[Scan]
initial_time=2016-02-17T18:03:29
final_time=2016-02-17T18:03:49
ip_count=19
run=1032
dataset=5
scan=138
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08856E-4
ql1_vset=
ql1_vmon=-8.16154E-1
ql1_imon=1.35884E-8
ql2_vset=
ql2_vmon=-7.98368E-1
ql2_imon=1.94401E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=3.0874E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=2.70867E-10
mult1=-9.57029E-9
mult2=-2.67426E-9
rf_tmon=-5.16427E-3
rf_agc=3.29375E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=1.62573E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68096E0
bslens_imon=2.55388E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19872E1
lens5a_imon=1.98156E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.05001E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5363E1
cs_ef1b_imon=3.01109E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04696E2
lens23_imon=1.02326E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=2.43602E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38259E0
lens1_imon=2.86181E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64676E1
os_ef1alow_imon=2.97359E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.53311E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84338E1
cs_ef1a_imon=2.98385E-5
olens2_vset=9.7E-1
olens2_vmon=9.69577E-1
olens2_imon=1.52715E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11218E1
os_restr1_imon=4.29767E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15188E1
os_ea1_imon=2.28984E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63609E1
os_ef1bup_imon=3.09318E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25033E0
cs_ionrep_imon=1.21988E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91847E2
cs_nozzle_imon=1.93346E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01703E1
cs_anode1_imon=3.10168E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.48642E-8
tplens_vset=1.4E-1
tplens_vmon=1.6202E0
tplens_imon=-3.73215E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26319E1
iondef3_imon=1.48852E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26655E1
iondef2_imon=1.60638E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.9842E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=4.05897E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28631E0
ionrepsh_imon=1.91431E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33669E1
lens5b_imon=2.18224E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74767E1
cs_ef2b_imon=3.12149E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58421E0
os_ea2_imon=-6.95301E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00566E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7019E1
cs_ef2a_imon=3.17245E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05544E0
os_ef2alow_imon=-2.65148E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.35364E-1
os_ef2bup_imon=-5.38316E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=3.47074E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.30353E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01774E1
cs_anode2_imon=2.2613E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73092E1
iondef1_imon=1.09812E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68175E1
iondef4_imon=1.07557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.0258E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82976E-1
olens1_imon=8.90667E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11835E0
cs_ionaccel_imon=-1.87302E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56305E1
einzel_imon=7.5923E-6
window_vset=0.0E0
window_vmon=1.75351E-1
window_imon=-1.10872E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.3925E-4
mask2_vset=0.0E0
mask2_vmon=-1.86161E1
mask2_imon=-7.15954E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.36039E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93751E3
defgrida_imon=6.3552E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.41348E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26086E0
defgridb_imon=6.17469E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33287E1
os_fil1_imon=9.48441E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07447E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64416E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30872E1
cs_fil1_imon=9.97826E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62118E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67076E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.82537E-2
os_fil2_imon=-2.60863E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80262E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69517E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3658E-1
cs_fil2_imon=-2.50248E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.53397E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22511E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.33109E-2
chamber_ion_pmon=1.70028E-8
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.99056E-1
res40_imon=-2.62317E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09673E0	-8.16107E-1	-7.97939E-1	-9.13141E0	-9.14199E0	5.34058E-3	9.34362E-2	2.73305E1	-3.26384E1	-3.26478E1	2.67881E1	1.6982E-8	2.51919E-3	2.51919E-3	6.32858E-3	2.32733E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09634E0	-8.15988E-1	-7.98035E-1	-9.13129E0	-9.14204E0	5.126E-3	9.32217E-2	2.72745E1	-3.26872E1	-3.26248E1	2.68113E1	1.69949E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.32892E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09665E0	-8.15964E-1	-7.97939E-1	-9.13131E0	-9.14209E0	5.14984E-3	9.32455E-2	2.73086E1	-3.26378E1	-3.26354E1	2.67833E1	1.70168E-8	2.5147E-3	2.5147E-3	6.3074E-3	2.33285E-2
4.0E0	0.0E0	1.0E0	6.55E2	3.98E2	-2.09734E0	-8.16131E-1	-7.97868E-1	-9.13136E0	-9.14202E0	5.36442E-3	9.33886E-2	2.72974E1	-3.26738E1	-3.26372E1	2.6804E1	1.70247E-8	2.51709E-3	2.51709E-3	6.30212E-3	2.32928E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09642E0	-8.16011E-1	-7.97796E-1	-9.1315E0	-9.14214E0	5.17368E-3	9.35078E-2	2.73273E1	-3.26813E1	-3.26092E1	2.68046E1	1.70281E-8	2.52647E-3	2.52647E-3	6.31014E-3	2.33094E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.1594E-1	-7.98059E-1	-9.13146E0	-9.14192E0	5.24521E-3	9.33409E-2	2.73303E1	-3.26597E1	-3.26597E1	2.68035E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.16393E-1	-7.98106E-1	-9.13134E0	-9.14202E0	5.03063E-3	9.36508E-2	2.72666E1	-3.26651E1	-3.25978E1	2.68194E1	1.70536E-8	2.52276E-3	2.52276E-3	6.3074E-3	2.33109E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16178E-1	-7.98154E-1	-9.13134E0	-9.14209E0	5.05447E-3	9.34362E-2	2.73045E1	-3.26807E1	-3.2617E1	2.68107E1	1.72402E-8	2.5199E-3	2.5199E-3	6.30192E-3	2.32084E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16202E-1	-7.97963E-1	-9.13117E0	-9.1419E0	5.14984E-3	9.36031E-2	2.7321E1	-3.2688E1	-3.2616E1	2.67989E1	1.72927E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.33499E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16464E-1	-7.98059E-1	-9.13146E0	-9.14176E0	5.29289E-3	9.34362E-2	2.73129E1	-3.26753E1	-3.26338E1	2.67806E1	1.71208E-8	2.51443E-3	2.51443E-3	6.30192E-3	2.32892E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16298E-1	-7.98106E-1	-9.13124E0	-9.14192E0	5.26905E-3	9.31501E-2	2.73357E1	-3.27143E1	-3.26128E1	2.68202E1	1.71953E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.33094E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16154E-1	-7.98154E-1	-9.13143E0	-9.14211E0	4.95911E-3	9.33886E-2	2.7367E1	-3.27035E1	-3.26104E1	2.68022E1	1.70837E-8	2.52428E-3	2.52428E-3	6.30192E-3	2.33297E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.15964E-1	-7.98273E-1	-9.13143E0	-9.14185E0	5.17368E-3	9.33409E-2	2.73069E1	-3.26963E1	-3.26098E1	2.6813E1	1.71119E-8	2.51525E-3	2.51525E-3	6.35601E-3	2.32117E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16274E-1	-7.98035E-1	-9.13129E0	-9.14168E0	5.24521E-3	9.3627E-2	2.72805E1	-3.26561E1	-3.26458E1	2.67788E1	1.71832E-8	2.52585E-3	2.52585E-3	6.30182E-3	2.33905E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09595E0	-8.16393E-1	-7.97915E-1	-9.13117E0	-9.14197E0	5.24521E-3	9.377E-2	2.7321E1	-3.26691E1	-3.26172E1	2.68148E1	1.72879E-8	2.51632E-3	2.51632E-3	6.32896E-3	2.31919E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16488E-1	-7.97868E-1	-9.13146E0	-9.14197E0	5.26905E-3	9.34124E-2	2.734E1	-3.26701E1	-3.26621E1	2.6789E1	1.72852E-8	2.51662E-3	2.51662E-3	6.33486E-3	2.32689E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.16441E-1	-7.9813E-1	-9.13119E0	-9.1419E0	5.19753E-3	9.35555E-2	2.73228E1	-3.2662E1	-3.26337E1	2.68064E1	1.70985E-8	2.52318E-3	2.52318E-3	6.32386E-3	2.32285E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.16226E-1	-7.98273E-1	-9.13105E0	-9.1419E0	5.36442E-3	9.35078E-2	2.72968E1	-3.26685E1	-3.26413E1	2.68094E1	1.69811E-8	2.52815E-3	2.52815E-3	6.32356E-3	2.32711E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.16083E-1	-7.98059E-1	-9.13141E0	-9.14204E0	5.29289E-3	9.34362E-2	2.73249E1	-3.26687E1	-3.26464E1	2.68022E1	1.70023E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.33094E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.16154E-1	-7.98368E-1	-9.13129E0	-9.1419E0	5.38826E-3	9.34601E-2	2.73092E1	-3.26655E1	-3.26319E1	2.68175E1	1.70028E-8	2.51954E-3	2.51954E-3	6.32356E-3	2.33109E-2