[Scan]
initial_time=2016-02-17T17:59:56
final_time=2016-02-17T18:00:16
ip_count=19
run=1032
dataset=5
scan=130
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.16298E-1
ql1_imon=1.36516E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=1.90188E-9
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=3.3406E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=2.89345E-10
mult1=-1.0071E-8
mult2=-2.86494E-9
rf_tmon=-4.96166E-3
rf_agc=3.32314E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=1.6614E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66238E0
bslens_imon=2.63855E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19854E1
lens5a_imon=1.98538E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05159E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5379E1
cs_ef1b_imon=3.01261E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0527E1
cs_ea1_imon=2.45882E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42459E0
lens1_imon=2.85526E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64452E1
os_ef1alow_imon=2.96396E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03807E1
cs_ea2_imon=1.55233E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=2.99892E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.52564E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11069E1
os_restr1_imon=4.27905E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15196E1
os_ea1_imon=2.29648E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.09082E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24659E0
cs_ionrep_imon=1.21736E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93347E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01485E1
cs_anode1_imon=3.0728E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.49414E-8
tplens_vset=1.4E-1
tplens_vmon=1.60348E0
tplens_imon=-1.19846E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26377E1
iondef3_imon=1.49173E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26651E1
iondef2_imon=1.58466E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0297E2
lens6_imon=2.98504E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.02689E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29495E0
ionrepsh_imon=1.92771E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3389E1
lens5b_imon=2.18409E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.13803E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.59185E0
os_ea2_imon=-5.82641E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00491E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.16758E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06837E0
os_ef2alow_imon=-2.65194E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90817E-1
os_ef2bup_imon=-5.32608E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10607E1
os_restr2_imon=3.46707E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.31067E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.27596E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7328E1
iondef1_imon=1.08366E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68135E1
iondef4_imon=1.08341E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.03292E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82857E-1
olens1_imon=8.91256E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16618E0
cs_ionaccel_imon=-1.92394E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47176E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56549E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.11336E-1
window_imon=-1.27883E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39369E-4
mask2_vset=0.0E0
mask2_vmon=-1.86212E1
mask2_imon=-7.995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.24813E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.59435E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50155E3
multb_neg_imon=7.1306E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53532E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33285E1
os_fil1_imon=9.49196E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07155E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64648E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30874E1
cs_fil1_imon=9.99831E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62192E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66962E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0686E-2
os_fil2_imon=-2.73204E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.42754E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.25752E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.45456E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22511E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.33507E-2
chamber_ion_pmon=1.72437E-8
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.572E-1
res40_imon=-2.80331E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16512E-1	-7.98464E-1	-9.13155E0	-9.14195E0	5.8651E-3	9.32455E-2	2.72871E1	-3.2659E1	-3.26266E1	2.68148E1	1.71832E-8	2.5147E-3	2.5147E-3	6.33538E-3	2.33699E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.16703E-1	-7.98059E-1	-9.13131E0	-9.14221E0	5.96046E-3	9.31978E-2	2.73167E1	-3.26738E1	-3.26217E1	2.68382E1	1.72978E-8	2.51814E-3	2.51814E-3	6.3074E-3	2.33905E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.16727E-1	-7.98273E-1	-9.13143E0	-9.14166E0	5.96046E-3	9.33409E-2	2.73169E1	-3.26773E1	-3.26272E1	2.67752E1	1.72441E-8	2.52139E-3	2.52139E-3	6.3074E-3	2.32049E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.16846E-1	-7.98297E-1	-9.13103E0	-9.14168E0	5.53131E-3	9.3174E-2	2.73122E1	-3.26649E1	-3.26284E1	2.68238E1	1.72658E-8	2.52061E-3	2.52061E-3	6.30202E-3	2.31919E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16727E-1	-7.98106E-1	-9.13134E0	-9.14166E0	5.57899E-3	9.33886E-2	2.72931E1	-3.26981E1	-3.26326E1	2.68118E1	1.7229E-8	2.51417E-3	2.51417E-3	6.33436E-3	2.32711E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.16679E-1	-7.98273E-1	-9.13153E0	-9.14211E0	5.65052E-3	9.31978E-2	2.72892E1	-3.26838E1	-3.26413E1	2.68184E1	1.72103E-8	2.52538E-3	2.52538E-3	6.31837E-3	2.32689E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.16607E-1	-7.98059E-1	-9.13162E0	-9.14195E0	5.43594E-3	9.35078E-2	2.7329E1	-3.26805E1	-3.26474E1	2.68124E1	1.70466E-8	2.51443E-3	2.51443E-3	6.3074E-3	2.33094E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.16584E-1	-7.98297E-1	-9.13155E0	-9.14211E0	5.45979E-3	9.34839E-2	2.72697E1	-3.26785E1	-3.26378E1	2.67884E1	1.70763E-8	2.51552E-3	2.51552E-3	6.33486E-3	2.32487E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.16774E-1	-7.98249E-1	-9.13124E0	-9.14204E0	5.60284E-3	9.36508E-2	2.72853E1	-3.26476E1	-3.26098E1	2.68028E1	1.701E-8	2.5131E-3	2.5131E-3	6.34518E-3	2.33507E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16584E-1	-7.98273E-1	-9.13131E0	-9.14183E0	5.43594E-3	9.33409E-2	2.72806E1	-3.26744E1	-3.26291E1	2.68052E1	1.69791E-8	2.52473E-3	2.52473E-3	6.31299E-3	2.32666E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.16607E-1	-7.9782E-1	-9.13131E0	-9.14166E0	5.79357E-3	9.3174E-2	2.73244E1	-3.26522E1	-3.26607E1	2.67584E1	1.7017E-8	2.51552E-3	2.51552E-3	6.33486E-3	2.33094E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16679E-1	-7.98035E-1	-9.13134E0	-9.14152E0	5.65052E-3	9.34839E-2	2.72976E1	-3.26429E1	-3.2606E1	2.68094E1	1.70104E-8	2.51814E-3	2.51814E-3	6.34982E-3	2.32733E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.1656E-1	-7.98321E-1	-9.13153E0	-9.14176E0	5.57899E-3	9.31025E-2	2.73081E1	-3.26651E1	-3.26326E1	2.6789E1	1.70017E-8	2.51915E-3	2.51915E-3	6.33538E-3	2.33079E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16631E-1	-7.98225E-1	-9.13141E0	-9.14173E0	5.55515E-3	9.30071E-2	2.73117E1	-3.26512E1	-3.26554E1	2.6807E1	1.70096E-8	2.51552E-3	2.51552E-3	6.31837E-3	2.32892E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.16464E-1	-7.98249E-1	-9.13129E0	-9.14171E0	5.93662E-3	9.32693E-2	2.7337E1	-3.26667E1	-3.2608E1	2.68036E1	1.70422E-8	2.51854E-3	2.51854E-3	6.30995E-3	2.32679E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.16321E-1	-7.98225E-1	-9.13122E0	-9.14216E0	5.31673E-3	9.30786E-2	2.7361E1	-3.26735E1	-3.25852E1	2.68094E1	1.72584E-8	2.51632E-3	2.51632E-3	6.32356E-3	2.31919E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16298E-1	-7.98059E-1	-9.13136E0	-9.14214E0	5.36442E-3	9.32932E-2	2.73495E1	-3.26288E1	-3.26549E1	2.67913E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.16321E-1	-7.98011E-1	-9.1316E0	-9.14161E0	4.93526E-3	9.35078E-2	2.72974E1	-3.26714E1	-3.26354E1	2.67974E1	1.72732E-8	2.50941E-3	2.50941E-3	6.31398E-3	2.32932E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.16035E-1	-7.98321E-1	-9.13174E0	-9.14164E0	5.126E-3	9.36031E-2	2.73207E1	-3.26597E1	-3.2623E1	2.6768E1	1.72364E-8	2.52169E-3	2.52169E-3	6.30202E-3	2.33507E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16298E-1	-7.98249E-1	-9.13141E0	-9.14176E0	5.38826E-3	9.32217E-2	2.7328E1	-3.26651E1	-3.26377E1	2.68135E1	1.72437E-8	2.5131E-3	2.5131E-3	6.33436E-3	2.33507E-2