[Scan]
initial_time=2016-02-17T18:06:09
final_time=2016-02-17T18:06:28
ip_count=19
run=1032
dataset=5
scan=144
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08854E-4
ql1_vset=
ql1_vmon=-8.1656E-1
ql1_imon=1.35215E-8
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=1.9326E-9
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=2.73371E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=2.75969E-10
mult1=-9.18084E-9
mult2=-2.81344E-9
rf_tmon=-4.83381E-3
rf_agc=3.40507E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=1.61189E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63489E0
bslens_imon=2.4981E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20163E1
lens5a_imon=1.99425E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05255E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53772E1
cs_ef1b_imon=2.98991E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.0242E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0503E1
cs_ea1_imon=2.44487E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37677E0
lens1_imon=2.62067E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64656E1
os_ef1alow_imon=2.99856E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03913E1
cs_ea2_imon=1.55841E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=2.98522E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.53361E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.29274E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15113E1
os_ea1_imon=2.28264E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63503E1
os_ef1bup_imon=3.09298E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27193E0
cs_ionrep_imon=1.22964E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.9351E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=3.10848E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.49668E-8
tplens_vset=1.4E-1
tplens_vmon=1.60959E0
tplens_imon=-3.6063E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26529E1
iondef3_imon=1.50866E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26474E1
iondef2_imon=1.57463E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98584E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=4.03701E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26712E0
ionrepsh_imon=1.91566E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.19829E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74441E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.6204E0
os_ea2_imon=-5.40878E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06144E2
lens4b_imon=2.00579E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.19569E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.65915E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.23853E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=3.45842E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.30397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01989E1
cs_anode2_imon=2.25362E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73406E1
iondef1_imon=1.08688E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67746E1
iondef4_imon=1.0744E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.03136E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=8.90481E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10131E0
cs_ionaccel_imon=-1.79419E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47241E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56081E1
einzel_imon=7.61216E-6
window_vset=0.0E0
window_vmon=1.81303E-1
window_imon=-1.03736E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.86284E1
mask2_imon=-6.58946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9268E3
multa_neg_imon=7.68202E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.58972E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=6.92498E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49179E0
defgridb_imon=6.04177E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33294E1
os_fil1_imon=9.47574E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07143E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64535E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30886E1
cs_fil1_imon=1.00038E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63243E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66875E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04791E-2
os_fil2_imon=-2.47376E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64891E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.38366E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11219E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22435E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.23563E-1
res40_imon=-2.66996E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.16417E-1	-7.98321E-1	-9.13172E0	-9.14192E0	5.50747E-3	9.31978E-2	2.73184E1	-3.26845E1	-3.2648E1	2.68215E1	1.7017E-8	2.51443E-3	2.51443E-3	6.31837E-3	2.32689E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09634E0	-8.1656E-1	-7.98178E-1	-9.13153E0	-9.14209E0	5.4121E-3	9.33409E-2	2.73226E1	-3.26572E1	-3.26298E1	2.68032E1	1.70033E-8	2.51603E-3	2.51603E-3	6.32858E-3	2.33318E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.16703E-1	-7.98249E-1	-9.13131E0	-9.14214E0	5.53131E-3	9.33886E-2	2.73219E1	-3.26741E1	-3.26173E1	2.67989E1	1.69781E-8	2.51838E-3	2.51838E-3	6.3074E-3	2.32643E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.16679E-1	-7.98178E-1	-9.1315E0	-9.14187E0	5.50747E-3	9.34601E-2	2.72931E1	-3.26849E1	-3.2641E1	2.68274E1	1.70532E-8	2.51182E-3	2.51182E-3	6.32858E-3	2.33123E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09642E0	-8.16727E-1	-7.98273E-1	-9.1316E0	-9.14202E0	5.48363E-3	9.32455E-2	2.72957E1	-3.2662E1	-3.26089E1	2.68058E1	1.70096E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.33297E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09657E0	-8.16369E-1	-7.98321E-1	-9.13169E0	-9.14221E0	5.57899E-3	9.30786E-2	2.73033E1	-3.26669E1	-3.26368E1	2.67848E1	1.70246E-8	2.51739E-3	2.51739E-3	6.30202E-3	2.33507E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16131E-1	-7.97987E-1	-9.13117E0	-9.14218E0	5.84126E-3	9.3317E-2	2.72985E1	-3.26585E1	-3.26302E1	2.67966E1	1.70023E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.33297E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.15988E-1	-7.9782E-1	-9.1311E0	-9.14187E0	5.50747E-3	9.29594E-2	2.73129E1	-3.26579E1	-3.25816E1	2.68151E1	1.7017E-8	2.51552E-3	2.51552E-3	6.33486E-3	2.32689E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.16131E-1	-7.98011E-1	-9.13107E0	-9.1419E0	5.6982E-3	9.34124E-2	2.7301E1	-3.26549E1	-3.26248E1	2.67839E1	1.7017E-8	2.52647E-3	2.52647E-3	6.30192E-3	2.33905E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.16035E-1	-7.98273E-1	-9.13157E0	-9.14168E0	5.34058E-3	9.35078E-2	2.72901E1	-3.26933E1	-3.26332E1	2.67836E1	1.70028E-8	2.52169E-3	2.52169E-3	6.32896E-3	2.34105E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16107E-1	-7.98321E-1	-9.13157E0	-9.14176E0	5.45979E-3	9.33886E-2	2.72929E1	-3.2667E1	-3.26505E1	2.67908E1	1.70096E-8	2.51334E-3	2.51334E-3	6.30192E-3	2.32084E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.1625E-1	-7.98273E-1	-9.13179E0	-9.14221E0	5.67436E-3	9.36031E-2	2.72962E1	-3.26437E1	-3.26402E1	2.6801E1	1.70017E-8	2.53033E-3	2.53033E-3	6.3074E-3	2.33905E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.16131E-1	-7.98321E-1	-9.13148E0	-9.14214E0	5.45979E-3	9.32455E-2	2.73141E1	-3.26332E1	-3.26657E1	2.67938E1	1.70173E-8	2.51096E-3	2.51096E-3	6.32356E-3	2.3291E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16178E-1	-7.98249E-1	-9.13146E0	-9.14218E0	5.79357E-3	9.33886E-2	2.73201E1	-3.2641E1	-3.26368E1	2.67908E1	1.70023E-8	2.52209E-3	2.52209E-3	6.3074E-3	2.33702E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.16011E-1	-7.97892E-1	-9.13129E0	-9.14209E0	5.76973E-3	9.31263E-2	2.73105E1	-3.26819E1	-3.26326E1	2.67866E1	1.70244E-8	2.51007E-3	2.51007E-3	6.31288E-3	2.32892E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.16131E-1	-7.98321E-1	-9.13131E0	-9.14202E0	5.74589E-3	9.30309E-2	2.73204E1	-3.26667E1	-3.26166E1	2.68064E1	1.70096E-8	2.52099E-3	2.52099E-3	6.34588E-3	2.32689E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.16274E-1	-7.98225E-1	-9.13136E0	-9.14209E0	5.43594E-3	9.32455E-2	2.73321E1	-3.26693E1	-3.26272E1	2.68046E1	1.70173E-8	2.51632E-3	2.51632E-3	6.31817E-3	2.33507E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09627E0	-8.16274E-1	-7.98535E-1	-9.1315E0	-9.14202E0	5.31673E-3	9.32455E-2	2.73028E1	-3.26567E1	-3.26312E1	2.68146E1	1.70023E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.32689E-2
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.1656E-1	-7.98464E-1	-9.13143E0	-9.14183E0	5.19753E-3	9.3317E-2	2.73134E1	-3.26714E1	-3.26431E1	2.67752E1	1.69995E-8	2.51671E-3	2.51671E-3	6.32342E-3	2.33412E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.1656E-1	-7.98082E-1	-9.13138E0	-9.1419E0	5.53131E-3	9.33409E-2	2.73406E1	-3.26474E1	-3.26529E1	2.67746E1