[Scan]
initial_time=2016-02-17T18:05:16
final_time=2016-02-17T18:05:35
ip_count=19
run=1032
dataset=5
scan=142
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08808E-4
ql1_vset=
ql1_vmon=-8.1625E-1
ql1_imon=1.36155E-8
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=1.93083E-9
ql3_vset=
ql3_vmon=-9.13095E0
ql3_imon=3.10898E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=2.85769E-10
mult1=-9.71215E-9
mult2=-2.81537E-9
rf_tmon=-5.06398E-3
rf_agc=3.30495E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=1.61034E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67155E0
bslens_imon=2.69637E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20157E1
lens5a_imon=1.97875E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05277E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53628E1
cs_ef1b_imon=3.00829E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02355E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04844E1
cs_ea1_imon=2.46866E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37076E0
lens1_imon=2.59183E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64566E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04129E1
cs_ea2_imon=1.55949E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=3.0018E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.52837E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.28625E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15492E1
os_ea1_imon=2.2931E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64104E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28394E0
cs_ionrep_imon=1.22783E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93507E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01527E1
cs_anode1_imon=3.10884E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=3.49689E-8
tplens_vset=1.4E-1
tplens_vmon=1.63242E0
tplens_imon=-3.17371E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26425E1
iondef3_imon=1.50433E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26732E1
iondef2_imon=1.58544E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98659E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.07951E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2527E0
ionrepsh_imon=1.90809E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3412E1
lens5b_imon=2.18783E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57174E0
os_ea2_imon=-5.15643E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0614E2
lens4b_imon=2.00652E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71684E1
cs_ef2a_imon=3.18668E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0882E0
os_ef2alow_imon=-2.69519E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25054E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10763E1
os_restr2_imon=3.47861E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.32452E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.26875E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7334E1
iondef1_imon=1.10599E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68136E1
iondef4_imon=1.07512E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.02273E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=8.91809E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12353E0
cs_ionaccel_imon=-1.85546E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47183E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56357E1
einzel_imon=7.68063E-6
window_vset=0.0E0
window_vmon=1.95719E-1
window_imon=-1.1599E-6
mask1_vset=-4.8E2
mask1_vmon=-4.826E2
mask1_imon=2.39044E-4
mask2_vset=0.0E0
mask2_vmon=-1.86488E1
mask2_imon=-6.6255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.76854E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.51762E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.18814E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36247E0
defgridb_imon=6.02735E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33238E1
os_fil1_imon=9.4773E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06987E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6474E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3084E1
cs_fil1_imon=9.97705E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62252E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67019E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.00922E-2
os_fil2_imon=-2.66597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60637E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.61191E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11219E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22559E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.32513E-2
chamber_ion_pmon=1.69883E-8
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.62005E-1
res40_imon=-2.73843E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.16751E-1	-7.98178E-1	-9.13141E0	-9.14161E0	5.126E-3	9.34601E-2	2.73128E1	-3.26803E1	-3.26408E1	2.67914E1	1.70392E-8	2.5199E-3	2.5199E-3	6.3074E-3	2.32689E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16488E-1	-7.98035E-1	-9.13191E0	-9.1418E0	5.29289E-3	9.35555E-2	2.73149E1	-3.26291E1	-3.26707E1	2.68166E1	1.69875E-8	2.51225E-3	2.51225E-3	6.31837E-3	2.34312E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.16393E-1	-7.98011E-1	-9.13172E0	-9.14166E0	5.24521E-3	9.3317E-2	2.73021E1	-3.26567E1	-3.26278E1	2.67878E1	1.70096E-8	2.52318E-3	2.52318E-3	6.32936E-3	2.33499E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.16751E-1	-7.97939E-1	-9.13172E0	-9.14202E0	5.17368E-3	9.34124E-2	2.73045E1	-3.26777E1	-3.26549E1	2.68123E1	1.70028E-8	2.52492E-3	2.52492E-3	6.3074E-3	2.32513E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.16536E-1	-7.98154E-1	-9.13134E0	-9.14185E0	5.29289E-3	9.31263E-2	2.72815E1	-3.26461E1	-3.26178E1	2.68022E1	1.69727E-8	2.52209E-3	2.52209E-3	6.31288E-3	2.32892E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.1625E-1	-7.97915E-1	-9.13138E0	-9.14187E0	4.95911E-3	9.34839E-2	2.73128E1	-3.26405E1	-3.26086E1	2.6792E1	1.701E-8	2.52599E-3	2.52599E-3	6.31817E-3	2.32315E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.16298E-1	-7.97963E-1	-9.13148E0	-9.14209E0	5.38826E-3	9.33647E-2	2.72957E1	-3.26531E1	-3.26006E1	2.68065E1	1.7008E-8	2.51872E-3	2.51872E-3	6.32509E-3	2.32925E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.16607E-1	-7.97939E-1	-9.1316E0	-9.14185E0	5.55515E-3	9.32455E-2	2.73135E1	-3.265E1	-3.26621E1	2.68088E1	1.70246E-8	2.52276E-3	2.52276E-3	6.31278E-3	2.32711E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.16464E-1	-7.98392E-1	-9.13143E0	-9.14218E0	5.24521E-3	9.34839E-2	2.73111E1	-3.26585E1	-3.26554E1	2.67896E1	1.70244E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.31882E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.16298E-1	-7.98249E-1	-9.13155E0	-9.14202E0	5.22137E-3	9.34362E-2	2.73576E1	-3.26419E1	-3.26443E1	2.6794E1	1.70096E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.32892E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.16298E-1	-7.98464E-1	-9.13136E0	-9.14211E0	4.8399E-3	9.30786E-2	2.73004E1	-3.26549E1	-3.26408E1	2.68135E1	1.701E-8	2.51954E-3	2.51954E-3	6.3074E-3	2.33109E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.16226E-1	-7.98488E-1	-9.13134E0	-9.14202E0	5.00679E-3	9.32932E-2	2.7254E1	-3.26338E1	-3.26651E1	2.68166E1	1.70244E-8	2.51334E-3	2.51334E-3	6.31837E-3	2.32487E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.16345E-1	-7.98297E-1	-9.13117E0	-9.14216E0	5.53131E-3	9.32455E-2	2.73261E1	-3.26549E1	-3.26639E1	2.67956E1	1.7017E-8	2.51443E-3	2.51443E-3	6.29645E-3	2.32689E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09673E0	-8.16488E-1	-7.98202E-1	-9.13134E0	-9.14202E0	5.62668E-3	9.32455E-2	2.73454E1	-3.26885E1	-3.26609E1	2.68202E1	1.69955E-8	2.51525E-3	2.51525E-3	6.32356E-3	2.3291E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09665E0	-8.16441E-1	-7.98583E-1	-9.13136E0	-9.14178E0	5.10216E-3	9.34362E-2	2.73316E1	-3.26502E1	-3.26384E1	2.67836E1	1.70023E-8	2.51443E-3	2.51443E-3	6.32386E-3	2.33702E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09657E0	-8.16369E-1	-7.98225E-1	-9.13138E0	-9.14178E0	5.24521E-3	9.35316E-2	2.72871E1	-3.26639E1	-3.26452E1	2.6798E1	1.69727E-8	2.5188E-3	2.5188E-3	6.29645E-3	2.3472E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09696E0	-8.16202E-1	-7.98178E-1	-9.13124E0	-9.14214E0	5.36442E-3	9.32932E-2	2.73165E1	-3.26975E1	-3.2626E1	2.68172E1	1.69949E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.33094E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.16298E-1	-7.98202E-1	-9.13136E0	-9.14183E0	5.07832E-3	9.36508E-2	2.72821E1	-3.2659E1	-3.26178E1	2.67978E1	1.70028E-8	2.51954E-3	2.51954E-3	6.29665E-3	2.3291E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.15964E-1	-7.98368E-1	-9.13148E0	-9.14192E0	5.19753E-3	9.35078E-2	2.73135E1	-3.26518E1	-3.26482E1	2.68124E1	1.69949E-8	2.51662E-3	2.51662E-3	6.34037E-3	2.32487E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.1625E-1	-7.98392E-1	-9.13095E0	-9.14187E0	4.98295E-3	9.31263E-2	2.7334E1	-3.26732E1	-3.26425E1	2.68136E1	1.69883E-8	2.51954E-3	2.51954E-3	6.3074E-3	2.32513E-2