[Scan]
initial_time=2016-02-17T18:09:42
final_time=2016-02-17T18:10:01
ip_count=19
run=1032
dataset=5
scan=152
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08803E-4
ql1_vset=
ql1_vmon=-8.16107E-1
ql1_imon=1.36105E-8
ql2_vset=
ql2_vmon=-7.9813E-1
ql2_imon=1.89178E-9
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=2.98631E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=2.95603E-10
mult1=-9.57182E-9
mult2=-2.75454E-9
rf_tmon=-4.84288E-3
rf_agc=3.2925E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=1.63136E-9
bslens_vset=-6.2E0
bslens_vmon=-6.59584E0
bslens_imon=2.53054E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20205E1
lens5a_imon=1.97838E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.05039E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53442E1
cs_ef1b_imon=3.01081E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02189E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04844E1
cs_ea1_imon=2.45712E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4008E0
lens1_imon=2.6459E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.98306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03967E1
cs_ea2_imon=1.56418E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.99135E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.53077E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11244E1
os_restr1_imon=4.29923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15402E1
os_ea1_imon=2.2949E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63761E1
os_ef1bup_imon=3.09442E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2539E0
cs_ionrep_imon=1.23613E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93384E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02013E1
cs_anode1_imon=3.1056E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.48961E-8
tplens_vset=1.4E-1
tplens_vmon=1.65225E0
tplens_imon=-1.94802E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26056E1
iondef3_imon=1.50397E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26879E1
iondef2_imon=1.5977E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02948E2
lens6_imon=2.9853E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=4.03152E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28274E0
ionrepsh_imon=1.92467E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33862E1
lens5b_imon=2.18603E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74453E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.62761E0
os_ea2_imon=-5.15643E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06131E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71077E1
cs_ef2a_imon=3.1647E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2986E-1
os_ef2bup_imon=-5.36573E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=3.47825E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.30289E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.26011E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73466E1
iondef1_imon=1.10202E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6814E1
iondef4_imon=1.08918E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.02249E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.83191E-1
olens1_imon=8.91432E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-1.87709E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47302E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.51845E-6
window_vset=0.0E0
window_vmon=1.86108E-1
window_imon=-9.11223E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8259E2
mask1_imon=2.39246E-4
mask2_vset=0.0E0
mask2_vmon=-1.86434E1
mask2_imon=-7.77877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.38641E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.68345E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.38641E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.60909E0
defgridb_imon=6.12468E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33269E1
os_fil1_imon=9.50121E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06825E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6441E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30839E1
cs_fil1_imon=1.00088E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62804E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67096E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.94473E-2
os_fil2_imon=-2.48577E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05523E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.77136E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-2.44973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16024E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22428E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.3291E-2
chamber_ion_pmon=1.70246E-8
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.15754E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.16274E-1	-7.97987E-1	-9.1311E0	-9.1424E0	5.53131E-3	9.32455E-2	2.73105E1	-3.26783E1	-3.26458E1	2.68064E1	1.70244E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.33297E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.16321E-1	-7.98106E-1	-9.13141E0	-9.14183E0	5.4121E-3	9.33886E-2	2.73057E1	-3.26609E1	-3.2645E1	2.68058E1	1.70023E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.32689E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.16298E-1	-7.98273E-1	-9.13148E0	-9.14237E0	5.26905E-3	9.3317E-2	2.73216E1	-3.26732E1	-3.26077E1	2.67972E1	1.70023E-8	2.51443E-3	2.51443E-3	6.31837E-3	2.31681E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.16131E-1	-7.98202E-1	-9.1316E0	-9.1419E0	5.6982E-3	9.35078E-2	2.72933E1	-3.26608E1	-3.26236E1	2.67908E1	1.701E-8	2.52061E-3	2.52061E-3	6.29665E-3	2.32711E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16202E-1	-7.98035E-1	-9.13167E0	-9.14226E0	5.43594E-3	9.29832E-2	2.72986E1	-3.26608E1	-3.26467E1	2.68118E1	1.701E-8	2.51203E-3	2.51203E-3	6.32356E-3	2.33109E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16321E-1	-7.98225E-1	-9.13143E0	-9.14207E0	5.48363E-3	9.32455E-2	2.73279E1	-3.26867E1	-3.26362E1	2.67854E1	1.70023E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.32487E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16631E-1	-7.98082E-1	-9.13155E0	-9.14199E0	5.34058E-3	9.33886E-2	2.73159E1	-3.26723E1	-3.2623E1	2.68142E1	1.70023E-8	2.51225E-3	2.51225E-3	6.30192E-3	2.32285E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.1625E-1	-7.97772E-1	-9.13148E0	-9.14199E0	5.6982E-3	9.33409E-2	2.73129E1	-3.26579E1	-3.26248E1	2.67856E1	1.69883E-8	2.51417E-3	2.51417E-3	6.31817E-3	2.3291E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16464E-1	-7.9813E-1	-9.1315E0	-9.14207E0	5.53131E-3	9.32932E-2	2.7285E1	-3.26638E1	-3.26484E1	2.67992E1	1.70244E-8	2.52538E-3	2.52538E-3	6.30192E-3	2.33702E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.1625E-1	-7.9844E-1	-9.13155E0	-9.14187E0	5.6982E-3	9.33647E-2	2.72941E1	-3.26597E1	-3.26297E1	2.67878E1	1.7017E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.31882E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.16345E-1	-7.98321E-1	-9.13172E0	-9.14202E0	5.81741E-3	9.31263E-2	2.72949E1	-3.26813E1	-3.26723E1	2.68028E1	1.69949E-8	2.51443E-3	2.51443E-3	6.31837E-3	2.32285E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.16202E-1	-7.9813E-1	-9.1315E0	-9.14195E0	5.67436E-3	9.32932E-2	2.72797E1	-3.26178E1	-3.26113E1	2.6777E1	1.69875E-8	2.52209E-3	2.52209E-3	6.33486E-3	2.32689E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.16369E-1	-7.98178E-1	-9.13138E0	-9.14199E0	5.60284E-3	9.3317E-2	2.73235E1	-3.26768E1	-3.26444E1	2.68022E1	1.70244E-8	2.52209E-3	2.52209E-3	6.33486E-3	2.32892E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16178E-1	-7.98011E-1	-9.13172E0	-9.14197E0	5.57899E-3	9.29117E-2	2.73405E1	-3.26891E1	-3.26024E1	2.6807E1	1.7017E-8	2.52209E-3	2.52209E-3	6.31288E-3	2.32689E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.16059E-1	-7.98249E-1	-9.13169E0	-9.1419E0	5.67436E-3	9.28879E-2	2.73322E1	-3.26667E1	-3.26343E1	2.67842E1	1.7017E-8	2.51552E-3	2.51552E-3	6.32936E-3	2.33499E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.16131E-1	-7.97772E-1	-9.13165E0	-9.14202E0	5.88894E-3	9.31263E-2	2.73207E1	-3.26639E1	-3.26056E1	2.67966E1	1.701E-8	2.52276E-3	2.52276E-3	6.31817E-3	2.33507E-2
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.16035E-1	-7.98178E-1	-9.13162E0	-9.14187E0	5.65052E-3	9.30786E-2	2.72933E1	-3.26396E1	-3.26508E1	2.67896E1	1.69955E-8	2.52815E-3	2.52815E-3	6.31817E-3	2.32513E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16488E-1	-7.98082E-1	-9.1315E0	-9.14192E0	5.45979E-3	9.34601E-2	2.73429E1	-3.26663E1	-3.26392E1	2.68112E1	1.69949E-8	2.51443E-3	2.51443E-3	6.31837E-3	2.33297E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.1625E-1	-7.98297E-1	-9.13155E0	-9.14211E0	5.48363E-3	9.3627E-2	2.72986E1	-3.26608E1	-3.26296E1	2.67349E1	1.70096E-8	2.50898E-3	2.50898E-3	6.32386E-3	2.33094E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.16107E-1	-7.9813E-1	-9.13138E0	-9.1418E0	5.6982E-3	9.33409E-2	2.73466E1	-3.26879E1	-3.26056E1	2.6814E1	1.70246E-8	2.52276E-3	2.52276E-3	6.33436E-3	2.3291E-2