[Scan]
initial_time=2016-02-17T18:10:08
final_time=2016-02-17T18:10:28
ip_count=19
run=1032
dataset=5
scan=153
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09665E0
qbias_imon=-1.08788E-4
ql1_vset=
ql1_vmon=-8.16226E-1
ql1_imon=1.3597E-8
ql2_vset=
ql2_vmon=-7.97582E-1
ql2_imon=1.89854E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=2.88725E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=2.72143E-10
mult1=-9.6294E-9
mult2=-2.80949E-9
rf_tmon=-4.24402E-3
rf_agc=3.35687E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=1.60171E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69197E0
bslens_imon=2.65672E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1964E1
lens5a_imon=1.99929E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12515E2
lens4a_imon=2.05089E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53778E1
cs_ef1b_imon=3.00252E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02049E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05084E1
cs_ea1_imon=2.43838E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38758E0
lens1_imon=2.75044E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.97729E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04249E1
cs_ea2_imon=1.54002E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84154E1
cs_ef1a_imon=3.0018E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.52995E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.29923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15312E1
os_ea1_imon=2.28048E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.08541E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25991E0
cs_ionrep_imon=1.2473E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.93391E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01641E1
cs_anode1_imon=3.10812E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=3.49366E-8
tplens_vset=1.4E-1
tplens_vmon=1.58796E0
tplens_imon=-3.20976E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26231E1
iondef3_imon=1.49748E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26933E1
iondef2_imon=1.60059E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98483E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.10662E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28935E0
ionrepsh_imon=1.94089E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33616E1
lens5b_imon=2.19612E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74321E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.63062E0
os_ea2_imon=-6.34607E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00684E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71041E1
cs_ef2a_imon=3.18596E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09841E0
os_ef2alow_imon=-2.7096E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.31662E-1
os_ef2bup_imon=-5.46303E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10715E1
os_restr2_imon=3.46924E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.3256E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.25722E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72774E1
iondef1_imon=1.12077E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6804E1
iondef4_imon=1.09026E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.02252E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=8.92076E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-1.86627E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47269E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56303E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=2.03527E-1
window_imon=-9.83303E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86494E1
mask2_imon=-7.49045E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.38641E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.70508E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.17733E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3745E0
defgridb_imon=6.07421E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33292E1
os_fil1_imon=9.48721E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07257E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64527E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30877E1
cs_fil1_imon=9.98342E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62486E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67094E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07371E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00717E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69273E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.40168E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07615E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2254E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.3291E-2
chamber_ion_pmon=1.69955E-8
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.8483E-1
res40_imon=-2.64473E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.16464E-1	-7.97772E-1	-9.13141E0	-9.14211E0	5.72205E-3	9.32217E-2	2.73075E1	-3.26756E1	-3.26089E1	2.67824E1	1.70173E-8	2.51739E-3	2.51739E-3	6.32356E-3	2.32117E-2
2.0E0	0.0E0	1.0E0	3.16E2	1.6E2	-2.09379E0	-8.16154E-1	-7.97629E-1	-9.13143E0	-9.14226E0	5.57899E-3	9.31978E-2	2.73314E1	-3.26817E1	-3.26223E1	2.6831E1	1.70023E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.33297E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.16369E-1	-7.9782E-1	-9.13115E0	-9.14211E0	5.45979E-3	9.31263E-2	2.7308E1	-3.26921E1	-3.26359E1	2.68088E1	1.70614E-8	2.52099E-3	2.52099E-3	6.28552E-3	2.32689E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.16321E-1	-7.97701E-1	-9.13162E0	-9.14211E0	5.76973E-3	9.33886E-2	2.73111E1	-3.26789E1	-3.26524E1	2.67932E1	1.70173E-8	2.51847E-3	2.51847E-3	6.32356E-3	2.32513E-2
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.16369E-1	-7.98035E-1	-9.13129E0	-9.14228E0	5.26905E-3	9.31263E-2	2.72967E1	-3.26518E1	-3.26242E1	2.6828E1	1.70173E-8	2.52276E-3	2.52276E-3	6.30202E-3	2.33109E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.16298E-1	-7.9813E-1	-9.13138E0	-9.14259E0	5.36442E-3	9.32932E-2	2.72939E1	-3.26331E1	-3.26708E1	2.6795E1	1.69949E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.32285E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.16154E-1	-7.98011E-1	-9.13146E0	-9.1419E0	5.29289E-3	9.33647E-2	2.73124E1	-3.26759E1	-3.26341E1	2.68066E1	1.69949E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.32084E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16321E-1	-7.98082E-1	-9.13141E0	-9.14218E0	5.34058E-3	9.30071E-2	2.73064E1	-3.26438E1	-3.2647E1	2.68051E1	1.69983E-8	2.5205E-3	2.5205E-3	6.30966E-3	2.32986E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.16226E-1	-7.97892E-1	-9.13177E0	-9.14195E0	5.45979E-3	9.31978E-2	2.72986E1	-3.26641E1	-3.26609E1	2.68066E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.16178E-1	-7.97939E-1	-9.13148E0	-9.14214E0	5.26905E-3	9.32455E-2	2.73116E1	-3.26537E1	-3.26608E1	2.67752E1	1.70123E-8	2.52038E-3	2.52038E-3	6.31462E-3	2.33104E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.16345E-1	-7.98011E-1	-9.13167E0	-9.14197E0	5.24521E-3	9.34362E-2	2.72974E1	-3.26909E1	-3.26425E1	2.67816E1	1.71282E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.32689E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16274E-1	-7.97987E-1	-9.13157E0	-9.1418E0	5.24521E-3	9.30786E-2	2.72757E1	-3.26735E1	-3.25954E1	2.68166E1	1.70247E-8	2.51393E-3	2.51393E-3	6.31269E-3	2.32343E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.16083E-1	-7.98249E-1	-9.13167E0	-9.14195E0	5.60284E-3	9.32217E-2	2.73598E1	-3.26398E1	-3.26488E1	2.68016E1	1.69875E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.31882E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09627E0	-8.15988E-1	-7.97987E-1	-9.13184E0	-9.14214E0	5.24521E-3	9.30071E-2	2.72827E1	-3.26419E1	-3.26095E1	2.67956E1	1.70318E-8	2.52209E-3	2.52209E-3	6.29645E-3	2.32892E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.16202E-1	-7.97892E-1	-9.13157E0	-9.14192E0	5.45979E-3	9.34839E-2	2.73165E1	-3.26627E1	-3.26302E1	2.67958E1	1.70096E-8	2.52538E-3	2.52538E-3	6.31837E-3	2.32487E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09642E0	-8.15916E-1	-7.97915E-1	-9.13167E0	-9.14202E0	5.34058E-3	9.32455E-2	2.73128E1	-3.26343E1	-3.26549E1	2.67828E1	1.70028E-8	2.51525E-3	2.51525E-3	6.32896E-3	2.32513E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09627E0	-8.1594E-1	-7.98035E-1	-9.13153E0	-9.14209E0	5.67436E-3	9.32217E-2	2.72913E1	-3.26657E1	-3.26092E1	2.67872E1	1.69949E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.32689E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09665E0	-8.15773E-1	-7.97844E-1	-9.13141E0	-9.14216E0	5.43594E-3	9.31978E-2	2.72912E1	-3.2681E1	-3.2622E1	2.68018E1	1.70023E-8	2.51116E-3	2.51116E-3	6.32936E-3	2.32689E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09696E0	-8.15964E-1	-7.97892E-1	-9.13172E0	-9.14211E0	5.67436E-3	9.32455E-2	2.73111E1	-3.26927E1	-3.26236E1	2.68569E1	1.70104E-8	2.51709E-3	2.51709E-3	6.31798E-3	2.31954E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09665E0	-8.16226E-1	-7.97582E-1	-9.13146E0	-9.14204E0	5.74589E-3	9.32455E-2	2.72774E1	-3.26933E1	-3.26231E1	2.6804E1	1.69955E-8	2.52492E-3	2.52492E-3	6.32356E-3	2.3291E-2