[Scan]
initial_time=2016-02-17T18:04:22
final_time=2016-02-17T18:04:42
ip_count=19
run=1032
dataset=5
scan=140
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08801E-4
ql1_vset=
ql1_vmon=-8.16274E-1
ql1_imon=1.36437E-8
ql2_vset=
ql2_vmon=-7.97749E-1
ql2_imon=1.90547E-9
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=3.45492E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=3.14212E-10
mult1=-9.46345E-9
mult2=-2.62679E-9
rf_tmon=-3.08246E-3
rf_agc=3.39945E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=1.61284E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64331E0
bslens_imon=2.66753E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19989E1
lens5a_imon=1.99172E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.04985E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5365E1
cs_ef1b_imon=2.99712E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02146E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04447E1
cs_ea1_imon=2.44162E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37797E0
lens1_imon=2.76847E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64707E1
os_ef1alow_imon=2.97731E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03672E1
cs_ea2_imon=1.53462E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=2.9853E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.52748E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11239E1
os_restr1_imon=4.30277E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15456E1
os_ea1_imon=2.283E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63861E1
os_ef1bup_imon=3.08678E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24429E0
cs_ionrep_imon=1.24261E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.93539E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01867E1
cs_anode1_imon=3.08678E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=3.49477E-8
tplens_vset=1.4E-1
tplens_vmon=1.59217E0
tplens_imon=-3.17371E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26308E1
iondef3_imon=1.51118E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27005E1
iondef2_imon=1.58941E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98436E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=4.02256E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23467E0
ionrepsh_imon=1.93296E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33862E1
lens5b_imon=2.15791E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74472E1
cs_ef2b_imon=3.11145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.59036E0
os_ea2_imon=-5.12038E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0618E2
lens4b_imon=2.00543E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.18165E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08526E0
os_ef2alow_imon=-2.72054E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16345E-1
os_ef2bup_imon=-5.43819E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10822E1
os_restr2_imon=3.47531E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.28775E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0174E1
cs_anode2_imon=2.25411E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73087E1
iondef1_imon=1.09301E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.02813E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=8.904E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12203E0
cs_ionaccel_imon=-1.93514E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.4716E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56266E1
einzel_imon=7.58358E-6
window_vset=0.0E0
window_vmon=1.71928E-1
window_imon=-1.10108E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.39147E-4
mask2_vset=0.0E0
mask2_vmon=-1.86257E1
mask2_imon=-7.57025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.62074E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.52123E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.48375E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44969E0
defgridb_imon=6.07421E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33269E1
os_fil1_imon=9.47517E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07138E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64609E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30825E1
cs_fil1_imon=9.98528E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61995E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66786E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.82866E-2
os_fil2_imon=-2.64602E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88919E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61024E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33273E-1
cs_fil2_imon=-2.17686E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.74038E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22415E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.33094E-2
chamber_ion_pmon=1.70244E-8
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.55152E-1
res40_imon=-2.66146E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.15988E-1	-7.97963E-1	-9.13157E0	-9.1419E0	5.4121E-3	9.31025E-2	2.7288E1	-3.2662E1	-3.26396E1	2.6813E1	1.70682E-8	2.51417E-3	2.51417E-3	6.28056E-3	2.33109E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.16059E-1	-7.97987E-1	-9.1316E0	-9.1418E0	5.67436E-3	9.32455E-2	2.73057E1	-3.26725E1	-3.26211E1	2.68207E1	1.70244E-8	2.52099E-3	2.52099E-3	6.3074E-3	2.33094E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.15964E-1	-7.9813E-1	-9.13191E0	-9.1419E0	5.81741E-3	9.35078E-2	2.7301E1	-3.26666E1	-3.26486E1	2.67619E1	1.70023E-8	2.52099E-3	2.52099E-3	6.34588E-3	2.31882E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.1625E-1	-7.97796E-1	-9.13165E0	-9.14195E0	5.96046E-3	9.36985E-2	2.73267E1	-3.26536E1	-3.26116E1	2.6819E1	1.69883E-8	2.51954E-3	2.51954E-3	6.29665E-3	2.33308E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.16131E-1	-7.98011E-1	-9.13129E0	-9.14161E0	5.72205E-3	9.30786E-2	2.73345E1	-3.26759E1	-3.26567E1	2.68154E1	1.70096E-8	2.51552E-3	2.51552E-3	6.33486E-3	2.32892E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.16321E-1	-7.98464E-1	-9.13138E0	-9.1418E0	5.79357E-3	9.32693E-2	2.73273E1	-3.26302E1	-3.26392E1	2.68221E1	1.69883E-8	2.51954E-3	2.51954E-3	6.34518E-3	2.33507E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16178E-1	-7.98059E-1	-9.13129E0	-9.14183E0	5.57899E-3	9.33409E-2	2.73057E1	-3.26434E1	-3.26386E1	2.67728E1	1.69875E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.32892E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.16131E-1	-7.98345E-1	-9.13126E0	-9.1419E0	5.50747E-3	9.35555E-2	2.72957E1	-3.26767E1	-3.26077E1	2.6777E1	1.70096E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.32487E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.15845E-1	-7.98154E-1	-9.13126E0	-9.1418E0	5.60284E-3	9.35555E-2	2.73051E1	-3.2647E1	-3.2608E1	2.6846E1	1.7185E-8	2.51739E-3	2.51739E-3	6.31817E-3	2.32711E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16202E-1	-7.9782E-1	-9.1311E0	-9.14156E0	5.26905E-3	9.36747E-2	2.72937E1	-3.26615E1	-3.26518E1	2.67728E1	1.71908E-8	2.5225E-3	2.5225E-3	6.31299E-3	2.32873E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.16011E-1	-7.97677E-1	-9.13081E0	-9.14176E0	5.34058E-3	9.36508E-2	2.73169E1	-3.26537E1	-3.26042E1	2.68274E1	1.70463E-8	2.52169E-3	2.52169E-3	6.31278E-3	2.32315E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.1625E-1	-7.97868E-1	-9.13112E0	-9.14156E0	5.19753E-3	9.35793E-2	2.73448E1	-3.27095E1	-3.25834E1	2.68118E1	1.71134E-8	2.52209E-3	2.52209E-3	6.30192E-3	2.33094E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.1625E-1	-7.97844E-1	-9.13131E0	-9.14197E0	5.45979E-3	9.36031E-2	2.73201E1	-3.26639E1	-3.26494E1	2.6801E1	1.71431E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.33297E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.15964E-1	-7.97963E-1	-9.13134E0	-9.14183E0	5.26905E-3	9.32217E-2	2.72919E1	-3.26609E1	-3.26314E1	2.67864E1	1.72177E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.33905E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.16059E-1	-7.97939E-1	-9.13091E0	-9.14168E0	5.34058E-3	9.3627E-2	2.73004E1	-3.26779E1	-3.26272E1	2.68229E1	1.70754E-8	2.51739E-3	2.51739E-3	6.31278E-3	2.31721E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.16154E-1	-7.97749E-1	-9.13093E0	-9.14133E0	5.07832E-3	9.37223E-2	2.73231E1	-3.2653E1	-3.26002E1	2.67848E1	1.69875E-8	2.51662E-3	2.51662E-3	6.34588E-3	2.32892E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.16202E-1	-7.97772E-1	-9.13141E0	-9.14178E0	5.34058E-3	9.35555E-2	2.73069E1	-3.2688E1	-3.26148E1	2.68064E1	1.70244E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.32487E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.16226E-1	-7.97892E-1	-9.13172E0	-9.14171E0	5.17368E-3	9.36747E-2	2.73092E1	-3.26655E1	-3.26531E1	2.68094E1	1.70247E-8	2.51919E-3	2.51919E-3	6.3074E-3	2.32149E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16512E-1	-7.97987E-1	-9.13157E0	-9.14176E0	5.53131E-3	9.34839E-2	2.73016E1	-3.26673E1	-3.26284E1	2.68262E1	1.69955E-8	2.52061E-3	2.52061E-3	6.3074E-3	2.32513E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.16274E-1	-7.97749E-1	-9.13153E0	-9.14187E0	5.19753E-3	9.35555E-2	2.73087E1	-3.27005E1	-3.26308E1	2.68076E1	1.70244E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.33094E-2