[Scan]
initial_time=2016-02-17T18:04:49
final_time=2016-02-17T18:05:08
ip_count=19
run=1032
dataset=5
scan=141
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09642E0
qbias_imon=-1.08837E-4
ql1_vset=
ql1_vmon=-8.16202E-1
ql1_imon=1.35974E-8
ql2_vset=
ql2_vmon=-7.98202E-1
ql2_imon=1.93572E-9
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=3.39735E-10
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=2.9633E-10
mult1=-9.80059E-9
mult2=-2.85634E-9
rf_tmon=-4.48839E-3
rf_agc=3.2943E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=1.60705E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66798E0
bslens_imon=2.45831E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.98793E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05167E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53622E1
cs_ef1b_imon=2.9982E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05018E1
cs_ea1_imon=2.44805E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36784E0
lens1_imon=2.72377E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04062E1
cs_ea2_imon=1.55577E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=2.98522E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.52636E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1131E1
os_restr1_imon=4.29274E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15058E1
os_ea1_imon=2.27816E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63521E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24974E0
cs_ionrep_imon=1.23545E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93501E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=3.10235E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=3.49412E-8
tplens_vset=1.4E-1
tplens_vmon=1.58657E0
tplens_imon=-4.65239E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2614E1
iondef3_imon=1.49347E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26921E1
iondef2_imon=1.56391E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98374E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.98412E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27156E0
ionrepsh_imon=1.91856E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.17941E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58126E0
os_ea2_imon=-4.44003E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06144E2
lens4b_imon=2.00732E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70915E1
cs_ef2a_imon=3.17335E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0888E0
os_ef2alow_imon=-2.64833E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14843E-1
os_ef2bup_imon=-5.45943E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10697E1
os_restr2_imon=3.48329E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.29893E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01947E1
cs_anode2_imon=2.2583E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72997E1
iondef1_imon=1.09883E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67892E1
iondef4_imon=1.07044E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.021E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=8.89743E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10191E0
cs_ionaccel_imon=-1.81942E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02054E2
cs_ionfocb_imon=1.47208E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56075E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=1.79501E-1
window_imon=-1.29324E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-6.15698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92669E3
multa_neg_imon=7.51967E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93743E3
defgrida_imon=6.8224E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.62585E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41441E0
defgridb_imon=6.11452E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33241E1
os_fil1_imon=9.48601E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07011E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64576E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30845E1
cs_fil1_imon=9.99585E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61903E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66962E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.86336E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64328E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.5098E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0341E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22479E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.34505E-2
chamber_ion_pmon=1.70173E-8
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.78223E-1
res40_imon=-2.67717E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.16298E-1	-7.98273E-1	-9.1311E0	-9.14183E0	5.53131E-3	9.30309E-2	2.72841E1	-3.26657E1	-3.26308E1	2.67986E1	1.71953E-8	2.52099E-3	2.52099E-3	6.3074E-3	2.32892E-2
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16274E-1	-7.98273E-1	-9.13141E0	-9.14197E0	5.57899E-3	9.33647E-2	2.73111E1	-3.26615E1	-3.26314E1	2.68088E1	1.70837E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.33905E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16345E-1	-7.9844E-1	-9.13157E0	-9.14214E0	5.48363E-3	9.32932E-2	2.73287E1	-3.26779E1	-3.26284E1	2.68186E1	1.70096E-8	2.51552E-3	2.51552E-3	6.30192E-3	2.32487E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.16226E-1	-7.98035E-1	-9.13141E0	-9.14173E0	5.6982E-3	9.31978E-2	2.72951E1	-3.26248E1	-3.26183E1	2.6831E1	1.70173E-8	2.52169E-3	2.52169E-3	6.32356E-3	2.32711E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.16393E-1	-7.97892E-1	-9.13136E0	-9.14218E0	5.60284E-3	9.32455E-2	2.72961E1	-3.26579E1	-3.26188E1	2.6801E1	1.70827E-8	2.52061E-3	2.52061E-3	6.30202E-3	2.33308E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.16321E-1	-7.97701E-1	-9.13157E0	-9.14199E0	5.60284E-3	9.31025E-2	2.72959E1	-3.26578E1	-3.26236E1	2.6816E1	1.71208E-8	2.52209E-3	2.52209E-3	6.3074E-3	2.33499E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.16393E-1	-7.98249E-1	-9.13148E0	-9.14214E0	5.53131E-3	9.34839E-2	2.72883E1	-3.26512E1	-3.26374E1	2.67998E1	1.70096E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.33094E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.16274E-1	-7.98368E-1	-9.13157E0	-9.14214E0	5.53131E-3	9.31263E-2	2.73093E1	-3.26783E1	-3.2623E1	2.68058E1	1.70096E-8	2.51334E-3	2.51334E-3	6.31288E-3	2.33094E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16441E-1	-7.98273E-1	-9.13129E0	-9.14207E0	5.48363E-3	9.32693E-2	2.73257E1	-3.26756E1	-3.26219E1	2.6798E1	1.69949E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.33094E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16298E-1	-7.9782E-1	-9.13155E0	-9.14204E0	5.65052E-3	9.3627E-2	2.73312E1	-3.27141E1	-3.26179E1	2.68004E1	1.70318E-8	2.51511E-3	2.51511E-3	6.32075E-3	2.32526E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16298E-1	-7.9782E-1	-9.13162E0	-9.14228E0	5.34058E-3	9.32693E-2	2.7297E1	-3.26173E1	-3.26216E1	2.68316E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16464E-1	-7.97963E-1	-9.13167E0	-9.14214E0	5.43594E-3	9.3627E-2	2.72684E1	-3.26362E1	-3.262E1	2.68041E1	1.70165E-8	2.51952E-3	2.51952E-3	6.3245E-3	2.32853E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.1625E-1	-7.98106E-1	-9.13153E0	-9.14214E0	5.43594E-3	9.35555E-2	2.73153E1	-3.26765E1	-3.26266E1	2.67895E1	1.70023E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.31882E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.16035E-1	-7.98178E-1	-9.13167E0	-9.14197E0	5.19753E-3	9.36985E-2	2.73093E1	-3.26585E1	-3.26573E1	2.68172E1	1.70096E-8	2.52318E-3	2.52318E-3	6.32386E-3	2.33094E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.16298E-1	-7.9813E-1	-9.13157E0	-9.14178E0	5.36442E-3	9.377E-2	2.73122E1	-3.26661E1	-3.26207E1	2.67468E1	1.70023E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.33702E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16059E-1	-7.97844E-1	-9.13167E0	-9.14195E0	5.17368E-3	9.36508E-2	2.73111E1	-3.26645E1	-3.26494E1	2.67962E1	1.69875E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.32084E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.16393E-1	-7.97987E-1	-9.13141E0	-9.14176E0	5.22137E-3	9.33886E-2	2.72967E1	-3.26753E1	-3.26482E1	2.67992E1	1.70028E-8	2.51847E-3	2.51847E-3	6.31278E-3	2.33109E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.16298E-1	-7.98154E-1	-9.13146E0	-9.14185E0	5.22137E-3	9.33409E-2	2.72886E1	-3.26661E1	-3.26402E1	2.67962E1	1.70023E-8	2.52428E-3	2.52428E-3	6.31837E-3	2.32285E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09627E0	-8.16393E-1	-7.98225E-1	-9.1315E0	-9.14173E0	5.03063E-3	9.35316E-2	2.72997E1	-3.2635E1	-3.2641E1	2.68353E1	1.69949E-8	2.5188E-3	2.5188E-3	6.33486E-3	2.33499E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09642E0	-8.16202E-1	-7.98202E-1	-9.13136E0	-9.14168E0	5.31673E-3	9.33886E-2	2.72997E1	-3.26921E1	-3.2614E1	2.67892E1	1.70173E-8	2.52169E-3	2.52169E-3	6.3074E-3	2.34505E-2