[Scan]
initial_time=2016-02-17T18:08:49
final_time=2016-02-17T18:09:08
ip_count=19
run=1032
dataset=5
scan=150
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08812E-4
ql1_vset=
ql1_vmon=-8.16512E-1
ql1_imon=1.36187E-8
ql2_vset=
ql2_vmon=-7.97677E-1
ql2_imon=1.91104E-9
ql3_vset=
ql3_vmon=-9.13098E0
ql3_imon=2.86114E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=2.78819E-10
mult1=-9.75743E-9
mult2=-2.68532E-9
rf_tmon=-4.95624E-3
rf_agc=3.36651E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=1.60054E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67875E0
bslens_imon=2.3539E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=1.98596E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53646E1
cs_ef1b_imon=2.99928E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04652E2
lens23_imon=1.02373E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04754E1
cs_ea1_imon=2.45135E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39299E0
lens1_imon=2.73242E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.9863E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04165E1
cs_ea2_imon=1.55228E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84658E1
cs_ef1a_imon=2.99676E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.53155E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1122E1
os_restr1_imon=4.30824E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15426E1
os_ea1_imon=2.27688E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63455E1
os_ef1bup_imon=3.08541E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24729E0
cs_ionrep_imon=1.23829E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93492E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02109E1
cs_anode1_imon=3.10163E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=3.49386E-8
tplens_vset=1.4E-1
tplens_vmon=1.61079E0
tplens_imon=-3.71445E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26383E1
iondef3_imon=1.49027E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.59518E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98407E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=3.99693E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27072E0
ionrepsh_imon=1.92035E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.18819E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.62581E0
os_ea2_imon=-5.62508E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70891E1
cs_ef2a_imon=3.18668E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08219E0
os_ef2alow_imon=-2.67356E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.31662E-1
os_ef2bup_imon=-5.31527E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10751E1
os_restr2_imon=3.47284E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.31406E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01647E1
cs_anode2_imon=2.26479E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.09806E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.08485E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.02405E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=8.91955E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11512E0
cs_ionaccel_imon=-1.8879E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47154E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56153E1
einzel_imon=7.79596E-6
window_vset=0.0E0
window_vmon=1.6989E-1
window_imon=-1.1599E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.8623E1
mask2_imon=-5.40015E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.45491E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.48157E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.35397E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55796E0
defgridb_imon=6.26167E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33282E1
os_fil1_imon=9.48054E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07257E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64639E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.309E1
cs_fil1_imon=9.99098E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61879E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66993E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98343E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06724E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75203E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.66597E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50011E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22625E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.32084E-2
chamber_ion_pmon=1.70096E-8
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.55998E-1
res40_imon=-2.55824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=217
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.16441E-1	-7.97915E-1	-9.13153E0	-9.1419E0	5.38826E-3	9.36031E-2	2.7301E1	-3.2659E1	-3.26372E1	2.6813E1	1.70173E-8	2.51739E-3	2.51739E-3	6.3074E-3	2.31523E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.16417E-1	-7.98345E-1	-9.13155E0	-9.1423E0	5.126E-3	9.31978E-2	2.73167E1	-3.2675E1	-3.26615E1	2.68028E1	1.70023E-8	2.51443E-3	2.51443E-3	6.33486E-3	2.3148E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16512E-1	-7.9813E-1	-9.13131E0	-9.14209E0	5.17368E-3	9.32932E-2	2.73063E1	-3.26773E1	-3.26307E1	2.68105E1	1.69801E-8	2.5199E-3	2.5199E-3	6.3074E-3	2.32892E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.1656E-1	-7.97844E-1	-9.13155E0	-9.1418E0	5.31673E-3	9.34839E-2	2.73293E1	-3.2649E1	-3.26166E1	2.67704E1	1.7017E-8	2.51662E-3	2.51662E-3	6.28552E-3	2.33499E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.16202E-1	-7.97915E-1	-9.13148E0	-9.14218E0	5.4121E-3	9.34839E-2	2.73063E1	-3.26585E1	-3.26344E1	2.6807E1	1.70246E-8	2.52169E-3	2.52169E-3	6.32896E-3	2.32513E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.16441E-1	-7.97939E-1	-9.13134E0	-9.14204E0	5.6982E-3	9.30786E-2	2.73045E1	-3.26813E1	-3.26488E1	2.67848E1	1.70096E-8	2.51334E-3	2.51334E-3	6.29098E-3	2.33297E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16369E-1	-7.97629E-1	-9.13155E0	-9.14207E0	5.17368E-3	9.30309E-2	2.72702E1	-3.2626E1	-3.26254E1	2.6813E1	1.70244E-8	2.51334E-3	2.51334E-3	6.33486E-3	2.32487E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.16274E-1	-7.97796E-1	-9.13153E0	-9.14202E0	5.34058E-3	9.32693E-2	2.72964E1	-3.26567E1	-3.26324E1	2.68117E1	1.70096E-8	2.51334E-3	2.51334E-3	6.32386E-3	2.32689E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16417E-1	-7.97844E-1	-9.13148E0	-9.14187E0	5.14984E-3	9.3317E-2	2.72995E1	-3.26697E1	-3.26241E1	2.68138E1	1.70108E-8	2.52301E-3	2.52301E-3	6.31779E-3	2.31797E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.16417E-1	-7.9782E-1	-9.1315E0	-9.14168E0	5.29289E-3	9.32693E-2	2.72997E1	-3.26368E1	-3.26374E1	2.6795E1	1.70088E-8	2.51838E-3	2.51838E-3	6.31879E-3	2.33484E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.16417E-1	-7.97987E-1	-9.13148E0	-9.14166E0	5.38826E-3	9.31978E-2	2.73328E1	-3.26679E1	-3.26596E1	2.67637E1	1.70096E-8	2.52099E-3	2.52099E-3	6.31288E-3	2.33499E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.16488E-1	-7.97892E-1	-9.1316E0	-9.1418E0	5.126E-3	9.36031E-2	2.73424E1	-3.26735E1	-3.2626E1	2.6807E1	1.70244E-8	2.52209E-3	2.52209E-3	6.34588E-3	2.32487E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.1625E-1	-7.98321E-1	-9.13136E0	-9.14195E0	5.24521E-3	9.32932E-2	2.73081E1	-3.26915E1	-3.26398E1	2.67968E1	1.7017E-8	2.51662E-3	2.51662E-3	6.29645E-3	2.33499E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.16298E-1	-7.97939E-1	-9.13162E0	-9.14185E0	5.45979E-3	9.31501E-2	2.72892E1	-3.26555E1	-3.26331E1	2.67776E1	1.70173E-8	2.51739E-3	2.51739E-3	6.34518E-3	2.3291E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.15988E-1	-7.98011E-1	-9.13155E0	-9.14207E0	5.31673E-3	9.3317E-2	2.72985E1	-3.26669E1	-3.26434E1	2.67818E1	1.70244E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.33094E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16369E-1	-7.98106E-1	-9.13169E0	-9.14187E0	5.43594E-3	9.30548E-2	2.72806E1	-3.26811E1	-3.26376E1	2.68124E1	1.70023E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.32892E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.16202E-1	-7.97915E-1	-9.1316E0	-9.14204E0	5.36442E-3	9.33409E-2	2.73219E1	-3.26729E1	-3.26404E1	2.67986E1	1.70244E-8	2.52538E-3	2.52538E-3	6.29098E-3	2.32487E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.16154E-1	-7.9751E-1	-9.1315E0	-9.14199E0	5.53131E-3	9.31025E-2	2.73045E1	-3.26457E1	-3.2666E1	2.68198E1	1.70318E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.33499E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.1625E-1	-7.97844E-1	-9.13117E0	-9.1423E0	5.38826E-3	9.31978E-2	2.73151E1	-3.26537E1	-3.26496E1	2.68058E1	1.70176E-8	2.51919E-3	2.51919E-3	6.29157E-3	2.33318E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.16512E-1	-7.97677E-1	-9.13098E0	-9.14204E0	5.53131E-3	9.34362E-2	2.73045E1	-3.26609E1	-3.26383E1	2.67974E1	1.70096E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.32084E-2