[Scan]
initial_time=2016-02-17T18:00:49
final_time=2016-02-17T18:01:09
ip_count=19
run=1032
dataset=5
scan=132
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08761E-4
ql1_vset=
ql1_vmon=-8.16345E-1
ql1_imon=1.36486E-8
ql2_vset=
ql2_vmon=-7.98345E-1
ql2_imon=1.93096E-9
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=3.71039E-10
ql4_vset=
ql4_vmon=-9.14218E0
ql4_imon=2.8677E-10
mult1=-9.48754E-9
mult2=-2.7745E-9
rf_tmon=-5.96642E-3
rf_agc=3.22581E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=1.60731E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68509E0
bslens_imon=2.46893E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19795E1
lens5a_imon=1.98864E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12529E2
lens4a_imon=2.05143E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53412E1
cs_ef1b_imon=2.99746E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04589E2
lens23_imon=1.02255E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.42363E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35191E0
lens1_imon=2.70607E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64742E1
os_ef1alow_imon=2.98461E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03891E1
cs_ea2_imon=1.5632E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84273E1
cs_ef1a_imon=2.98565E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=1.52875E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11564E1
os_restr1_imon=4.30451E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=2.2863E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63543E1
os_ef1bup_imon=3.07183E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23381E0
cs_ionrep_imon=1.23262E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93473E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0156E1
cs_anode1_imon=3.10068E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.48979E-8
tplens_vset=1.4E-1
tplens_vmon=1.61725E0
tplens_imon=-2.8119E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26092E1
iondef3_imon=1.48781E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26885E1
iondef2_imon=1.59718E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98431E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.06686E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29457E0
ionrepsh_imon=1.92174E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33693E1
lens5b_imon=2.17127E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74553E1
cs_ef2b_imon=3.11319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.59306E0
os_ea2_imon=-5.8204E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.00566E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70846E1
cs_ef2a_imon=3.18652E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06035E0
os_ef2alow_imon=-2.53983E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.44726E-1
os_ef2bup_imon=-5.37564E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=3.47705E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.30105E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0167E1
cs_anode2_imon=2.25063E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.08573E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67986E1
iondef4_imon=1.09233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.02478E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.8269E-1
olens1_imon=8.88997E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14578E0
cs_ionaccel_imon=-2.02897E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47254E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56139E1
einzel_imon=7.62528E-6
window_vset=0.0E0
window_vmon=1.71928E-1
window_imon=-1.18448E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.865E1
mask2_imon=-7.01421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=7.51259E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.69145E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.23651E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55025E0
defgridb_imon=6.07913E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33277E1
os_fil1_imon=9.48421E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07433E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64595E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30904E1
cs_fil1_imon=9.98296E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62615E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67056E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.8507E-2
os_fil2_imon=-2.85453E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80231E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66733E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.55914E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.39631E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22568E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.33109E-2
chamber_ion_pmon=1.69955E-8
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.47246E-1
res40_imon=-2.62324E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.16345E-1	-7.98082E-1	-9.13136E0	-9.14173E0	5.53131E-3	9.3317E-2	2.73087E1	-3.27125E1	-3.26158E1	2.678E1	1.72879E-8	2.51632E-3	2.51632E-3	6.33977E-3	2.34105E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.16584E-1	-7.98059E-1	-9.13141E0	-9.14173E0	5.57899E-3	9.32932E-2	2.72873E1	-3.2656E1	-3.26181E1	2.67938E1	1.73152E-8	2.52209E-3	2.52209E-3	6.32936E-3	2.33905E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.16536E-1	-7.98249E-1	-9.13136E0	-9.14187E0	5.62668E-3	9.34124E-2	2.73196E1	-3.26741E1	-3.26179E1	2.67986E1	1.71073E-8	2.5147E-3	2.5147E-3	6.30182E-3	2.32873E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16369E-1	-7.9813E-1	-9.13141E0	-9.14195E0	5.6982E-3	9.32217E-2	2.72997E1	-3.2653E1	-3.26164E1	2.68148E1	1.72364E-8	2.50989E-3	2.50989E-3	6.35059E-3	2.34105E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.1656E-1	-7.97915E-1	-9.13143E0	-9.14226E0	5.60284E-3	9.34124E-2	2.72961E1	-3.26536E1	-3.2638E1	2.6768E1	1.7207E-8	2.51632E-3	2.51632E-3	6.29128E-3	2.34505E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.16298E-1	-7.97939E-1	-9.13098E0	-9.14199E0	5.55515E-3	9.31978E-2	2.73249E1	-3.26951E1	-3.26224E1	2.68292E1	1.70096E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.33094E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16369E-1	-7.98297E-1	-9.13124E0	-9.14197E0	5.31673E-3	9.29594E-2	2.73336E1	-3.26704E1	-3.26351E1	2.67965E1	1.69949E-8	2.51662E-3	2.51662E-3	6.3514E-3	2.33094E-2
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.16274E-1	-7.98368E-1	-9.13122E0	-9.14257E0	5.43594E-3	9.30786E-2	2.73293E1	-3.26661E1	-3.26203E1	2.68633E1	1.70033E-8	2.52025E-3	2.52025E-3	6.31798E-3	2.33318E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09611E0	-8.16369E-1	-7.98345E-1	-9.13124E0	-9.14221E0	5.38826E-3	9.31978E-2	2.73003E1	-3.26675E1	-3.2626E1	2.67758E1	1.70165E-8	2.51271E-3	2.51271E-3	6.3131E-3	2.32433E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16441E-1	-7.98321E-1	-9.13134E0	-9.14218E0	5.19753E-3	9.28879E-2	2.72873E1	-3.26627E1	-3.25954E1	2.67637E1	1.70023E-8	2.52099E-3	2.52099E-3	6.31288E-3	2.33905E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16536E-1	-7.98392E-1	-9.131E0	-9.14207E0	5.14984E-3	9.30071E-2	2.7288E1	-3.26484E1	-3.26703E1	2.68271E1	1.70469E-8	2.52362E-3	2.52362E-3	6.31858E-3	2.3432E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16488E-1	-7.98345E-1	-9.13138E0	-9.14171E0	5.126E-3	9.28402E-2	2.72909E1	-3.26891E1	-3.26927E1	2.67864E1	1.70318E-8	2.51417E-3	2.51417E-3	6.32356E-3	2.33706E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.16536E-1	-7.97987E-1	-9.13103E0	-9.14183E0	5.29289E-3	9.32217E-2	2.73087E1	-3.26705E1	-3.26374E1	2.68118E1					
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.16822E-1	-7.97987E-1	-9.13124E0	-9.14199E0	4.8399E-3	9.30786E-2	2.73045E1	-3.26615E1	-3.26116E1	2.6768E1	1.70318E-8	2.52538E-3	2.52538E-3	6.31837E-3	2.32892E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16703E-1	-7.97963E-1	-9.13105E0	-9.14216E0	5.29289E-3	9.30309E-2	2.73279E1	-3.26524E1	-3.26386E1	2.67992E1	1.70168E-8	2.51359E-3	2.51359E-3	6.31858E-3	2.32255E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16774E-1	-7.98392E-1	-9.13115E0	-9.14228E0	5.31673E-3	9.32455E-2	2.73183E1	-3.26831E1	-3.26272E1	2.67944E1	1.70173E-8	2.51954E-3	2.51954E-3	6.32896E-3	2.34105E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.16679E-1	-7.98535E-1	-9.13129E0	-9.14209E0	5.17368E-3	9.3317E-2	2.72967E1	-3.26422E1	-3.2632E1	2.68046E1	1.70023E-8	2.52757E-3	2.52757E-3	6.31837E-3	2.34516E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09634E0	-8.16607E-1	-7.98416E-1	-9.13146E0	-9.14211E0	5.22137E-3	9.30548E-2	2.73021E1	-3.26627E1	-3.26266E1	2.67986E1	1.70096E-8	2.51771E-3	2.51771E-3	6.3074E-3	2.33094E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16345E-1	-7.98488E-1	-9.1311E0	-9.1423E0	5.45979E-3	9.30786E-2	2.73098E1	-3.2662E1	-3.26496E1	2.68112E1	1.70023E-8	2.52757E-3	2.52757E-3	6.32386E-3	2.32689E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.16345E-1	-7.98345E-1	-9.13122E0	-9.14218E0	5.43594E-3	9.31978E-2	2.73057E1	-3.26885E1	-3.26092E1	2.67986E1	1.69955E-8	2.52061E-3	2.52061E-3	6.31278E-3	2.33109E-2