[Scan]
initial_time=2016-02-17T18:05:42
final_time=2016-02-17T18:06:02
ip_count=19
run=1032
dataset=5
scan=143
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09642E0
qbias_imon=-1.08838E-4
ql1_vset=
ql1_vmon=-8.16512E-1
ql1_imon=1.36299E-8
ql2_vset=
ql2_vmon=-7.98059E-1
ql2_imon=1.96154E-9
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=3.19576E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=2.94888E-10
mult1=-9.49958E-9
mult2=-2.79846E-9
rf_tmon=-3.62921E-3
rf_agc=3.41147E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=1.6609E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65736E0
bslens_imon=2.49017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19883E1
lens5a_imon=1.99111E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.0498E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53482E1
cs_ef1b_imon=3.00928E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04639E2
lens23_imon=1.0205E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05283E1
cs_ea1_imon=2.43779E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41503E0
lens1_imon=2.73439E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64545E1
os_ef1alow_imon=2.98252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03832E1
cs_ea2_imon=1.56532E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84527E1
cs_ef1a_imon=2.9992E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.52907E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11071E1
os_restr1_imon=4.30381E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15541E1
os_ea1_imon=2.27497E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63798E1
os_ef1bup_imon=3.08608E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26626E0
cs_ionrep_imon=1.23828E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=3.09199E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=3.50202E-8
tplens_vset=1.4E-1
tplens_vmon=1.60191E0
tplens_imon=-1.82087E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26416E1
iondef3_imon=1.50197E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26651E1
iondef2_imon=1.58125E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02964E2
lens6_imon=2.9848E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=4.0392E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25623E0
ionrepsh_imon=1.90298E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33829E1
lens5b_imon=2.2056E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7475E1
cs_ef2b_imon=3.13369E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.61489E0
os_ea2_imon=-6.56367E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06142E2
lens4b_imon=2.00563E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70875E1
cs_ef2a_imon=3.18374E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08584E0
os_ef2alow_imon=-2.66146E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.45305E-1
os_ef2bup_imon=-5.30613E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1073E1
os_restr2_imon=3.47357E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.29397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01954E1
cs_anode2_imon=2.25619E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72955E1
iondef1_imon=1.10095E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67878E1
iondef4_imon=1.09372E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=1.02336E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=8.90933E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12377E0
cs_ionaccel_imon=-1.78222E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47264E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56318E1
einzel_imon=7.67046E-6
window_vset=0.0E0
window_vmon=1.78879E-1
window_imon=-1.02809E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.39129E-4
mask2_vset=0.0E0
mask2_vmon=-1.86286E1
mask2_imon=-6.38866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.86653E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.76577E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.17634E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37307E0
defgridb_imon=6.21362E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33277E1
os_fil1_imon=9.49E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07231E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64598E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30859E1
cs_fil1_imon=9.99565E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62412E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67039E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.92668E-2
os_fil2_imon=-2.69235E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03978E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.56229E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33023E-1
cs_fil2_imon=-2.29849E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11884E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22562E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.33308E-2
chamber_ion_pmon=1.70173E-8
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.31607E-1
res40_imon=-2.57458E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=217
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-8.16035E-1	-7.98345E-1	-9.131E0	-9.14204E0	5.36442E-3	9.31263E-2	2.72886E1	-3.26413E1	-3.26378E1	2.67986E1	1.70391E-8	2.52599E-3	2.52599E-3	6.30202E-3	2.31919E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09696E0	-8.16226E-1	-7.9844E-1	-9.13129E0	-9.14199E0	5.60284E-3	9.33886E-2	2.7318E1	-3.26444E1	-3.26242E1	2.68207E1	1.70173E-8	2.51417E-3	2.51417E-3	6.31278E-3	2.33308E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09642E0	-8.16202E-1	-7.98368E-1	-9.13112E0	-9.14216E0	5.60284E-3	9.31025E-2	2.73069E1	-3.26419E1	-3.26402E1	2.68134E1	1.70092E-8	2.52139E-3	2.52139E-3	6.30182E-3	2.32461E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09719E0	-8.16154E-1	-7.98202E-1	-9.13117E0	-9.14197E0	5.67436E-3	9.32693E-2	2.73444E1	-3.26357E1	-3.26476E1	2.67908E1	1.70173E-8	2.52492E-3	2.52492E-3	6.30202E-3	2.31919E-2
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09727E0	-8.16274E-1	-7.98178E-1	-9.13138E0	-9.14199E0	5.55515E-3	9.34601E-2	2.73026E1	-3.26678E1	-3.26254E1	2.68142E1	1.70104E-8	2.51919E-3	2.51919E-3	6.31798E-3	2.32928E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.16369E-1	-7.97772E-1	-9.13143E0	-9.14187E0	5.53131E-3	9.31263E-2	2.73204E1	-3.26579E1	-3.26349E1	2.67896E1	1.70281E-8	2.5199E-3	2.5199E-3	6.30466E-3	2.32993E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.16083E-1	-7.98011E-1	-9.13143E0	-9.1419E0	5.76973E-3	9.31501E-2	2.73063E1	-3.26843E1	-3.25954E1	2.68184E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.16154E-1	-7.98106E-1	-9.13115E0	-9.14185E0	5.93662E-3	9.30071E-2	2.73117E1	-3.26801E1	-3.26188E1	2.68058E1	1.70023E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.32689E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09657E0	-8.16369E-1	-7.98178E-1	-9.13141E0	-9.14214E0	5.88894E-3	9.36031E-2	2.73105E1	-3.26597E1	-3.26164E1	2.67962E1	1.70096E-8	2.51334E-3	2.51334E-3	6.3074E-3	2.32689E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09657E0	-8.1625E-1	-7.98059E-1	-9.13131E0	-9.14187E0	5.45979E-3	9.32217E-2	2.72856E1	-3.26608E1	-3.2616E1	2.67978E1	1.70096E-8	2.52428E-3	2.52428E-3	6.34037E-3	2.33094E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.1625E-1	-7.9844E-1	-9.13157E0	-9.14173E0	5.79357E-3	9.35316E-2	2.73117E1	-3.26909E1	-3.26278E1	2.67496E1	1.70173E-8	2.51525E-3	2.51525E-3	6.30202E-3	2.33308E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09627E0	-8.16178E-1	-7.98416E-1	-9.13157E0	-9.14199E0	5.65052E-3	9.35078E-2	2.73381E1	-3.26627E1	-3.25665E1	2.67734E1	1.70023E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.31279E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.16464E-1	-7.98297E-1	-9.13167E0	-9.14164E0	5.45979E-3	9.32455E-2	2.73151E1	-3.26708E1	-3.26219E1	2.67734E1	1.7017E-8	2.51771E-3	2.51771E-3	6.33486E-3	2.33297E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.16488E-1	-7.98273E-1	-9.1316E0	-9.14178E0	5.29289E-3	9.31263E-2	2.73088E1	-3.2675E1	-3.2634E1	2.67968E1	1.70028E-8	2.51525E-3	2.51525E-3	6.31817E-3	2.31919E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16584E-1	-7.98011E-1	-9.13153E0	-9.14185E0	5.31673E-3	9.34839E-2	2.73231E1	-3.26164E1	-3.26302E1	2.67944E1	1.70092E-8	2.53033E-3	2.53033E-3	6.32418E-3	2.32666E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09657E0	-8.16512E-1	-7.98535E-1	-9.13148E0	-9.14192E0	5.34058E-3	9.34124E-2	2.72949E1	-3.26512E1	-3.26386E1	2.68034E1	1.70023E-8	2.52099E-3	2.52099E-3	6.3074E-3	2.33905E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.16774E-1	-7.98154E-1	-9.13112E0	-9.14211E0	5.36442E-3	9.35555E-2	2.73111E1	-3.26579E1	-3.262E1	2.68138E1	1.70023E-8	2.52318E-3	2.52318E-3	6.32936E-3	2.33499E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.16584E-1	-7.97892E-1	-9.13138E0	-9.14195E0	5.60284E-3	9.31978E-2	2.73305E1	-3.26608E1	-3.26089E1	2.67879E1	1.70096E-8	2.52099E-3	2.52099E-3	6.32386E-3	2.32689E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09642E0	-8.16512E-1	-7.98178E-1	-9.13146E0	-9.14183E0	5.43594E-3	9.32693E-2	2.73151E1	-3.27015E1	-3.26354E1	2.67649E1	1.70246E-8	2.52061E-3	2.52061E-3	6.31817E-3	2.33507E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09642E0	-8.16512E-1	-7.98059E-1	-9.13112E0	-9.14202E0	5.34058E-3	9.33647E-2	2.72955E1	-3.26651E1	-3.26416E1	2.67878E1	1.70173E-8	2.52061E-3	2.52061E-3	6.32356E-3	2.33308E-2