[Scan]
initial_time=2016-02-17T18:07:29
final_time=2016-02-17T18:07:48
ip_count=19
run=1032
dataset=5
scan=147
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08836E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=1.35742E-8
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=1.92887E-9
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=3.18491E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=2.86198E-10
mult1=-9.86583E-9
mult2=-2.80557E-9
rf_tmon=-3.48305E-3
rf_agc=3.35333E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=1.6191E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64321E0
bslens_imon=2.47955E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20125E1
lens5a_imon=1.96988E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.05213E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.534E1
cs_ef1b_imon=3.01261E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04654E2
lens23_imon=1.02185E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.43849E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4109E0
lens1_imon=2.78394E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64819E1
os_ef1alow_imon=2.97405E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03873E1
cs_ea2_imon=1.55506E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84202E1
cs_ef1a_imon=2.98162E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.53231E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.31184E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15247E1
os_ea1_imon=2.28382E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24561E0
cs_ionrep_imon=1.23262E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.9353E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01647E1
cs_anode1_imon=3.10632E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.49367E-8
tplens_vset=1.4E-1
tplens_vmon=1.59247E0
tplens_imon=-2.31638E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26372E1
iondef3_imon=1.49666E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26956E1
iondef2_imon=1.5724E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.98558E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.018E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26508E0
ionrepsh_imon=1.9313E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33711E1
lens5b_imon=2.18897E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.12289E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.62669E0
os_ea2_imon=-7.12998E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00513E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0912E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22051E-1
os_ef2bup_imon=-5.39095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=3.48293E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.31769E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.26155E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73299E1
iondef1_imon=1.1052E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67902E1
iondef4_imon=1.08305E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.02461E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=8.90389E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12474E0
cs_ionaccel_imon=-1.86627E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47255E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56447E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=2.00524E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39203E-4
mask2_vset=0.0E0
mask2_vmon=-1.8632E1
mask2_imon=-7.38233E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.5409E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.36228E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.3073E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32583E0
defgridb_imon=6.11098E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33285E1
os_fil1_imon=9.49382E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07257E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6443E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30875E1
cs_fil1_imon=9.99435E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61777E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67234E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04064E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00717E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.82172E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.5999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22434E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.32513E-2
chamber_ion_pmon=1.70028E-8
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.572E-1
res40_imon=-2.59788E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.15868E-1	-7.9844E-1	-9.13131E0	-9.14195E0	5.43594E-3	9.38416E-2	2.72898E1	-3.26797E1	-3.26319E1	2.67908E1	1.70023E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.32487E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.16011E-1	-7.98512E-1	-9.13143E0	-9.14202E0	5.34058E-3	9.33647E-2	2.73243E1	-3.26753E1	-3.26398E1	2.6789E1	1.70173E-8	2.52276E-3	2.52276E-3	6.29665E-3	2.32315E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.15964E-1	-7.98488E-1	-9.13119E0	-9.14226E0	5.34058E-3	9.36031E-2	2.7308E1	-3.26585E1	-3.26549E1	2.68058E1	1.70245E-8	2.52514E-3	2.52514E-3	6.30469E-3	2.33403E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.16178E-1	-7.98416E-1	-9.13148E0	-9.1419E0	5.79357E-3	9.32932E-2	2.73039E1	-3.26856E1	-3.26242E1	2.68128E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.16059E-1	-7.98011E-1	-9.13129E0	-9.14187E0	5.53131E-3	9.36508E-2	2.73339E1	-3.26855E1	-3.26374E1	2.67746E1	1.70173E-8	2.52169E-3	2.52169E-3	6.31817E-3	2.3291E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.16202E-1	-7.98392E-1	-9.13136E0	-9.14202E0	5.67436E-3	9.33409E-2	2.73057E1	-3.26543E1	-3.2632E1	2.68232E1	1.69949E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.32487E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16464E-1	-7.98106E-1	-9.13138E0	-9.14195E0	5.53131E-3	9.34362E-2	2.73063E1	-3.26372E1	-3.26626E1	2.67842E1	1.7017E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.33094E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.1625E-1	-7.98202E-1	-9.13136E0	-9.14209E0	5.62668E-3	9.34124E-2	2.73333E1	-3.26981E1	-3.262E1	2.68082E1	1.69883E-8	2.51632E-3	2.51632E-3	6.31817E-3	2.33905E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16393E-1	-7.98225E-1	-9.13129E0	-9.14195E0	5.53131E-3	9.31263E-2	2.73165E1	-3.26873E1	-3.26212E1	2.67926E1	1.70096E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.32892E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16345E-1	-7.97939E-1	-9.13134E0	-9.14202E0	5.57899E-3	9.32693E-2	2.73279E1	-3.26837E1	-3.2632E1	2.68004E1	1.70023E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.32689E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.16345E-1	-7.97677E-1	-9.13148E0	-9.1419E0	5.53131E-3	9.30548E-2	2.73357E1	-3.26705E1	-3.26146E1	2.68358E1	1.7017E-8	2.52428E-3	2.52428E-3	6.3074E-3	2.33905E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.1625E-1	-7.98011E-1	-9.13138E0	-9.14197E0	5.48363E-3	9.32932E-2	2.73544E1	-3.27119E1	-3.26014E1	2.68136E1	1.70096E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.33702E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.16274E-1	-7.98059E-1	-9.13143E0	-9.14216E0	5.29289E-3	9.33409E-2	2.7332E1	-3.26848E1	-3.26187E1	2.67739E1	1.70096E-8	2.52209E-3	2.52209E-3	6.34037E-3	2.33702E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.1625E-1	-7.97844E-1	-9.13138E0	-9.14202E0	5.48363E-3	9.33886E-2	2.73316E1	-3.26732E1	-3.26496E1	2.68424E1	1.70023E-8	2.51552E-3	2.51552E-3	6.29645E-3	2.32487E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09627E0	-8.16321E-1	-7.98154E-1	-9.13122E0	-9.1418E0	5.53131E-3	9.31501E-2	2.73177E1	-3.26807E1	-3.2638E1	2.68129E1	1.70318E-8	2.52099E-3	2.52099E-3	6.32936E-3	2.32689E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.16202E-1	-7.98035E-1	-9.13119E0	-9.14202E0	5.26905E-3	9.31263E-2	2.73346E1	-3.26844E1	-3.2652E1	2.68034E1	1.69955E-8	2.51203E-3	2.51203E-3	6.31817E-3	2.33507E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09642E0	-8.16274E-1	-7.98059E-1	-9.13134E0	-9.14202E0	5.57899E-3	9.33647E-2	2.73478E1	-3.26879E1	-3.2611E1	2.67836E1	1.69875E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.32084E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.16464E-1	-7.98559E-1	-9.13134E0	-9.1424E0	5.55515E-3	9.30309E-2	2.73281E1	-3.26555E1	-3.26183E1	2.68166E1	1.70244E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.32487E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16607E-1	-7.98106E-1	-9.13122E0	-9.14216E0	5.50747E-3	9.32932E-2	2.73267E1	-3.26633E1	-3.26212E1	2.68094E1	1.70028E-8	2.52384E-3	2.52384E-3	6.29128E-3	2.32711E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.16631E-1	-7.98154E-1	-9.13155E0	-9.14195E0	5.45979E-3	9.34362E-2	2.73299E1	-3.26956E1	-3.26372E1	2.67902E1	1.70028E-8	2.52061E-3	2.52061E-3	6.32896E-3	2.32513E-2