[Scan]
initial_time=2016-02-17T18:01:43
final_time=2016-02-17T18:02:02
ip_count=19
run=1032
dataset=5
scan=134
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09665E0
qbias_imon=-1.08765E-4
ql1_vset=
ql1_vmon=-8.16536E-1
ql1_imon=1.36336E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=1.904E-9
ql3_vset=
ql3_vmon=-9.13084E0
ql3_imon=3.49891E-10
ql4_vset=
ql4_vmon=-9.14156E0
ql4_imon=2.91431E-10
mult1=-1.0824E-8
mult2=-2.82241E-9
rf_tmon=-5.30551E-3
rf_agc=3.26126E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=1.63887E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63069E0
bslens_imon=2.50531E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=1.97154E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05136E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=3.01009E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02204E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05138E1
cs_ea1_imon=2.44919E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34913E0
lens1_imon=2.73963E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64656E1
os_ef1alow_imon=2.96036E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04117E1
cs_ea2_imon=1.55624E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=3.00937E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.52822E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.29815E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15071E1
os_ea1_imon=2.27688E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64092E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24068E0
cs_ionrep_imon=1.23216E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91885E2
cs_nozzle_imon=1.93362E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01605E1
cs_anode1_imon=3.1092E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=3.48894E-8
tplens_vset=1.4E-1
tplens_vmon=1.59397E0
tplens_imon=-2.99346E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26518E1
iondef3_imon=1.50001E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26687E1
iondef2_imon=1.58653E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02986E2
lens6_imon=2.98497E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=4.05546E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2569E0
ionrepsh_imon=1.92179E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33718E1
lens5b_imon=2.1799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.11713E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57654E0
os_ea2_imon=-6.38212E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06142E2
lens4b_imon=2.00558E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71011E1
cs_ef2a_imon=3.18128E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06657E0
os_ef2alow_imon=-2.6159E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.3947E-1
os_ef2bup_imon=-5.2504E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10895E1
os_restr2_imon=3.47176E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.31947E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.25686E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73219E1
iondef1_imon=1.08688E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68172E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.03066E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=8.88581E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11332E0
cs_ionaccel_imon=-1.96719E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47374E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56123E1
einzel_imon=7.5617E-6
window_vset=0.0E0
window_vmon=1.82504E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82608E2
mask1_imon=2.39048E-4
mask2_vset=0.0E0
mask2_vmon=-1.86458E1
mask2_imon=-8.24728E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.45851E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.52844E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.41165E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42262E0
defgridb_imon=6.21841E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33289E1
os_fil1_imon=9.45514E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06843E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64724E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30972E1
cs_fil1_imon=1.00195E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6287E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67041E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.81576E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58317E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.56986E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=3.43344E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22564E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.33706E-2
chamber_ion_pmon=1.7185E-8
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.00137E-1
res40_imon=-2.74564E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16727E-1	-7.98059E-1	-9.13162E0	-9.1419E0	5.65052E-3	9.32217E-2	2.73129E1	-3.26633E1	-3.26488E1	2.67794E1	1.72552E-8	2.5199E-3	2.5199E-3	6.29645E-3	2.3472E-2
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.16393E-1	-7.98202E-1	-9.13141E0	-9.14209E0	5.62668E-3	9.33647E-2	2.73045E1	-3.26741E1	-3.2638E1	2.67938E1	1.72028E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.34312E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.16417E-1	-7.98225E-1	-9.13117E0	-9.14216E0	5.4121E-3	9.31263E-2	2.73246E1	-3.26596E1	-3.26455E1	2.67984E1	1.70096E-8	2.5199E-3	2.5199E-3	6.3074E-3	2.33905E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.16417E-1	-7.98035E-1	-9.13122E0	-9.14185E0	5.55515E-3	9.35316E-2	2.73099E1	-3.26789E1	-3.26422E1	2.6843E1	1.70173E-8	2.51525E-3	2.51525E-3	6.3074E-3	2.33109E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16154E-1	-7.98082E-1	-9.13162E0	-9.14223E0	5.38826E-3	9.3174E-2	2.72865E1	-3.26939E1	-3.26308E1	2.68244E1	1.70244E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.32892E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.16131E-1	-7.98059E-1	-9.13162E0	-9.14235E0	5.31673E-3	9.36508E-2	2.73003E1	-3.26579E1	-3.262E1	2.67866E1	1.69949E-8	2.51552E-3	2.51552E-3	6.34037E-3	2.33499E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16035E-1	-7.98178E-1	-9.13131E0	-9.14216E0	5.48363E-3	9.31978E-2	2.73184E1	-3.26573E1	-3.26382E1	2.68094E1	1.69875E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.33094E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16226E-1	-7.98059E-1	-9.1311E0	-9.14173E0	5.17368E-3	9.34839E-2	2.73039E1	-3.26878E1	-3.26266E1	2.68176E1	1.70176E-8	2.51393E-3	2.51393E-3	6.2863E-3	2.33514E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16393E-1	-7.98249E-1	-9.13079E0	-9.1419E0	5.22137E-3	9.30786E-2	2.73039E1	-3.26747E1	-3.25942E1	2.67926E1	1.69867E-8	2.52139E-3	2.52139E-3	6.29624E-3	2.33079E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.16059E-1	-7.98273E-1	-9.13124E0	-9.14178E0	5.48363E-3	9.34362E-2	2.73574E1	-3.26579E1	-3.262E1	2.68046E1	1.70911E-8	2.51225E-3	2.51225E-3	6.32386E-3	2.32689E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09627E0	-8.16369E-1	-7.98178E-1	-9.13124E0	-9.14197E0	6.00815E-3	9.36508E-2	2.72991E1	-3.26645E1	-3.26122E1	2.67949E1	1.71431E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.33297E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0965E0	-8.15988E-1	-7.98368E-1	-9.13112E0	-9.14197E0	5.43594E-3	9.34362E-2	2.73092E1	-3.26585E1	-3.25776E1	2.68148E1	1.71953E-8	2.52099E-3	2.52099E-3	6.32386E-3	2.32487E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.16107E-1	-7.98368E-1	-9.13124E0	-9.14214E0	5.98431E-3	9.36508E-2	2.73261E1	-3.26735E1	-3.26008E1	2.67866E1	1.70391E-8	2.52815E-3	2.52815E-3	6.32896E-3	2.31721E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.1625E-1	-7.98345E-1	-9.13117E0	-9.1423E0	5.43594E-3	9.3317E-2	2.73201E1	-3.26308E1	-3.26813E1	2.68004E1	1.7017E-8	2.51225E-3	2.51225E-3	6.31288E-3	2.33905E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09627E0	-8.16679E-1	-7.97987E-1	-9.13122E0	-9.14235E0	5.45979E-3	9.32932E-2	2.73369E1	-3.26699E1	-3.26266E1	2.67902E1	1.71879E-8	2.5188E-3	2.5188E-3	6.32936E-3	2.32285E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09665E0	-8.16536E-1	-7.98321E-1	-9.13153E0	-9.1424E0	5.50747E-3	9.34124E-2	2.72642E1	-3.26398E1	-3.26711E1	2.67944E1	1.72177E-8	2.51662E-3	2.51662E-3	6.32936E-3	2.33297E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09673E0	-8.16393E-1	-7.98178E-1	-9.13122E0	-9.14216E0	5.60284E-3	9.36985E-2	2.73177E1	-3.26657E1	-3.26206E1	2.68082E1	1.701E-8	2.51739E-3	2.51739E-3	6.31278E-3	2.33109E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0968E0	-8.16417E-1	-7.98154E-1	-9.13105E0	-9.14202E0	5.38826E-3	9.36031E-2	2.73163E1	-3.26868E1	-3.26083E1	2.68034E1	1.71073E-8	2.52027E-3	2.52027E-3	6.3074E-3	2.32461E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0965E0	-8.16631E-1	-7.98154E-1	-9.13088E0	-9.14204E0	5.29289E-3	9.34124E-2	2.73175E1	-3.2685E1	-3.25936E1	2.68117E1	1.70827E-8	2.51739E-3	2.51739E-3	6.32896E-3	2.33109E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09665E0	-8.16536E-1	-7.98249E-1	-9.13084E0	-9.14156E0	5.00679E-3	9.35316E-2	2.73219E1	-3.26687E1	-3.26518E1	2.68172E1	1.7185E-8	2.51417E-3	2.51417E-3	6.33977E-3	2.33706E-2