[Scan]
initial_time=2016-02-17T18:00:23
final_time=2016-02-17T18:00:42
ip_count=19
run=1032
dataset=5
scan=131
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08725E-4
ql1_vset=
ql1_vmon=-8.16488E-1
ql1_imon=1.36348E-8
ql2_vset=
ql2_vmon=-7.98202E-1
ql2_imon=1.94212E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=3.13067E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=2.83027E-10
mult1=-9.66486E-9
mult2=-2.71346E-9
rf_tmon=-5.76007E-3
rf_agc=3.22414E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=1.61136E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66916E0
bslens_imon=2.55742E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20049E1
lens5a_imon=1.97235E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1252E2
lens4a_imon=2.05097E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5343E1
cs_ef1b_imon=2.99573E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02075E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05088E1
cs_ea1_imon=2.45407E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38082E0
lens1_imon=2.6813E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64487E1
os_ef1alow_imon=2.97453E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03761E1
cs_ea2_imon=1.55789E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84267E1
cs_ef1a_imon=2.98669E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.52783E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1121E1
os_restr1_imon=4.30068E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1517E1
os_ea1_imon=2.28984E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63589E1
os_ef1bup_imon=3.0833E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25092E0
cs_ionrep_imon=1.22165E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91921E2
cs_nozzle_imon=1.93388E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01925E1
cs_anode1_imon=3.09269E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=3.49677E-8
tplens_vset=1.4E-1
tplens_vmon=1.61312E0
tplens_imon=-2.91808E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26443E1
iondef3_imon=1.48533E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26673E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98399E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.01473E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3105E0
ionrepsh_imon=1.90404E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33616E1
lens5b_imon=2.19038E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.12674E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.62374E0
os_ea2_imon=-7.34234E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06143E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71605E1
cs_ef2a_imon=3.18269E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07946E0
os_ef2alow_imon=-2.61629E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.19241E-1
os_ef2bup_imon=-5.39649E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10672E1
os_restr2_imon=3.45793E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.30884E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.25793E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73021E1
iondef1_imon=1.08396E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68059E1
iondef4_imon=1.08851E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.02792E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=8.88449E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14694E0
cs_ionaccel_imon=-1.88648E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47157E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56353E1
einzel_imon=7.57316E-6
window_vset=0.0E0
window_vmon=1.91042E-1
window_imon=-1.10108E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39035E-4
mask2_vset=0.0E0
mask2_vmon=-1.86124E1
mask2_imon=-6.8752E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92684E3
multa_neg_imon=7.27899E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.39767E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.43826E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4469E0
defgridb_imon=5.93755E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33253E1
os_fil1_imon=9.49029E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06408E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64682E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30869E1
cs_fil1_imon=9.99206E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62117E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66962E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.83804E-2
os_fil2_imon=-2.65181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83706E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55343E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34396E-1
cs_fil2_imon=-2.46067E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05513E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22505E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.32084E-2
chamber_ion_pmon=1.70023E-8
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.28132E-1
res40_imon=-2.65799E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.16178E-1	-7.98225E-1	-9.13143E0	-9.14204E0	5.53131E-3	9.32217E-2	2.73155E1	-3.26782E1	-3.26057E1	2.68041E1	1.70246E-8	2.51417E-3	2.51417E-3	6.31278E-3	2.32513E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16607E-1	-7.98249E-1	-9.13157E0	-9.14183E0	5.57899E-3	9.31263E-2	2.73296E1	-3.26585E1	-3.26432E1	2.68119E1	1.701E-8	2.52169E-3	2.52169E-3	6.3074E-3	2.34305E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.16488E-1	-7.98202E-1	-9.1316E0	-9.1419E0	5.05447E-3	9.31263E-2	2.73086E1	-3.26602E1	-3.2637E1	2.68053E1	1.70243E-8	2.51915E-3	2.51915E-3	6.33538E-3	2.32461E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16321E-1	-7.98202E-1	-9.13143E0	-9.14195E0	5.43594E-3	9.35078E-2	2.73345E1	-3.26621E1	-3.26543E1	2.68046E1	1.70282E-8	2.5215E-3	2.5215E-3	6.33144E-3	2.32919E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.16584E-1	-7.98154E-1	-9.13131E0	-9.14202E0	5.34058E-3	9.34124E-2	2.73063E1	-3.26777E1	-3.26332E1	2.67943E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16298E-1	-7.98297E-1	-9.13157E0	-9.14185E0	5.53131E-3	9.35078E-2	2.73045E1	-3.26573E1	-3.26008E1	2.6797E1	1.70096E-8	2.52428E-3	2.52428E-3	6.3074E-3	2.33297E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.16202E-1	-7.98154E-1	-9.13143E0	-9.14183E0	5.38826E-3	9.34839E-2	2.72909E1	-3.26307E1	-3.26178E1	2.67908E1	1.70244E-8	2.52428E-3	2.52428E-3	6.34037E-3	2.33297E-2
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-8.1625E-1	-7.98368E-1	-9.13129E0	-9.14223E0	5.6982E-3	9.34362E-2	2.73087E1	-3.26591E1	-3.26164E1	2.67902E1	1.70318E-8	2.5188E-3	2.5188E-3	6.34037E-3	2.32487E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.16369E-1	-7.9813E-1	-9.13143E0	-9.14202E0	5.6982E-3	9.35316E-2	2.728E1	-3.26511E1	-3.26199E1	2.68022E1	1.701E-8	2.52384E-3	2.52384E-3	6.29665E-3	2.33706E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.16369E-1	-7.98345E-1	-9.13117E0	-9.14237E0	5.48363E-3	9.34362E-2	2.73252E1	-3.26691E1	-3.26236E1	2.67944E1	1.70168E-8	2.51693E-3	2.51693E-3	6.32418E-3	2.32255E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.16536E-1	-7.98345E-1	-9.13105E0	-9.14216E0	5.67436E-3	9.35316E-2	2.73151E1	-3.26732E1	-3.26054E1	2.6831E1	1.701E-8	2.51632E-3	2.51632E-3	6.32356E-3	2.33706E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16369E-1	-7.98249E-1	-9.13141E0	-9.14209E0	5.05447E-3	9.31025E-2	2.7351E1	-3.27117E1	-3.26199E1	2.68226E1	1.70023E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.33094E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.16202E-1	-7.98464E-1	-9.13141E0	-9.14216E0	5.22137E-3	9.32455E-2	2.73434E1	-3.26561E1	-3.26331E1	2.67956E1	1.70096E-8	2.52428E-3	2.52428E-3	6.31837E-3	2.33702E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.1625E-1	-7.98655E-1	-9.13146E0	-9.14218E0	5.36442E-3	9.3317E-2	2.73039E1	-3.26644E1	-3.26272E1	2.67995E1	1.69955E-8	2.52276E-3	2.52276E-3	6.31817E-3	2.33905E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.16202E-1	-7.98178E-1	-9.13146E0	-9.14195E0	5.48363E-3	9.35793E-2	2.73145E1	-3.26744E1	-3.26166E1	2.6828E1	1.701E-8	2.51632E-3	2.51632E-3	6.31817E-3	2.33905E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.16321E-1	-7.98154E-1	-9.13126E0	-9.14202E0	5.60284E-3	9.34362E-2	2.73087E1	-3.26669E1	-3.2644E1	2.67827E1	1.70246E-8	2.52061E-3	2.52061E-3	6.31278E-3	2.32711E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.16274E-1	-7.98249E-1	-9.13129E0	-9.14216E0	5.34058E-3	9.3627E-2	2.73145E1	-3.26826E1	-3.26065E1	2.6834E1	1.70466E-8	2.51552E-3	2.51552E-3	6.29645E-3	2.33297E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.16059E-1	-7.98297E-1	-9.13153E0	-9.14187E0	5.29289E-3	9.35316E-2	2.73033E1	-3.27009E1	-3.26142E1	2.67923E1	1.69883E-8	2.51847E-3	2.51847E-3	6.31278E-3	2.31919E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16154E-1	-7.98178E-1	-9.13148E0	-9.14228E0	5.79357E-3	9.32217E-2	2.73177E1	-3.26266E1	-3.26386E1	2.67941E1	1.71119E-8	2.51632E-3	2.51632E-3	6.31278E-3	2.33905E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.16488E-1	-7.98202E-1	-9.13129E0	-9.14199E0	5.57899E-3	9.32455E-2	2.73021E1	-3.26673E1	-3.26443E1	2.68059E1	1.70023E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.32084E-2