	-7.98488E-1	-9.13162E0	-9.14173E0	5.4121E-3	9.33886E-2	2.73339E1	-3.26669E1	-3.26458E1	2.68106E1	1.72931E-8	2.5199E-3	2.5199E-3	6.29703E-3	2.3237E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.1625E-1	-7.98512E-1	-9.13172E0	-9.14207E0	5.72205E-3	9.33886E-2	2.73021E1	-3.2688E1	-3.26354E1	2.6801E1	1.72028E-8	2.5199E-3	2.5199E-3	6.29645E-3	2.33094E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.16417E-1	-7.98535E-1	-9.13141E0	-9.14218E0	5.79357E-3	9.30548E-2	2.73112E1	-3.2667E1	-3.26321E1	2.67866E1	1.71208E-8	2.52318E-3	2.52318E-3	6.31288E-3	2.33702E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.16178E-1	-7.98392E-1	-9.13138E0	-9.14187E0	5.53131E-3	9.2864E-2	2.72827E1	-3.2649E1	-3.26266E1	2.67932E1	1.70771E-8	2.52027E-3	2.52027E-3	6.30182E-3	2.33905E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.16154E-1	-7.98559E-1	-9.13141E0	-9.14168E0	5.38826E-3	9.32217E-2	2.72943E1	-3.26615E1	-3.26014E1	2.67962E1	1.709E-8	2.51525E-3	2.51525E-3	6.32356E-3	2.34305E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16107E-1	-7.98512E-1	-9.13131E0	-9.14168E0	5.34058E-3	9.31978E-2	2.72962E1	-3.26762E1	-3.2606E1	2.68001E1	1.72658E-8	2.51954E-3	2.51954E-3	6.32896E-3	2.33706E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.16274E-1	-7.98273E-1	-9.1315E0	-9.14171E0	5.19753E-3	9.30071E-2	2.73235E1	-3.26817E1	-3.26248E1	2.68001E1	1.72777E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.33905E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.16321E-1	-7.97963E-1	-9.13103E0	-9.14197E0	5.03063E-3	9.29356E-2	2.73216E1	-3.26738E1	-3.26738E1	2.67705E1	1.72927E-8	2.52209E-3	2.52209E-3	6.29098E-3	2.32892E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.16131E-1	-7.97868E-1	-9.13124E0	-9.14185E0	5.31673E-3	9.30548E-2	2.72727E1	-3.26308E1	-3.26398E1	2.68214E1	1.72777E-8	2.52099E-3	2.52099E-3	6.30192E-3	2.33297E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16512E-1	-7.98249E-1	-9.13129E0	-9.14185E0	5.43594E-3	9.28879E-2	2.72895E1	-3.26693E1	-3.26164E1	2.68196E1	1.7229E-8	2.51417E-3	2.51417E-3	6.32896E-3	2.33109E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.16607E-1	-7.98297E-1	-9.13124E0	-9.14168E0	5.53131E-3	9.31025E-2	2.73003E1	-3.26705E1	-3.26536E1	2.67992E1	1.72627E-8	2.51552E-3	2.51552E-3	6.29098E-3	2.34924E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.16751E-1	-7.98535E-1	-9.13107E0	-9.14178E0	5.03063E-3	9.3174E-2	2.73287E1	-3.26997E1	-3.26626E1	2.68064E1	1.73077E-8	2.51225E-3	2.51225E-3	6.29645E-3	2.32689E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16727E-1	-7.98488E-1	-9.13124E0	-9.14168E0	5.26905E-3	9.3174E-2	2.72624E1	-3.26933E1	-3.2647E1	2.67656E1	1.72402E-8	2.51662E-3	2.51662E-3	6.29645E-3	2.33499E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.16393E-1	-7.98082E-1	-9.13115E0	-9.1419E0	5.34058E-3	9.31025E-2	2.73558E1	-3.26897E1	-3.26166E1	2.6763E1	1.71484E-8	2.52384E-3	2.52384E-3	6.32896E-3	2.32513E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.16536E-1	-7.9844E-1	-9.13115E0	-9.14197E0	5.29289E-3	9.31263E-2	2.72986E1	-3.26366E1	-3.26496E1	2.67896E1	1.70023E-8	2.52977E-3	2.52977E-3	6.31837E-3	2.34516E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16703E-1	-7.98059E-1	-9.13126E0	-9.14178E0	5.126E-3	9.33409E-2	2.73275E1	-3.26826E1	-3.26602E1	2.67601E1	1.701E-8	2.52061E-3	2.52061E-3	6.34518E-3	2.32711E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.16774E-1	-7.98082E-1	-9.13126E0	-9.14156E0	5.26905E-3	9.34124E-2	2.73357E1	-3.26801E1	-3.26224E1	2.67884E1	1.70209E-8	2.51954E-3	2.51954E-3	6.31278E-3	2.32711E-2