[Scan]
initial_time=2016-02-17T18:01:16
final_time=2016-02-17T18:01:35
ip_count=19
run=1032
dataset=5
scan=133
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08832E-4
ql1_vset=
ql1_vmon=-8.15916E-1
ql1_imon=1.36432E-8
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=1.85003E-9
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=3.6453E-10
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=2.96605E-10
mult1=-1.00195E-8
mult2=-2.74677E-9
rf_tmon=-4.70414E-3
rf_agc=3.22945E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=1.62855E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68273E0
bslens_imon=2.53618E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20125E1
lens5a_imon=1.97802E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05213E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=3.00072E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.02263E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05012E1
cs_ea1_imon=2.4431E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35309E0
lens1_imon=2.57865E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6438E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04398E1
cs_ea2_imon=1.554E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8458E1
cs_ef1a_imon=2.99243E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.52612E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.29995E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15235E1
os_ea1_imon=2.2817E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6286E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26626E0
cs_ionrep_imon=1.24501E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93569E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01599E1
cs_anode1_imon=3.08758E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.48725E-8
tplens_vset=1.4E-1
tplens_vmon=1.65736E0
tplens_imon=-2.2456E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2613E1
iondef3_imon=1.49312E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26756E1
iondef2_imon=1.57594E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98402E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.0265E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28159E0
ionrepsh_imon=1.93201E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33345E1
lens5b_imon=2.16136E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74471E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.61607E0
os_ea2_imon=-5.99737E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06121E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71402E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06777E0
os_ef2alow_imon=-2.64833E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08836E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10865E1
os_restr2_imon=3.48726E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.31556E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02019E1
cs_anode2_imon=2.26119E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7311E1
iondef1_imon=1.08963E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67962E1
iondef4_imon=1.09242E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.03093E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82881E-1
olens1_imon=8.90286E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10912E0
cs_ionaccel_imon=-1.87348E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56111E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=1.71692E-1
window_imon=-1.05538E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.3921E-4
mask2_vset=0.0E0
mask2_vmon=-1.86296E1
mask2_imon=-8.28332E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.53736E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.56049E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.19404E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51481E0
defgridb_imon=6.17115E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33286E1
os_fil1_imon=9.48529E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0626E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64577E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30893E1
cs_fil1_imon=1.00062E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62522E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67256E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.06597E-2
os_fil2_imon=-2.64194E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.78493E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68251E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05212E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22613E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.3291E-2
chamber_ion_pmon=1.69955E-8
chamber_cvt_pmon=2.52815E-3
foreline_cvt_pmon=2.52815E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.49391E-1
res40_imon=-2.87538E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.16584E-1	-7.98059E-1	-9.13136E0	-9.14173E0	5.24521E-3	9.32455E-2	2.73303E1	-3.26717E1	-3.2644E1	2.67944E1	1.70463E-8	2.52169E-3	2.52169E-3	6.30202E-3	2.33308E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.16631E-1	-7.98178E-1	-9.13103E0	-9.14199E0	5.65052E-3	9.34124E-2	2.72941E1	-3.26731E1	-3.26303E1	2.68178E1	1.701E-8	2.51847E-3	2.51847E-3	6.32896E-3	2.33507E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.1656E-1	-7.98249E-1	-9.13107E0	-9.14199E0	5.55515E-3	9.30786E-2	2.73122E1	-3.26614E1	-3.26301E1	2.68184E1	1.70243E-8	2.52027E-3	2.52027E-3	6.32418E-3	2.33699E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.16536E-1	-7.98273E-1	-9.13131E0	-9.14204E0	4.91142E-3	9.31501E-2	2.73051E1	-3.26526E1	-3.26242E1	2.67746E1	1.70064E-8	2.51632E-3	2.51632E-3	6.32626E-3	2.34905E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16655E-1	-7.98249E-1	-9.13136E0	-9.14187E0	5.43594E-3	9.31025E-2	2.72943E1	-3.26422E1	-3.26386E1	2.68004E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.16512E-1	-7.97796E-1	-9.13103E0	-9.14173E0	5.19753E-3	9.28164E-2	2.73318E1	-3.26656E1	-3.2658E1	2.68249E1	1.7013E-8	2.51602E-3	2.51602E-3	6.3214E-3	2.33388E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.16488E-1	-7.9813E-1	-9.13105E0	-9.14187E0	5.22137E-3	9.35793E-2	2.72991E1	-3.26573E1	-3.26014E1	2.68064E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.16393E-1	-7.98082E-1	-9.13115E0	-9.14192E0	5.36442E-3	9.34601E-2	2.73198E1	-3.26968E1	-3.26254E1	2.67976E1	1.70318E-8	2.51552E-3	2.51552E-3	6.30192E-3	2.34924E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09611E0	-8.16345E-1	-7.98154E-1	-9.13134E0	-9.14211E0	5.126E-3	9.31978E-2	2.72935E1	-3.26468E1	-3.26315E1	2.68307E1	1.70318E-8	2.52707E-3	2.52707E-3	6.30202E-3	2.33905E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.16393E-1	-7.98082E-1	-9.13146E0	-9.14195E0	5.4121E-3	9.32455E-2	2.72915E1	-3.2662E1	-3.26496E1	2.67671E1	1.70092E-8	2.52139E-3	2.52139E-3	6.29624E-3	2.34735E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16512E-1	-7.98225E-1	-9.13165E0	-9.14197E0	5.45979E-3	9.32455E-2	2.73269E1	-3.26697E1	-3.26331E1	2.68214E1	1.70173E-8	2.52061E-3	2.52061E-3	6.32896E-3	2.34305E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.16512E-1	-7.98154E-1	-9.13126E0	-9.14195E0	5.43594E-3	9.3317E-2	2.73622E1	-3.26795E1	-3.25876E1	2.67805E1	1.70028E-8	2.52061E-3	2.52061E-3	6.31817E-3	2.33109E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.16011E-1	-7.98297E-1	-9.13126E0	-9.14183E0	5.31673E-3	9.30548E-2	2.73428E1	-3.26815E1	-3.26526E1	2.68064E1	1.70244E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.33094E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16321E-1	-7.98178E-1	-9.13131E0	-9.14195E0	5.38826E-3	9.3317E-2	2.73291E1	-3.26843E1	-3.2644E1	2.67656E1	1.69955E-8	2.5131E-3	2.5131E-3	6.31817E-3	2.3291E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16059E-1	-7.98297E-1	-9.13131E0	-9.14164E0	5.36442E-3	9.32693E-2	2.72997E1	-3.26849E1	-3.26693E1	2.67559E1	1.70096E-8	2.52099E-3	2.52099E-3	6.30192E-3	2.32487E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.15964E-1	-7.97963E-1	-9.13112E0	-9.14159E0	5.38826E-3	9.31978E-2	2.72921E1	-3.26514E1	-3.2629E1	2.68556E1	1.69801E-8	2.52538E-3	2.52538E-3	6.31837E-3	2.33905E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.15964E-1	-7.98273E-1	-9.13134E0	-9.14199E0	5.4121E-3	9.33886E-2	2.73277E1	-3.26842E1	-3.2615E1	2.67932E1	1.70827E-8	2.52169E-3	2.52169E-3	6.31817E-3	2.32117E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.16107E-1	-7.98225E-1	-9.13155E0	-9.14207E0	5.38826E-3	9.3317E-2	2.73252E1	-3.26944E1	-3.26236E1	2.68401E1	1.70318E-8	2.5225E-3	2.5225E-3	6.33538E-3	2.33285E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16131E-1	-7.98082E-1	-9.13129E0	-9.14197E0	5.45979E-3	9.34124E-2	2.73116E1	-3.26767E1	-3.26425E1	2.68484E1	1.70028E-8	2.51632E-3	2.51632E-3	6.31817E-3	2.3291E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.15916E-1	-7.97939E-1	-9.1316E0	-9.14214E0	5.45979E-3	9.32455E-2	2.7311E1	-3.26756E1	-3.2613E1	2.67962E1	1.69955E-8	2.52815E-3	2.52815E-3	6.30202E-3	2.3291E-2