[Scan]
initial_time=2016-02-17T18:07:02
final_time=2016-02-17T18:07:22
ip_count=19
run=1032
dataset=5
scan=146
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09688E0
qbias_imon=-1.08822E-4
ql1_vset=
ql1_vmon=-8.15749E-1
ql1_imon=1.36E-8
ql2_vset=
ql2_vmon=-7.98202E-1
ql2_imon=1.92367E-9
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=2.81882E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=2.94399E-10
mult1=-9.4755E-9
mult2=-2.69466E-9
rf_tmon=-5.29951E-3
rf_agc=3.27688E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=1.61941E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65052E0
bslens_imon=2.57741E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20163E1
lens5a_imon=1.97334E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53754E1
cs_ef1b_imon=3.02126E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04651E2
lens23_imon=1.02153E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05252E1
cs_ea1_imon=2.45172E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33771E0
lens1_imon=2.60264E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64536E1
os_ef1alow_imon=2.98666E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03864E1
cs_ea2_imon=1.57427E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=2.99567E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.53086E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=4.30644E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15125E1
os_ea1_imon=2.28048E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.08938E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27313E0
cs_ionrep_imon=1.22639E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93308E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=3.08902E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.49333E-8
tplens_vset=1.4E-1
tplens_vmon=1.60598E0
tplens_imon=-2.77716E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26086E1
iondef3_imon=1.52308E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.58364E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98627E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=4.03667E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27974E0
ionrepsh_imon=1.94378E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33832E1
lens5b_imon=2.18891E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.13443E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.63062E0
os_ea2_imon=-7.35545E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06144E2
lens4b_imon=2.00698E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.18885E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07318E0
os_ef2alow_imon=-2.64473E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.41272E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10913E1
os_restr2_imon=3.47032E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.32812E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01773E1
cs_anode2_imon=2.25614E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72829E1
iondef1_imon=1.09373E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67968E1
iondef4_imon=1.08774E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.02615E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=8.92675E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11573E0
cs_ionaccel_imon=-1.87709E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=1.789E-1
window_imon=-1.15629E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.39207E-4
mask2_vset=0.0E0
mask2_vmon=-1.86302E1
mask2_imon=-5.40015E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.75412E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.61135E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50159E3
multb_neg_imon=7.24943E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55796E0
defgridb_imon=6.31574E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33285E1
os_fil1_imon=9.46192E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07233E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64691E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=9.989E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62444E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66862E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.99632E-2
os_fil2_imon=-2.57587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.43107E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.325E-1
cs_fil2_imon=-2.57587E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.65919E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22444E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.31721E-2
chamber_ion_pmon=1.70028E-8
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.97134E-1
res40_imon=-2.70239E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.15988E-1	-7.98011E-1	-9.13107E0	-9.14197E0	5.36442E-3	9.33886E-2	2.73033E1	-3.26531E1	-3.26331E1	2.68262E1	1.70023E-8	2.52209E-3	2.52209E-3	6.31288E-3	2.32689E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16154E-1	-7.97749E-1	-9.13093E0	-9.14221E0	5.53131E-3	9.32693E-2	2.73291E1	-3.26573E1	-3.26488E1	2.68144E1	1.70028E-8	2.52276E-3	2.52276E-3	6.3074E-3	2.32513E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16107E-1	-7.97892E-1	-9.13136E0	-9.14195E0	5.34058E-3	9.31025E-2	2.73219E1	-3.26527E1	-3.26208E1	2.68227E1	1.7017E-8	2.52209E-3	2.52209E-3	6.31288E-3	2.32487E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.16154E-1	-7.97963E-1	-9.13119E0	-9.14168E0	5.34058E-3	9.32217E-2	2.73111E1	-3.26615E1	-3.26554E1	2.67931E1	1.70247E-8	2.51709E-3	2.51709E-3	6.32328E-3	2.3371E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.15964E-1	-7.98059E-1	-9.13126E0	-9.14197E0	5.34058E-3	9.3174E-2	2.73021E1	-3.26891E1	-3.26266E1	2.68142E1	1.70173E-8	2.51739E-3	2.51739E-3	6.35059E-3	2.33109E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16059E-1	-7.98178E-1	-9.13136E0	-9.14173E0	5.31673E-3	9.35078E-2	2.7298E1	-3.26496E1	-3.26242E1	2.67968E1	1.70244E-8	2.51771E-3	2.51771E-3	6.32936E-3	2.32689E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.16083E-1	-7.98392E-1	-9.13107E0	-9.14152E0	5.22137E-3	9.3317E-2	2.72733E1	-3.26682E1	-3.26621E1	2.68196E1	1.701E-8	2.52061E-3	2.52061E-3	6.31278E-3	2.3291E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16345E-1	-7.98249E-1	-9.13122E0	-9.14142E0	5.48363E-3	9.34839E-2	2.73069E1	-3.26855E1	-3.26512E1	2.6798E1	1.70318E-8	2.5147E-3	2.5147E-3	6.30182E-3	2.32873E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16226E-1	-7.98273E-1	-9.13141E0	-9.14161E0	5.62668E-3	9.34124E-2	2.73159E1	-3.26567E1	-3.26362E1	2.68376E1	1.70096E-8	2.52428E-3	2.52428E-3	6.31288E-3	2.33499E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.16035E-1	-7.98035E-1	-9.13136E0	-9.14166E0	5.45979E-3	9.33409E-2	2.72823E1	-3.26717E1	-3.26446E1	2.68028E1	1.70096E-8	2.51334E-3	2.51334E-3	6.32936E-3	2.32487E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.16226E-1	-7.97915E-1	-9.13138E0	-9.14156E0	5.34058E-3	9.30071E-2	2.7346E1	-3.26681E1	-3.26164E1	2.68088E1	1.70096E-8	2.51552E-3	2.51552E-3	6.3074E-3	2.33297E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16345E-1	-7.9782E-1	-9.13117E0	-9.14185E0	5.29289E-3	9.31978E-2	2.73532E1	-3.26939E1	-3.25876E1	2.6789E1	1.70096E-8	2.52428E-3	2.52428E-3	6.32386E-3	2.32892E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16298E-1	-7.98082E-1	-9.13165E0	-9.1418E0	5.17368E-3	9.34839E-2	2.73478E1	-3.26885E1	-3.26176E1	2.68166E1	1.70023E-8	2.51662E-3	2.51662E-3	6.30192E-3	2.33499E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16512E-1	-7.98011E-1	-9.13148E0	-9.14178E0	5.45979E-3	9.33886E-2	2.73267E1	-3.26603E1	-3.26188E1	2.6825E1	1.7017E-8	2.52318E-3	2.52318E-3	6.33486E-3	2.33094E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.16298E-1	-7.97963E-1	-9.13141E0	-9.14197E0	5.53131E-3	9.32455E-2	2.73123E1	-3.26987E1	-3.26344E1	2.68352E1	1.70096E-8	2.51771E-3	2.51771E-3	6.3074E-3	2.33094E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16178E-1	-7.98225E-1	-9.13148E0	-9.14207E0	5.43594E-3	9.35555E-2	2.7279E1	-3.26556E1	-3.26347E1	2.67769E1	1.70096E-8	2.51662E-3	2.51662E-3	6.33486E-3	2.33905E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.16369E-1	-7.98082E-1	-9.13155E0	-9.14171E0	5.29289E-3	9.34362E-2	2.73481E1	-3.2684E1	-3.26073E1	2.67708E1	1.69891E-8	2.51498E-3	2.51498E-3	6.31798E-3	2.32538E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09627E0	-8.16393E-1	-7.97868E-1	-9.13134E0	-9.14161E0	5.19753E-3	9.3627E-2	2.73252E1	-3.26579E1	-3.26278E1	2.67938E1	1.69705E-8	2.51838E-3	2.51838E-3	6.30171E-3	2.33273E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09734E0	-8.16083E-1	-7.98154E-1	-9.13148E0	-9.14178E0	5.34058E-3	9.33647E-2	2.73051E1	-3.26838E1	-3.25912E1	2.68209E1	1.69883E-8	2.51096E-3	2.51096E-3	6.31278E-3	2.33308E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09688E0	-8.15749E-1	-7.98202E-1	-9.13112E0	-9.14178E0	5.29289E-3	9.35078E-2	2.72829E1	-3.26585E1	-3.26086E1	2.67968E1	1.70028E-8	2.51632E-3	2.51632E-3	6.33436E-3	2.31721E-2