[Scan]
initial_time=2016-02-17T18:03:56
final_time=2016-02-17T18:04:15
ip_count=19
run=1032
dataset=5
scan=139
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.16107E-1
ql1_imon=1.3588E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=1.95471E-9
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=3.34942E-10
ql4_vset=
ql4_vmon=-9.14161E0
ql4_imon=2.82478E-10
mult1=-9.34305E-9
mult2=-2.73857E-9
rf_tmon=-3.93563E-3
rf_agc=3.52082E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.79357E-3
ql5_imon=1.58033E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66267E0
bslens_imon=2.59635E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19754E1
lens5a_imon=1.99253E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05054E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53279E1
cs_ef1b_imon=3.01971E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02234E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05053E1
cs_ea1_imon=2.45194E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38318E0
lens1_imon=2.63174E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64915E1
os_ef1alow_imon=2.97626E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04091E1
cs_ea2_imon=1.54869E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84354E1
cs_ef1a_imon=3.00407E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.52781E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11772E1
os_restr1_imon=4.28644E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.28028E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6243E1
os_ef1bup_imon=3.07183E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28218E0
cs_ionrep_imon=1.23828E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93487E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02348E1
cs_anode1_imon=3.09547E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.48832E-8
tplens_vset=1.4E-1
tplens_vmon=1.59247E0
tplens_imon=-3.27202E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26368E1
iondef3_imon=1.49878E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26627E1
iondef2_imon=1.58408E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98459E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.02937E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28631E0
ionrepsh_imon=1.91148E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33675E1
lens5b_imon=2.18189E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74217E1
cs_ef2b_imon=3.11458E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.59719E0
os_ea2_imon=-7.05919E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00478E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71165E1
cs_ef2a_imon=3.2032E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04066E0
os_ef2alow_imon=-2.8387E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.52256E-1
os_ef2bup_imon=-5.34783E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11303E1
os_restr2_imon=3.48469E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.30601E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01236E1
cs_anode2_imon=2.24472E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.08892E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68016E1
iondef4_imon=1.06071E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.02466E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=8.88893E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12261E0
cs_ionaccel_imon=-1.61889E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.46858E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55953E1
einzel_imon=7.80947E-6
window_vset=0.0E0
window_vmon=1.42968E-1
window_imon=-1.18448E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82597E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.86593E1
mask2_imon=-7.88302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.47365E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93755E3
defgrida_imon=6.70914E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.02769E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45576E0
defgridb_imon=6.09328E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33292E1
os_fil1_imon=9.48936E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06756E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64653E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30862E1
cs_fil1_imon=9.99264E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61422E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66866E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.90135E-2
os_fil2_imon=-2.6576E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01082E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.63822E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36019E-1
cs_fil2_imon=-3.12676E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.46612E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22576E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.32689E-2
chamber_ion_pmon=1.70023E-8
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40038E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.45508E-1
res40_imon=-2.65104E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.16059E-1	-7.97725E-1	-9.13129E0	-9.14204E0	4.86374E-3	9.3317E-2	2.73092E1	-3.26331E1	-3.26431E1	2.67674E1	1.71119E-8	2.51525E-3	2.51525E-3	6.31817E-3	2.34305E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.16226E-1	-7.9782E-1	-9.13131E0	-9.14176E0	5.07832E-3	9.32932E-2	2.72971E1	-3.26603E1	-3.2607E1	2.68169E1	1.70096E-8	2.51552E-3	2.51552E-3	6.30192E-3	2.33094E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.1625E-1	-7.97701E-1	-9.13162E0	-9.14204E0	5.36442E-3	9.36031E-2	2.73051E1	-3.26325E1	-3.26655E1	2.67902E1	1.70096E-8	2.51826E-3	2.51826E-3	6.31288E-3	2.33094E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.15916E-1	-7.97892E-1	-9.13124E0	-9.14202E0	5.38826E-3	9.34124E-2	2.73117E1	-3.26765E1	-3.2629E1	2.67938E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.15845E-1	-7.97892E-1	-9.13143E0	-9.14183E0	5.34058E-3	9.31501E-2	2.73165E1	-3.26591E1	-3.26368E1	2.67902E1	1.70028E-8	2.51847E-3	2.51847E-3	6.29128E-3	2.32513E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.15964E-1	-7.98082E-1	-9.13148E0	-9.14166E0	5.50747E-3	9.377E-2	2.73175E1	-3.26537E1	-3.26154E1	2.67577E1	1.70244E-8	2.51225E-3	2.51225E-3	6.31837E-3	2.33297E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16154E-1	-7.98082E-1	-9.13124E0	-9.1418E0	5.43594E-3	9.31501E-2	2.72818E1	-3.26719E1	-3.2634E1	2.68112E1	1.70466E-8	2.52099E-3	2.52099E-3	6.31288E-3	2.33499E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.1625E-1	-7.98035E-1	-9.13126E0	-9.14202E0	5.38826E-3	9.33409E-2	2.73033E1	-3.26826E1	-3.26142E1	2.67992E1	1.71655E-8	2.51334E-3	2.51334E-3	6.32936E-3	2.32689E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16298E-1	-7.98178E-1	-9.13131E0	-9.14178E0	5.29289E-3	9.33647E-2	2.73098E1	-3.26655E1	-3.26124E1	2.68169E1	1.70985E-8	2.52318E-3	2.52318E-3	6.34037E-3	2.32285E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.16011E-1	-7.98106E-1	-9.13129E0	-9.1418E0	5.50747E-3	9.30309E-2	2.72979E1	-3.26579E1	-3.26308E1	2.67998E1	1.70246E-8	2.52276E-3	2.52276E-3	6.32896E-3	2.33905E-2
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16274E-1	-7.97915E-1	-9.13124E0	-9.14187E0	5.76973E-3	9.30309E-2	2.73261E1	-3.26921E1	-3.26194E1	2.67926E1	1.69949E-8	2.52318E-3	2.52318E-3	6.31288E-3	2.32487E-2
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.16154E-1	-7.98154E-1	-9.13115E0	-9.14183E0	5.74589E-3	9.31501E-2	2.72871E1	-3.26777E1	-3.26819E1	2.6828E1	1.70023E-8	2.52209E-3	2.52209E-3	6.30192E-3	2.32285E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.16441E-1	-7.98178E-1	-9.13117E0	-9.14178E0	5.65052E-3	9.3317E-2	2.73491E1	-3.26961E1	-3.25941E1	2.6781E1	1.70028E-8	2.52061E-3	2.52061E-3	6.31817E-3	2.33308E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.16274E-1	-7.98035E-1	-9.13107E0	-9.14178E0	5.36442E-3	9.32217E-2	2.72976E1	-3.26741E1	-3.26422E1	2.67982E1	1.70247E-8	2.51919E-3	2.51919E-3	6.31269E-3	2.32733E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.16226E-1	-7.97963E-1	-9.13126E0	-9.14171E0	5.29289E-3	9.33409E-2	2.7302E1	-3.2697E1	-3.26315E1	2.68033E1	1.71103E-8	2.51874E-3	2.51874E-3	6.3074E-3	2.32618E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.16298E-1	-7.98082E-1	-9.13126E0	-9.14178E0	5.55515E-3	9.31978E-2	2.73267E1	-3.26567E1	-3.26554E1	2.67819E1	1.7017E-8	2.52318E-3	2.52318E-3	6.30192E-3	2.33094E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.16298E-1	-7.98178E-1	-9.13162E0	-9.1418E0	5.65052E-3	9.35555E-2	2.73169E1	-3.2688E1	-3.26431E1	2.67943E1	1.70837E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.32689E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.16226E-1	-7.98178E-1	-9.13148E0	-9.14168E0	5.67436E-3	9.33409E-2	2.7308E1	-3.26343E1	-3.26443E1	2.67872E1	1.70096E-8	2.52538E-3	2.52538E-3	6.32936E-3	2.32892E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.16488E-1	-7.98345E-1	-9.13169E0	-9.14164E0	5.55515E-3	9.33409E-2	2.73231E1	-3.26975E1	-3.26314E1	2.68112E1	1.69955E-8	2.51739E-3	2.51739E-3	6.32356E-3	2.33308E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.16107E-1	-7.98464E-1	-9.13136E0	-9.14161E0	5.79357E-3	9.34124E-2	2.73057E1	-3.26627E1	-3.26368E1	2.68016E1	1.70023E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.32689E-2