[Scan]
initial_time=2016-02-17T18:12:22
final_time=2016-02-17T18:12:41
ip_count=19
run=1032
dataset=5
scan=158
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08791E-4
ql1_vset=
ql1_vmon=-8.16202E-1
ql1_imon=1.35787E-8
ql2_vset=
ql2_vmon=-7.97796E-1
ql2_imon=1.90392E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=3.00813E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=2.7281E-10
mult1=-9.37143E-9
mult2=-2.70656E-9
rf_tmon=-3.93306E-3
rf_agc=3.38938E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=1.58994E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6438E0
bslens_imon=2.47247E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20231E1
lens5a_imon=1.99218E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05213E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53376E1
cs_ef1b_imon=3.0155E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02188E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05165E1
cs_ea1_imon=2.46539E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37787E0
lens1_imon=2.68483E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.98342E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.54763E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84328E1
cs_ef1a_imon=3.00504E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.53061E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.28914E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15671E1
os_ea1_imon=2.28595E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63617E1
os_ef1bup_imon=3.08397E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26626E0
cs_ionrep_imon=1.24961E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93381E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=3.11388E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=3.49494E-8
tplens_vset=1.4E-1
tplens_vmon=1.56829E0
tplens_imon=-2.38717E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26376E1
iondef3_imon=1.51152E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26486E1
iondef2_imon=1.57382E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02995E2
lens6_imon=2.98863E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=4.03596E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24148E0
ionrepsh_imon=1.93378E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33982E1
lens5b_imon=2.17693E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.12289E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5848E0
os_ea2_imon=-6.13894E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00499E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.18668E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08099E0
os_ef2alow_imon=-2.56184E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.20249E-1
os_ef2bup_imon=-5.2504E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=3.46996E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.30459E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02019E1
cs_anode2_imon=2.25434E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73341E1
iondef1_imon=1.08219E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67827E1
iondef4_imon=1.07692E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.02238E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=8.89796E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14215E0
cs_ionaccel_imon=-1.83744E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56159E1
einzel_imon=7.70586E-6
window_vset=0.0E0
window_vmon=1.92115E-1
window_imon=-9.94115E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86062E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92611E3
multa_neg_imon=7.60815E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.4543E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.14803E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51186E0
defgridb_imon=6.27733E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33282E1
os_fil1_imon=9.47532E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07323E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64597E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30842E1
cs_fil1_imon=9.98858E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62462E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67157E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.10396E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.71542E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-1.93917E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2143E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22483E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.32315E-2
chamber_ion_pmon=1.70028E-8
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.74018E-1
res40_imon=-2.59788E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.16107E-1	-7.98249E-1	-9.13136E0	-9.14207E0	5.29289E-3	9.31978E-2	2.73063E1	-3.26832E1	-3.26148E1	2.6816E1	1.70028E-8	2.52492E-3	2.52492E-3	6.3074E-3	2.33109E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09642E0	-8.15797E-1	-7.98059E-1	-9.13119E0	-9.1423E0	5.26905E-3	9.32455E-2	2.73082E1	-3.26572E1	-3.26389E1	2.68172E1	1.701E-8	2.51632E-3	2.51632E-3	6.31278E-3	2.33507E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09642E0	-8.16202E-1	-7.98178E-1	-9.13134E0	-9.14204E0	5.53131E-3	9.33647E-2	2.72808E1	-3.26758E1	-3.25994E1	2.6807E1	1.70017E-8	2.52697E-3	2.52697E-3	6.3074E-3	2.32255E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.16154E-1	-7.98368E-1	-9.13136E0	-9.14195E0	5.43594E-3	9.32217E-2	2.73261E1	-3.26975E1	-3.26506E1	2.67848E1	1.69955E-8	2.52061E-3	2.52061E-3	6.31278E-3	2.32711E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09642E0	-8.16011E-1	-7.98249E-1	-9.1315E0	-9.14185E0	5.50747E-3	9.33409E-2	2.7321E1	-3.26396E1	-3.26178E1	2.67926E1	1.70173E-8	2.52061E-3	2.52061E-3	6.31817E-3	2.34705E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16226E-1	-7.98178E-1	-9.13134E0	-9.1418E0	5.14984E-3	9.33647E-2	2.72979E1	-3.26633E1	-3.26266E1	2.6813E1	1.70246E-8	2.51417E-3	2.51417E-3	6.3074E-3	2.3291E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.16083E-1	-7.98011E-1	-9.13172E0	-9.14221E0	5.34058E-3	9.3317E-2	2.73225E1	-3.26518E1	-3.26428E1	2.6792E1	1.69949E-8	2.51443E-3	2.51443E-3	6.31837E-3	2.33499E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.1625E-1	-7.97868E-1	-9.13124E0	-9.14197E0	5.22137E-3	9.30548E-2	2.72973E1	-3.26723E1	-3.26212E1	2.68142E1	1.70096E-8	2.52318E-3	2.52318E-3	6.29645E-3	2.32892E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16274E-1	-7.98011E-1	-9.13117E0	-9.14192E0	5.29289E-3	9.30786E-2	2.72939E1	-3.26602E1	-3.26148E1	2.68442E1	1.69801E-8	2.5188E-3	2.5188E-3	6.32936E-3	2.32084E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.1594E-1	-7.98082E-1	-9.13167E0	-9.14202E0	4.95911E-3	9.31263E-2	2.7351E1	-3.26689E1	-3.26303E1	2.6795E1	1.70173E-8	2.52061E-3	2.52061E-3	6.28592E-3	2.33706E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.15988E-1	-7.98011E-1	-9.13165E0	-9.14207E0	5.43594E-3	9.3317E-2	2.72974E1	-3.26726E1	-3.2659E1	2.67986E1	1.70243E-8	2.52139E-3	2.52139E-3	6.32978E-3	2.33905E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16178E-1	-7.97749E-1	-9.13196E0	-9.14173E0	5.29289E-3	9.34362E-2	2.72793E1	-3.26603E1	-3.262E1	2.68154E1	1.70028E-8	2.52169E-3	2.52169E-3	6.31817E-3	2.32315E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.15988E-1	-7.9782E-1	-9.13191E0	-9.14199E0	5.31673E-3	9.33409E-2	2.73235E1	-3.26689E1	-3.2615E1	2.681E1	1.69867E-8	2.52473E-3	2.52473E-3	6.31299E-3	2.32049E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.16107E-1	-7.97796E-1	-9.13169E0	-9.14171E0	5.24521E-3	9.31978E-2	2.72935E1	-3.26648E1	-3.26724E1	2.68099E1	1.70096E-8	2.52209E-3	2.52209E-3	6.33486E-3	2.31882E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.16083E-1	-7.97892E-1	-9.1315E0	-9.14187E0	5.31673E-3	9.31025E-2	2.73219E1	-3.26831E1	-3.26434E1	2.67782E1	1.69962E-8	2.53083E-3	2.53083E-3	6.30212E-3	2.32928E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.15821E-1	-7.97606E-1	-9.13174E0	-9.14192E0	5.14984E-3	9.2864E-2	2.73334E1	-3.26756E1	-3.26036E1	2.67902E1	1.70096E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.32084E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.15964E-1	-7.97558E-1	-9.13174E0	-9.14195E0	5.07832E-3	9.2864E-2	2.73069E1	-3.26615E1	-3.26482E1	2.68076E1	1.70028E-8	2.51739E-3	2.51739E-3	6.31278E-3	2.32711E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16226E-1	-7.97725E-1	-9.13131E0	-9.14192E0	5.31673E-3	9.30786E-2	2.7324E1	-3.26531E1	-3.26461E1	2.68105E1	1.70096E-8	2.52318E-3	2.52318E-3	6.3074E-3	2.32084E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16107E-1	-7.97868E-1	-9.13126E0	-9.1418E0	5.126E-3	9.32455E-2	2.72968E1	-3.26732E1	-3.26337E1	2.67529E1	1.70028E-8	2.51847E-3	2.51847E-3	6.31278E-3	2.34305E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16202E-1	-7.97796E-1	-9.1315E0	-9.14183E0	5.24521E-3	9.34601E-2	2.73341E1	-3.26486E1	-3.26376E1	2.67827E1	1.70028E-8	2.51632E-3	2.51632E-3	6.31817E-3	2.32315E-2