[Scan]
initial_time=2016-02-17T17:58:36
final_time=2016-02-17T17:58:56
ip_count=19
run=1032
dataset=5
scan=127
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=1.36284E-8
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=1.95079E-9
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=3.72255E-10
ql4_vset=
ql4_vmon=-9.14159E0
ql4_imon=3.03411E-10
mult1=-9.57182E-9
mult2=-2.79247E-9
rf_tmon=-5.78017E-3
rf_agc=3.27988E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=1.62143E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67395E0
bslens_imon=2.60625E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20187E1
lens5a_imon=1.97658E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12515E2
lens4a_imon=2.05219E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53646E1
cs_ef1b_imon=3.00793E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02218E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05096E1
cs_ea1_imon=2.43117E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34432E0
lens1_imon=2.66032E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64536E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.5494E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84592E1
cs_ef1a_imon=2.9982E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.52729E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11177E1
os_restr1_imon=4.29094E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15504E1
os_ea1_imon=2.28769E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6408E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24609E0
cs_ionrep_imon=1.25091E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93546E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01707E1
cs_anode1_imon=3.10451E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=3.48468E-8
tplens_vset=1.4E-1
tplens_vmon=1.60719E0
tplens_imon=-3.10161E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26134E1
iondef3_imon=1.4964E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26675E1
iondef2_imon=1.5804E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98483E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.02545E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29776E0
ionrepsh_imon=1.91962E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33742E1
lens5b_imon=2.2109E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.11749E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.62701E0
os_ea2_imon=-5.62508E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00554E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70849E1
cs_ef2a_imon=3.17299E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06177E0
os_ef2alow_imon=-2.68437E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.11239E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=3.48113E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.30577E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.26083E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73339E1
iondef1_imon=1.09697E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68118E1
iondef4_imon=1.06972E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.02707E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=8.90409E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10431E0
cs_ionaccel_imon=-2.02845E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56081E1
einzel_imon=7.63018E-6
window_vset=0.0E0
window_vmon=1.77098E-1
window_imon=-1.01213E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.86158E1
mask2_imon=-7.74273E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9267E3
multa_neg_imon=7.79017E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.78439E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.14488E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32938E0
defgridb_imon=6.1355E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33295E1
os_fil1_imon=9.48229E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06722E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64688E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30839E1
cs_fil1_imon=9.99014E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6233E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66907E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98343E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59735E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-1.9692E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.77932E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22656E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.32711E-2
chamber_ion_pmon=1.70246E-8
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.92038E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.16154E-1	-7.9782E-1	-9.13105E0	-9.14171E0	5.43594E-3	9.32693E-2	2.72856E1	-3.26372E1	-3.26596E1	2.68123E1	1.70023E-8	2.52099E-3	2.52099E-3	6.31288E-3	2.32689E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.16298E-1	-7.97582E-1	-9.13103E0	-9.14218E0	5.22137E-3	9.32693E-2	2.73357E1	-3.26793E1	-3.26187E1	2.67876E1	1.71463E-8	2.52342E-3	2.52342E-3	6.31269E-3	2.32733E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16226E-1	-7.97653E-1	-9.1311E0	-9.14187E0	5.36442E-3	9.29594E-2	2.73287E1	-3.26425E1	-3.26785E1	2.68117E1	1.71528E-8	2.51915E-3	2.51915E-3	6.32418E-3	2.33079E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.16083E-1	-7.97534E-1	-9.13112E0	-9.14202E0	5.43594E-3	9.29594E-2	2.73193E1	-3.26549E1	-3.26266E1	2.68058E1	1.70391E-8	2.51739E-3	2.51739E-3	6.32896E-3	2.3291E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.16321E-1	-7.97629E-1	-9.13157E0	-9.14221E0	5.55515E-3	9.28164E-2	2.72522E1	-3.26729E1	-3.26164E1	2.68094E1	1.71208E-8	2.51443E-3	2.51443E-3	6.30192E-3	2.33499E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16584E-1	-7.97653E-1	-9.13155E0	-9.14235E0	5.50747E-3	9.29594E-2	2.73039E1	-3.26536E1	-3.2644E1	2.67932E1	1.72103E-8	2.5199E-3	2.5199E-3	6.31563E-3	2.33195E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.16631E-1	-7.97796E-1	-9.13155E0	-9.14221E0	5.31673E-3	9.3174E-2	2.73478E1	-3.26458E1	-3.26272E1	2.68004E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.16369E-1	-7.97963E-1	-9.13146E0	-9.14218E0	5.43594E-3	9.29832E-2	2.73315E1	-3.26603E1	-3.2629E1	2.67794E1	1.7229E-8	2.51632E-3	2.51632E-3	6.32356E-3	2.32513E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.16607E-1	-7.97796E-1	-9.13131E0	-9.14195E0	5.45979E-3	9.32932E-2	2.72787E1	-3.26747E1	-3.26026E1	2.68292E1	1.71953E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.32689E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.16011E-1	-7.98059E-1	-9.13112E0	-9.14209E0	5.45979E-3	9.28879E-2	2.73316E1	-3.2649E1	-3.27015E1	2.68001E1	1.71357E-8	2.52647E-3	2.52647E-3	6.32936E-3	2.32892E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.16488E-1	-7.97939E-1	-9.1311E0	-9.14216E0	5.4121E-3	9.31978E-2	2.73267E1	-3.26506E1	-3.26464E1	2.6843E1	1.71804E-8	2.51552E-3	2.51552E-3	6.34037E-3	2.33905E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09711E0	-8.1625E-1	-7.98106E-1	-9.13112E0	-9.14168E0	5.14984E-3	9.30548E-2	2.73128E1	-3.27051E1	-3.26478E1	2.68034E1	1.72658E-8	2.51632E-3	2.51632E-3	6.31278E-3	2.34105E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0968E0	-8.16107E-1	-7.98249E-1	-9.13129E0	-9.14199E0	5.38826E-3	9.31263E-2	2.73297E1	-3.26687E1	-3.2623E1	2.68172E1	1.72252E-8	2.52209E-3	2.52209E-3	6.34037E-3	2.33499E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09642E0	-8.16178E-1	-7.97915E-1	-9.13124E0	-9.14197E0	5.36442E-3	9.33647E-2	2.72992E1	-3.26095E1	-3.26467E1	2.68065E1	1.72364E-8	2.51525E-3	2.51525E-3	6.32356E-3	2.32117E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09704E0	-8.16321E-1	-7.98225E-1	-9.1311E0	-9.14183E0	5.24521E-3	9.29356E-2	2.72984E1	-3.2678E1	-3.26615E1	2.68112E1	1.72402E-8	2.52209E-3	2.52209E-3	6.32386E-3	2.33094E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09657E0	-8.16226E-1	-7.98082E-1	-9.13124E0	-9.14161E0	5.45979E-3	9.30071E-2	2.72886E1	-3.2708E1	-3.26236E1	2.68076E1	1.70096E-8	2.52757E-3	2.52757E-3	6.31288E-3	2.32084E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0965E0	-8.16298E-1	-7.98345E-1	-9.13126E0	-9.14199E0	5.38826E-3	9.31978E-2	2.73327E1	-3.2653E1	-3.2614E1	2.67806E1	1.70096E-8	2.52428E-3	2.52428E-3	6.31837E-3	2.33297E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0968E0	-8.16512E-1	-7.97987E-1	-9.13136E0	-9.14159E0	5.34058E-3	9.30548E-2	2.73098E1	-3.26632E1	-3.26325E1	2.68022E1	1.69949E-8	2.52538E-3	2.52538E-3	6.31837E-3	2.3472E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16655E-1	-7.98225E-1	-9.13141E0	-9.1418E0	5.22137E-3	9.32217E-2	2.73269E1	-3.26756E1	-3.26284E1	2.68314E1	1.69955E-8	2.51096E-3	2.51096E-3	6.33977E-3	2.31919E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.16631E-1	-7.97939E-1	-9.13143E0	-9.14159E0	5.17368E-3	9.31978E-2	2.73339E1	-3.26675E1	-3.26134E1	2.68118E1	1.70246E-8	2.51739E-3	2.51739E-3	6.30202E-3	2.32711E-2