[Scan]
initial_time=2016-02-17T17:59:29
final_time=2016-02-17T17:59:49
ip_count=19
run=1032
dataset=5
scan=129
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08801E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=1.36269E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=1.94038E-9
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=3.3859E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=2.93875E-10
mult1=-9.59393E-9
mult2=-2.74873E-9
rf_tmon=-5.78366E-3
rf_agc=3.30908E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=1.61673E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66739E0
bslens_imon=2.57157E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19942E1
lens5a_imon=1.98439E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05047E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53601E1
cs_ef1b_imon=2.99729E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02188E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05153E1
cs_ea1_imon=2.45159E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35958E0
lens1_imon=2.53618E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65018E1
os_ef1alow_imon=2.97429E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03867E1
cs_ea2_imon=1.5547E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=2.98809E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.52541E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11312E1
os_restr1_imon=4.29342E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.27002E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63526E1
os_ef1bup_imon=3.07832E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27864E0
cs_ionrep_imon=1.24253E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93264E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01615E1
cs_anode1_imon=3.09814E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=3.49428E-8
tplens_vset=1.4E-1
tplens_vmon=1.61843E0
tplens_imon=-1.89165E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2636E1
iondef3_imon=1.50126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2675E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.98498E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=3.96566E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27923E0
ionrepsh_imon=1.94085E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33917E1
lens5b_imon=2.16773E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74649E1
cs_ef2b_imon=3.11442E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.62787E0
os_ea2_imon=-6.9884E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00541E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71635E1
cs_ef2a_imon=3.18165E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08847E0
os_ef2alow_imon=-2.70102E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25338E-1
os_ef2bup_imon=-5.41854E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.46791E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.30955E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01945E1
cs_anode2_imon=2.25564E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73228E1
iondef1_imon=1.07618E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68034E1
iondef4_imon=1.083E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.02889E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=8.90971E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10478E0
cs_ionaccel_imon=-1.9721E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47357E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56258E1
einzel_imon=7.54276E-6
window_vset=0.0E0
window_vmon=1.7653E-1
window_imon=-1.03795E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39176E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-7.51338E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.9444E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.65959E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.03477E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42327E0
defgridb_imon=6.15345E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33276E1
os_fil1_imon=9.47474E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07282E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64501E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3089E1
cs_fil1_imon=9.99247E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62077E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66907E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0913E-2
os_fil2_imon=-2.60273E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82031E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74832E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34673E-1
cs_fil2_imon=-2.54376E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.0032E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22467E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32371E-3
inlet_lpb_pmon=2.321E-2
chamber_ion_pmon=1.72197E-8
chamber_cvt_pmon=2.51647E-3
foreline_cvt_pmon=2.51647E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.58619E-1
res40_imon=-2.60548E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16488E-1	-7.97939E-1	-9.13119E0	-9.14228E0	5.34058E-3	9.31025E-2	2.73328E1	-3.26649E1	-3.26307E1	2.6797E1	1.71923E-8	2.5131E-3	2.5131E-3	6.32896E-3	2.3291E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16536E-1	-7.97844E-1	-9.13126E0	-9.14216E0	5.126E-3	9.32455E-2	2.72922E1	-3.26523E1	-3.26407E1	2.68119E1	1.709E-8	2.52061E-3	2.52061E-3	6.29665E-3	2.31721E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09673E0	-8.16393E-1	-7.97892E-1	-9.13124E0	-9.14192E0	5.24521E-3	9.32455E-2	2.73269E1	-3.26779E1	-3.26431E1	2.67902E1	1.71908E-8	2.52362E-3	2.52362E-3	6.33538E-3	2.33079E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.16369E-1	-7.9782E-1	-9.13134E0	-9.14211E0	5.6982E-3	9.33409E-2	2.73263E1	-3.26478E1	-3.26573E1	2.6792E1	1.72584E-8	2.51203E-3	2.51203E-3	6.31817E-3	2.3291E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.16464E-1	-7.98035E-1	-9.13076E0	-9.14218E0	5.79357E-3	9.38177E-2	2.72835E1	-3.26807E1	-3.26368E1	2.67722E1	1.72627E-8	2.51771E-3	2.51771E-3	6.3074E-3	2.32892E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.16393E-1	-7.98082E-1	-9.13098E0	-9.14197E0	5.43594E-3	9.35078E-2	2.72967E1	-3.26639E1	-3.2632E1	2.68106E1	1.72702E-8	2.50898E-3	2.50898E-3	6.33486E-3	2.33094E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.16607E-1	-7.98273E-1	-9.13112E0	-9.14185E0	5.55515E-3	9.33647E-2	2.72901E1	-3.26705E1	-3.262E1	2.6807E1	1.72702E-8	2.5199E-3	2.5199E-3	6.3514E-3	2.32487E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.16464E-1	-7.97892E-1	-9.13112E0	-9.14197E0	5.57899E-3	9.34839E-2	2.73151E1	-3.26832E1	-3.26242E1	2.68024E1	1.7229E-8	2.52276E-3	2.52276E-3	6.33436E-3	2.33308E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16417E-1	-7.98154E-1	-9.13119E0	-9.14216E0	5.38826E-3	9.32217E-2	2.73243E1	-3.26675E1	-3.26212E1	2.67878E1	1.72177E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.33499E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.16536E-1	-7.98202E-1	-9.13112E0	-9.14199E0	5.19753E-3	9.31978E-2	2.72992E1	-3.26862E1	-3.26219E1	2.6798E1	1.71997E-8	2.51847E-3	2.51847E-3	6.31278E-3	2.33706E-2
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.16393E-1	-7.98106E-1	-9.13153E0	-9.14202E0	5.45979E-3	9.34601E-2	2.72961E1	-3.26627E1	-3.26999E1	2.68214E1	1.70318E-8	2.51771E-3	2.51771E-3	6.3074E-3	2.33702E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16417E-1	-7.9813E-1	-9.13136E0	-9.14164E0	5.36442E-3	9.35078E-2	2.73045E1	-3.26603E1	-3.26921E1	2.68178E1	1.701E-8	2.51203E-3	2.51203E-3	6.3074E-3	2.32315E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16369E-1	-7.97844E-1	-9.13143E0	-9.14176E0	5.55515E-3	9.36031E-2	2.73321E1	-3.2644E1	-3.26218E1	2.681E1	1.70244E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.33297E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16011E-1	-7.98225E-1	-9.13134E0	-9.14207E0	5.34058E-3	9.31025E-2	2.73321E1	-3.26789E1	-3.25978E1	2.68376E1	1.70096E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.32084E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16298E-1	-7.98273E-1	-9.13131E0	-9.14204E0	5.14984E-3	9.3174E-2	2.73231E1	-3.26945E1	-3.26128E1	2.68274E1	1.70096E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.33094E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.16298E-1	-7.98321E-1	-9.13124E0	-9.14195E0	4.98295E-3	9.35078E-2	2.73351E1	-3.26332E1	-3.26422E1	2.68094E1	1.70023E-8	2.51662E-3	2.51662E-3	6.33486E-3	2.33094E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.16202E-1	-7.98368E-1	-9.13126E0	-9.14176E0	5.38826E-3	9.34839E-2	2.73381E1	-3.26885E1	-3.26392E1	2.67938E1	1.70243E-8	2.52697E-3	2.52697E-3	6.31858E-3	2.32255E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16321E-1	-7.98082E-1	-9.13146E0	-9.1419E0	5.24521E-3	9.32217E-2	2.733E1	-3.27042E1	-3.26527E1	2.68238E1	1.72143E-8	2.51739E-3	2.51739E-3	6.31278E-3	2.33308E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16178E-1	-7.98368E-1	-9.13079E0	-9.14185E0	5.43594E-3	9.32932E-2	2.73339E1	-3.26849E1	-3.26711E1	2.68059E1	1.71391E-8	2.52025E-3	2.52025E-3	6.3445E-3	2.33123E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.16464E-1	-7.98321E-1	-9.13141E0	-9.14195E0	5.50747E-3	9.32932E-2	2.73228E1	-3.2675E1	-3.2636E1	2.68034E1	1.72197E-8	2.51647E-3	2.51647E-3	6.32371E-3	2.321E-2