[Scan]
initial_time=2016-02-17T18:09:15
final_time=2016-02-17T18:09:35
ip_count=19
run=1032
dataset=5
scan=151
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08808E-4
ql1_vset=
ql1_vmon=-8.16178E-1
ql1_imon=1.35994E-8
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=1.92219E-9
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=2.87294E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=2.949E-10
mult1=-9.40325E-9
mult2=-2.79247E-9
rf_tmon=-3.98971E-3
rf_agc=3.39945E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=1.61481E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62708E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19971E1
lens5a_imon=1.9874E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.04923E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53632E1
cs_ef1b_imon=3.00824E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02016E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05252E1
cs_ea1_imon=2.47226E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38337E0
lens1_imon=2.78649E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64556E1
os_ef1alow_imon=2.98322E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03792E1
cs_ea2_imon=1.56526E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84383E1
cs_ef1a_imon=2.99086E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.53073E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11216E1
os_restr1_imon=4.30416E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15636E1
os_ea1_imon=2.28336E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63676E1
os_ef1bup_imon=3.09477E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2551E0
cs_ionrep_imon=1.22279E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91917E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01624E1
cs_anode1_imon=3.10207E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=3.50425E-8
tplens_vset=1.4E-1
tplens_vmon=1.59036E0
tplens_imon=-5.33668E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26524E1
iondef3_imon=1.50614E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.5822E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98609E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=4.08465E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26892E0
ionrepsh_imon=1.91458E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3361E1
lens5b_imon=2.18891E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74571E1
cs_ef2b_imon=3.12535E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.62521E0
os_ea2_imon=-5.12038E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00634E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.17574E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0841E0
os_ef2alow_imon=-2.57458E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.29087E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10897E1
os_restr2_imon=3.4694E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.33065E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02012E1
cs_anode2_imon=2.25897E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73105E1
iondef1_imon=1.09842E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6804E1
iondef4_imon=1.08156E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.02444E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=8.91555E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11161E0
cs_ionaccel_imon=-1.79613E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.47132E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56208E1
einzel_imon=7.60443E-6
window_vset=0.0E0
window_vmon=1.88146E-1
window_imon=-9.02986E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82597E2
mask1_imon=2.39101E-4
mask2_vset=0.0E0
mask2_vmon=-1.86309E1
mask2_imon=-6.45817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.65318E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.75194E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.56666E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=6.22562E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33283E1
os_fil1_imon=9.48091E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06252E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6459E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30882E1
cs_fil1_imon=9.99102E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61966E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67132E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07371E-2
os_fil2_imon=-2.50701E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96448E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6618E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33397E-1
cs_fil2_imon=-2.44329E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.21909E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22505E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.31681E-2
chamber_ion_pmon=1.70244E-8
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.44929E-1
res40_imon=-2.59891E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16226E-1	-7.98082E-1	-9.13119E0	-9.14197E0	5.22137E-3	9.34601E-2	2.7311E1	-3.26832E1	-3.26101E1	2.6789E1	1.70173E-8	2.52276E-3	2.52276E-3	6.34518E-3	2.31721E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.1625E-1	-7.97844E-1	-9.13122E0	-9.14207E0	5.48363E-3	9.3317E-2	2.72824E1	-3.26719E1	-3.2656E1	2.6792E1	1.70246E-8	2.51847E-3	2.51847E-3	6.29665E-3	2.33706E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16417E-1	-7.98178E-1	-9.13167E0	-9.14199E0	5.34058E-3	9.33886E-2	2.7319E1	-3.26642E1	-3.26422E1	2.68154E1	1.70092E-8	2.51915E-3	2.51915E-3	6.31858E-3	2.32666E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16298E-1	-7.98035E-1	-9.13131E0	-9.14187E0	5.43594E-3	9.33886E-2	2.72841E1	-3.26597E1	-3.26134E1	2.67806E1	1.69883E-8	2.51525E-3	2.51525E-3	6.28592E-3	2.32513E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16512E-1	-7.97915E-1	-9.13136E0	-9.14211E0	5.6982E-3	9.31978E-2	2.7302E1	-3.26805E1	-3.26505E1	2.68166E1	1.70911E-8	2.52538E-3	2.52538E-3	6.31837E-3	2.32487E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.16584E-1	-7.97987E-1	-9.13146E0	-9.14228E0	5.38826E-3	9.30548E-2	2.73027E1	-3.26657E1	-3.26182E1	2.68226E1	1.70017E-8	2.51581E-3	2.51581E-3	6.32978E-3	2.32049E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16441E-1	-7.97868E-1	-9.1315E0	-9.14221E0	5.29289E-3	9.32217E-2	2.73261E1	-3.26524E1	-3.26573E1	2.6777E1	1.70173E-8	2.51847E-3	2.51847E-3	6.33436E-3	2.33109E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.16321E-1	-7.98106E-1	-9.13153E0	-9.14192E0	5.62668E-3	9.3317E-2	2.73045E1	-3.2613E1	-3.26555E1	2.68046E1	1.69801E-8	2.52209E-3	2.52209E-3	6.3074E-3	2.32285E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16131E-1	-7.98106E-1	-9.13172E0	-9.14192E0	5.55515E-3	9.31978E-2	2.73086E1	-3.2672E1	-3.26319E1	2.67955E1	1.70023E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.33297E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.16369E-1	-7.98297E-1	-9.13162E0	-9.14209E0	5.17368E-3	9.34124E-2	2.73195E1	-3.26771E1	-3.26711E1	2.6825E1	1.701E-8	2.51847E-3	2.51847E-3	6.31278E-3	2.32315E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09657E0	-8.16751E-1	-7.98059E-1	-9.13148E0	-9.14202E0	5.38826E-3	9.34839E-2	2.72886E1	-3.27092E1	-3.26042E1	2.67968E1	1.70173E-8	2.52061E-3	2.52061E-3	6.31817E-3	2.32711E-2
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.16751E-1	-7.97749E-1	-9.13165E0	-9.14171E0	5.45979E-3	9.33409E-2	2.73303E1	-3.26951E1	-3.26206E1	2.68141E1	1.6958E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.33297E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.16441E-1	-7.97963E-1	-9.13153E0	-9.14233E0	5.6982E-3	9.33409E-2	2.73027E1	-3.26993E1	-3.26344E1	2.67988E1	1.71997E-8	2.51954E-3	2.51954E-3	6.3074E-3	2.3291E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16274E-1	-7.97939E-1	-9.13141E0	-9.14228E0	5.34058E-3	9.33886E-2	2.73243E1	-3.26488E1	-3.26098E1	2.68094E1	1.70318E-8	2.5188E-3	2.5188E-3	6.33486E-3	2.33094E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16321E-1	-7.98011E-1	-9.13167E0	-9.14237E0	5.43594E-3	9.33409E-2	2.73153E1	-3.26675E1	-3.26404E1	2.68034E1	1.70096E-8	2.51116E-3	2.51116E-3	6.31288E-3	2.32285E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.16512E-1	-7.97439E-1	-9.13177E0	-9.14228E0	5.53131E-3	9.37462E-2	2.73175E1	-3.26632E1	-3.26354E1	2.68016E1	1.70023E-8	2.52318E-3	2.52318E-3	6.31288E-3	2.31882E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.16464E-1	-7.97629E-1	-9.13165E0	-9.14204E0	5.48363E-3	9.38177E-2	2.73143E1	-3.26621E1	-3.2656E1	2.67944E1	1.69945E-8	2.51567E-3	2.51567E-3	6.30187E-3	2.33393E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.16154E-1	-7.97749E-1	-9.13174E0	-9.14216E0	5.43594E-3	9.377E-2	2.72985E1	-3.2641E1	-3.26753E1	2.68238E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.16154E-1	-7.97772E-1	-9.13153E0	-9.14216E0	5.57899E-3	9.36985E-2	2.73086E1	-3.26614E1	-3.26307E1	2.68508E1	1.70173E-8	2.52492E-3	2.52492E-3	6.31817E-3	2.33507E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.16178E-1	-7.98106E-1	-9.13126E0	-9.14199E0	5.53131E-3	9.3627E-2	2.73105E1	-3.26567E1	-3.26524E1	2.6804E1	1.70244E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.31681E-2