[Scan]
initial_time=2016-02-17T18:10:35
final_time=2016-02-17T18:10:55
ip_count=19
run=1032
dataset=5
scan=154
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08837E-4
ql1_vset=
ql1_vmon=-8.16226E-1
ql1_imon=1.35919E-8
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=1.92831E-9
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=3.08025E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=2.75362E-10
mult1=-1.00077E-8
mult2=-2.83693E-9
rf_tmon=-3.52434E-3
rf_agc=3.37456E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=1.60344E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66674E0
bslens_imon=2.81894E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20049E1
lens5a_imon=1.991E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05078E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5355E1
cs_ef1b_imon=3.00829E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04583E2
lens23_imon=1.02164E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0503E1
cs_ea1_imon=2.45099E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36835E0
lens1_imon=2.61346E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64482E1
os_ef1alow_imon=2.98991E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04153E1
cs_ea2_imon=1.55949E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84592E1
cs_ef1a_imon=2.98666E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.53266E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11117E1
os_restr1_imon=4.2931E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15155E1
os_ea1_imon=2.28661E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22806E0
cs_ionrep_imon=1.21846E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93582E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=3.10884E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=3.48657E-8
tplens_vset=1.4E-1
tplens_vmon=1.60839E0
tplens_imon=-1.08283E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26337E1
iondef3_imon=1.5065E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26803E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98461E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.07445E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27553E0
ionrepsh_imon=1.94342E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33778E1
lens5b_imon=2.20405E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.111E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.63603E0
os_ea2_imon=-7.57175E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00789E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70759E1
cs_ef2a_imon=3.1856E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08759E0
os_ef2alow_imon=-2.63032E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.28658E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10637E1
os_restr2_imon=3.47392E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.32127E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.26371E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72974E1
iondef1_imon=1.08472E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.08593E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=1.02064E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=8.91584E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13555E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47208E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.67342E-6
window_vset=0.0E0
window_vmon=2.08333E-1
window_imon=-1.10584E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.53422E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.6474E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.14849E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41059E0
defgridb_imon=6.15352E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33273E1
os_fil1_imon=9.48715E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07035E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64693E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30896E1
cs_fil1_imon=9.99927E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62282E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67201E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.99632E-2
os_fil2_imon=-2.7861E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79094E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75976E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33536E-1
cs_fil2_imon=-2.22148E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0281E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2262E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.33297E-2
chamber_ion_pmon=1.70023E-8
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.12751E-1
res40_imon=-2.6195E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.16393E-1	-7.97915E-1	-9.13115E0	-9.14199E0	5.45979E-3	9.34839E-2	2.72909E1	-3.26691E1	-3.25947E1	2.68146E1	1.69727E-8	2.52318E-3	2.52318E-3	6.32936E-3	2.32285E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09634E0	-8.16441E-1	-7.97939E-1	-9.1311E0	-9.14235E0	5.38826E-3	9.32932E-2	2.72775E1	-3.27031E1	-3.26315E1	2.6801E1	1.70033E-8	2.51709E-3	2.51709E-3	6.31798E-3	2.33123E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.16441E-1	-7.97844E-1	-9.13131E0	-9.14199E0	5.60284E-3	9.34601E-2	2.73109E1	-3.26631E1	-3.26301E1	2.68076E1	1.70318E-8	2.52027E-3	2.52027E-3	6.31858E-3	2.33699E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.16345E-1	-7.97892E-1	-9.13129E0	-9.14195E0	5.4121E-3	9.38416E-2	2.73075E1	-3.26809E1	-3.25977E1	2.68202E1	1.70033E-8	2.51919E-3	2.51919E-3	6.32858E-3	2.32928E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09642E0	-8.15988E-1	-7.97987E-1	-9.13138E0	-9.14197E0	5.53131E-3	9.35316E-2	2.73129E1	-3.26885E1	-3.26398E1	2.68028E1	1.7017E-8	2.5199E-3	2.5199E-3	6.28552E-3	2.33094E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-8.16131E-1	-7.97939E-1	-9.13134E0	-9.14176E0	5.62668E-3	9.35078E-2	2.72909E1	-3.26691E1	-3.26402E1	2.68035E1	1.70173E-8	2.51632E-3	2.51632E-3	6.29665E-3	2.32711E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09611E0	-8.16059E-1	-7.97939E-1	-9.13141E0	-9.14214E0	5.79357E-3	9.34362E-2	2.73116E1	-3.26514E1	-3.26413E1	2.68117E1	1.69955E-8	2.51739E-3	2.51739E-3	6.3074E-3	2.33507E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.16059E-1	-7.97749E-1	-9.13155E0	-9.14204E0	5.67436E-3	9.34362E-2	2.72702E1	-3.26621E1	-3.26482E1	2.6807E1	1.70096E-8	2.52318E-3	2.52318E-3	6.30192E-3	2.33297E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.16178E-1	-7.97749E-1	-9.13134E0	-9.14216E0	5.72205E-3	9.34839E-2	2.73183E1	-3.26729E1	-3.26488E1	2.6798E1	1.69949E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.32892E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.16393E-1	-7.97963E-1	-9.13141E0	-9.14204E0	5.76973E-3	9.27687E-2	2.73099E1	-3.26536E1	-3.26434E1	2.68112E1	1.69955E-8	2.51096E-3	2.51096E-3	6.29665E-3	2.3291E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.16202E-1	-7.97892E-1	-9.13136E0	-9.14214E0	5.6982E-3	9.31978E-2	2.7308E1	-3.26337E1	-3.26514E1	2.67938E1	1.70096E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.33297E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16393E-1	-7.97606E-1	-9.13167E0	-9.14211E0	5.74589E-3	9.31263E-2	2.73303E1	-3.26633E1	-3.2614E1	2.67868E1	1.69949E-8	2.51552E-3	2.51552E-3	6.31288E-3	2.33499E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16274E-1	-7.98178E-1	-9.13172E0	-9.14199E0	5.98431E-3	9.32932E-2	2.73219E1	-3.26272E1	-3.265E1	2.6783E1	1.70062E-8	2.51972E-3	2.51972E-3	6.31012E-3	2.325E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09611E0	-8.16298E-1	-7.97963E-1	-9.13157E0	-9.14183E0	5.74589E-3	9.3317E-2	2.73195E1	-3.26777E1	-3.265E1	2.68045E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.16226E-1	-7.97844E-1	-9.13155E0	-9.1419E0	5.72205E-3	9.32693E-2	2.73063E1	-3.26708E1	-3.26413E1	2.68082E1	1.69791E-8	2.51804E-3	2.51804E-3	6.30182E-3	2.32873E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09642E0	-8.1625E-1	-7.97868E-1	-9.13134E0	-9.14223E0	5.60284E-3	9.31978E-2	2.73014E1	-3.26493E1	-3.26125E1	2.68154E1	1.70173E-8	2.52599E-3	2.52599E-3	6.32356E-3	2.34105E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09634E0	-8.16178E-1	-7.9782E-1	-9.13129E0	-9.14199E0	5.55515E-3	9.33647E-2	2.73249E1	-3.26675E1	-3.26615E1	2.6813E1	1.70244E-8	2.52209E-3	2.52209E-3	6.32386E-3	2.33905E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.16107E-1	-7.97844E-1	-9.1315E0	-9.14199E0	5.6982E-3	9.33647E-2	2.73115E1	-3.2688E1	-3.26515E1	2.68124E1	1.69875E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.32487E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.16035E-1	-7.97939E-1	-9.13155E0	-9.14195E0	5.72205E-3	9.30786E-2	2.72913E1	-3.26897E1	-3.26338E1	2.68082E1	1.69891E-8	2.51709E-3	2.51709E-3	6.33388E-3	2.33514E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16226E-1	-7.98178E-1	-9.1316E0	-9.1419E0	5.60284E-3	9.32217E-2	2.72974E1	-3.26803E1	-3.26337E1	2.6801E1	1.70023E-8	2.51443E-3	2.51443E-3	6.32386E-3	2.33297E-2