[Scan]
initial_time=2016-02-17T18:12:48
final_time=2016-02-17T18:13:08
ip_count=19
run=1032
dataset=5
scan=159
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08774E-4
ql1_vset=
ql1_vmon=-8.16226E-1
ql1_imon=1.3617E-8
ql2_vset=
ql2_vmon=-7.97915E-1
ql2_imon=1.91731E-9
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=3.18098E-10
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=2.56956E-10
mult1=-9.16835E-9
mult2=-2.61155E-9
rf_tmon=-5.27045E-3
rf_agc=3.29434E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=1.64317E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66857E0
bslens_imon=2.6459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20078E1
lens5a_imon=1.98439E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05061E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53688E1
cs_ef1b_imon=3.01405E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.0216E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04959E1
cs_ea1_imon=2.44805E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3761E0
lens1_imon=2.51494E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.9845E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03914E1
cs_ea2_imon=1.55293E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=3.00144E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.53244E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=4.30031E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15353E1
os_ea1_imon=2.27391E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63431E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25387E0
cs_ionrep_imon=1.21634E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91912E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=3.111E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.49039E-8
tplens_vset=1.4E-1
tplens_vmon=1.56416E0
tplens_imon=-2.70572E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26408E1
iondef3_imon=1.48392E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26714E1
iondef2_imon=1.58302E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.98498E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=4.05097E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27274E0
ionrepsh_imon=1.94298E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33882E1
lens5b_imon=2.18189E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74483E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.61076E0
os_ea2_imon=-5.00633E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00435E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.18921E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06657E0
os_ef2alow_imon=-2.63032E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.28658E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10889E1
os_restr2_imon=3.475E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.32052E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.26443E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72697E1
iondef1_imon=1.07476E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67734E1
iondef4_imon=1.0762E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.02164E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=8.90945E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11032E0
cs_ionaccel_imon=-1.77257E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47093E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56153E1
einzel_imon=7.77073E-6
window_vset=0.0E0
window_vmon=1.64484E-1
window_imon=-1.08421E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86524E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.43118E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.79763E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.06662E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.66246E0
defgridb_imon=6.07559E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3328E1
os_fil1_imon=9.49063E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07599E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64635E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=9.99417E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63273E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67155E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.952E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.7015E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.08333E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.44005E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22626E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.34516E-2
chamber_ion_pmon=1.69949E-8
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.40982E-1
res40_imon=-2.54022E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16345E-1	-7.97868E-1	-9.13179E0	-9.14226E0	5.55515E-3	9.29832E-2	2.73181E1	-3.26596E1	-3.26449E1	2.67798E1	1.70318E-8	2.51847E-3	2.51847E-3	6.31817E-3	2.31919E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.16226E-1	-7.97939E-1	-9.13146E0	-9.14207E0	5.29289E-3	9.31501E-2	2.73021E1	-3.26621E1	-3.26458E1	2.681E1	1.701E-8	2.51525E-3	2.51525E-3	6.30202E-3	2.32315E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16059E-1	-7.97868E-1	-9.13143E0	-9.14192E0	5.4121E-3	9.31263E-2	2.73283E1	-3.26689E1	-3.26451E1	2.67862E1	1.70023E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.33297E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.16202E-1	-7.9751E-1	-9.1316E0	-9.14168E0	5.24521E-3	9.34839E-2	2.728E1	-3.26627E1	-3.26346E1	2.68118E1	1.70033E-8	2.51603E-3	2.51603E-3	6.32328E-3	2.33123E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.16298E-1	-7.97606E-1	-9.13134E0	-9.14223E0	5.14984E-3	9.31501E-2	2.73472E1	-3.26488E1	-3.26254E1	2.67789E1	1.70318E-8	2.52585E-3	2.52585E-3	6.32978E-3	2.32873E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.16011E-1	-7.97796E-1	-9.13155E0	-9.14197E0	5.05447E-3	9.31978E-2	2.73051E1	-3.26476E1	-3.26512E1	2.67968E1	1.70096E-8	2.51552E-3	2.51552E-3	6.30192E-3	2.32285E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16107E-1	-7.97629E-1	-9.13172E0	-9.14221E0	5.24521E-3	9.31025E-2	2.73327E1	-3.262E1	-3.2632E1	2.68136E1	1.70096E-8	2.52209E-3	2.52209E-3	6.31014E-3	2.33094E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.16107E-1	-7.97701E-1	-9.13191E0	-9.14218E0	4.95911E-3	9.3174E-2	2.72973E1	-3.26579E1	-3.26218E1	2.6807E1					
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.16274E-1	-7.97653E-1	-9.13167E0	-9.14197E0	5.53131E-3	9.30309E-2	2.72817E1	-3.26711E1	-3.26098E1	2.68106E1	1.69949E-8	2.51662E-3	2.51662E-3	6.29645E-3	2.33297E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.16202E-1	-7.97653E-1	-9.13177E0	-9.14204E0	5.38826E-3	9.33886E-2	2.72781E1	-3.26735E1	-3.2638E1	2.67917E1	1.7017E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.34312E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16202E-1	-7.97582E-1	-9.13165E0	-9.14209E0	5.31673E-3	9.32455E-2	2.73015E1	-3.26554E1	-3.26494E1	2.67824E1	1.69949E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.3148E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.16035E-1	-7.97653E-1	-9.13146E0	-9.14192E0	5.14984E-3	9.2864E-2	2.72853E1	-3.26344E1	-3.26296E1	2.67887E1	1.70096E-8	2.5188E-3	2.5188E-3	6.33486E-3	2.32689E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.15964E-1	-7.97987E-1	-9.13112E0	-9.14171E0	5.19753E-3	9.33886E-2	2.7311E1	-3.26596E1	-3.26437E1	2.67992E1	1.70023E-8	2.51334E-3	2.51334E-3	6.32936E-3	2.32892E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.16154E-1	-7.97987E-1	-9.13131E0	-9.14164E0	5.19753E-3	9.31501E-2	2.73081E1	-3.26621E1	-3.26296E1	2.678E1	1.70318E-8	2.52169E-3	2.52169E-3	6.30202E-3	2.32315E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.16345E-1	-7.97772E-1	-9.13181E0	-9.14164E0	5.45979E-3	9.29356E-2	2.72757E1	-3.26633E1	-3.26512E1	2.67992E1	1.70023E-8	2.52099E-3	2.52099E-3	6.32386E-3	2.33702E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.16345E-1	-7.97725E-1	-9.13165E0	-9.14178E0	5.6982E-3	9.3317E-2	2.73122E1	-3.26803E1	-3.26585E1	2.67866E1	1.70023E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.33905E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16202E-1	-7.97391E-1	-9.13198E0	-9.14197E0	5.36442E-3	9.3317E-2	2.73237E1	-3.265E1	-3.26302E1	2.68105E1	1.69955E-8	2.52599E-3	2.52599E-3	6.3074E-3	2.33905E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16178E-1	-7.97892E-1	-9.13188E0	-9.1419E0	5.26905E-3	9.35316E-2	2.7308E1	-3.26845E1	-3.26486E1	2.67926E1	1.70096E-8	2.51552E-3	2.51552E-3	6.32936E-3	2.34109E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16298E-1	-7.97725E-1	-9.13162E0	-9.14192E0	5.45979E-3	9.31263E-2	2.72847E1	-3.26765E1	-3.2605E1	2.68388E1	1.6982E-8	2.52131E-3	2.52131E-3	6.31269E-3	2.32733E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.16226E-1	-7.97915E-1	-9.13153E0	-9.14168E0	5.34058E-3	9.30309E-2	2.72697E1	-3.26714E1	-3.26408E1	2.67734E1	1.69949E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.34516E-2